HISAYUKI AOYAMA
| Department of Mechanical and Intelligent Systems Engineering | Professor |
| Cluster II (Emerging Multi-interdisciplinary Engineering) | Professor |
| Office for Advanced IT and Global Creative Engineering Education | Professor |
- Profile:
Desktop factory that is composed of many miniature robots with micro tools and sensors has been developed for providing micro manufacturing system.
Researcher Information
Field Of Study
Educational Background
Member History
- Apr. 2006 - Mar. 2007
理事, 精密工学会, Society - Mar. 2005 - Mar. 2007
International Cooperation, Society - Mar. 2005 - Mar. 2007
国際交流担当, 精密工学会, Society - 2004 - 2005
機素潤滑設計委員会委員, 日本機械学会, Society - 2003 - 2004
Program Commitee 2003 Annual Meeting, American Society of Precision Engineer, Society - 2003 - 2004
2003,2004年次大会プログラム組織委員, アメリカ精密工学会, Society - 2002 - 2002
学術交流委員会 国際協力担当, 精密工学会, Society - 1998 - 2000
事業部会学術交流委員会幹事, 精密工学会, Society
Research Activity Information
Paper
- Moving Object Prediction and Grasping System of Robot Manipulator
Ching-Chang Wong; Ming-Yi Chien; Ren-Jie Chen; Hisayuki Aoyama; Kai-Yi Wong
IEEE Access ( Volume: 10), IEEE Access ( Volume: 10), 10, 20159-20172, 28 Feb. 2022, Peer-reviwed
Scientific journal, English - Deep Reinforcement Learning Design for Collision Avoidance of Dual-Arm Robot
Ching-Chang Wong; Hisasuki Aoyama
The International Conference on System Science and Engineering 2020, 1, 1025, 130-136, 01 Sep. 2020, Peer-reviwed
International conference proceedings, English - Deep Reinforcement Learning Design for Collision Avoidance of Dual-Arm Robot
Ching-Chang Wong; Hisasuki Aoyama
The International Conference on System Science and Engineering, The International Conference on System Science and Engineering, 16, 1, 130-135, 01 Sep. 2020, Peer-reviwed
International conference proceedings, English - Personal Identification Using a Delaunay Triangle and Optic Disc Retinal Vascular Pattern
Isoon Kanjanasurat; Boonchana Purahong; Hisayuki Aoyama; Chawalit Benjangkaprasert; Chuchart Pintavirooj
International Journal of Innovative Computing, Information and Control, IJICIC, 16, 3, 879-897, 01 Jun. 2020, Peer-reviwed
Scientific journal, English - Development of a Micro-manipulator for Bio-Targets Using Micro-Flows
Jean-Charles Pelletier; Hisayuki Aoyama; Yuuka Irie; Nadine Piat
Journal of Robotics and Mechatronics, Fuji Publish Co.Inc., 30, 4, 638-649, 10 Aug. 2018, Peer-reviwed, In the field of bio-engineering, there is a need for a
specialized manipulator that protect targets from hard
physical contact. The solution proposed in this paper
is a system that controls micro flows to manipulate
a micro-sized bio-target. The manipulation principle
and system structure are presented. In addition, a simple
model that uses physically observable parameters
is constructed to capture the flow-target interactions
following a chemically assisted flow visualization. The
experimental results of a prototype are presented, and
the feasibility is discussed. The purpose of this paper
is to prove the feasibility of this manipulation method.
Further developments are introduced, highlighting the
full potential of the prototype.
Scientific journal, English - Development of a Micro-manipulator for Bio-Targets Using Micro-Flows
Jean-Charles Pelletier; Hisayuki Aoyama; Yuuka Irie; Nadine Piat
Journal of Robotics and Mechatronics, FUJI Piblish CO Inc, 30, 4, 638-649, 10 Aug. 2018, Peer-reviwed
Scientific journal, Japanese - Chemically assisted visualization for fluidic micro manipulation
Pelletier Jean-Charles; Yuuka Irie; Chisato Kanamori; Hisayuki Aoyama; Nadine Piat
2017 IEEE International Conference on Mechatronics and Automation, ICMA 2017, Institute of Electrical and Electronics Engineers Inc., 799-804, 23 Aug. 2017, Peer-reviwed, Researchers and industrials from various fields are looking for reliable manipulators in a liquid environment. In this paper a tool for flow vitalization using chemicals to check the flows around the manipulated as well as a configuration for micro-manipulation are presented. Our research is bio-engineering oriented since we aim at manipulating a bio-target
a cell. It is challenging since these targets can be damaged easily through direct contact and are highly deformable. The successful manipulation would make the observation, selection or alteration of such targets easier, leading to great improvement in the medical and pharmaceutical fields. This paper discuss the primary challenges we face to achieve our goals. As a first step in a bigger project a first prototype was built, tested and analyzed.
International conference proceedings, English - Chemically assisted visualization for fluidic micro manipulation
Pelletier Jean-Charles; Yuuka Irie; Chisato Kanamori; Hisayuki Aoyama; Nadine Piat
2017 IEEE International Conference on Mechatronics and Automation, ICMA 2017, Institute of Electrical and Electronics Engineers Inc., 799-804, 23 Aug. 2017, Peer-reviwed, Researchers and industrials from various fields are looking for reliable manipulators in a liquid environment. In this paper a tool for flow vitalization using chemicals to check the flows around the manipulated as well as a configuration for micro-manipulation are presented. Our research is bio-engineering oriented since we aim at manipulating a bio-target
a cell. It is challenging since these targets can be damaged easily through direct contact and are highly deformable. The successful manipulation would make the observation, selection or alteration of such targets easier, leading to great improvement in the medical and pharmaceutical fields. This paper discuss the primary challenges we face to achieve our goals. As a first step in a bigger project a first prototype was built, tested and analyzed.
International conference proceedings, English - Chemically Assisted Visualization for Fluidic Micro Manipulation
Pelletier Jean-Charles; Yuuka Irie; Chisato Kanamori; Hisayuki Aoyama; Nadine Piat
Prof.IEEE Int.Conf. Robotics and Mechatronics, 2017, 1, 230-235, 07 Aug. 2017, Peer-reviwed
International conference proceedings, English - High performance periodical paths tracking of two-dimensional handheld micromanipulator using explicit model predictive control
Sungwan Boksuwan; Thepjit Cheypoca; Abdulhafiz Chesof; Chisato Kanamori; Sumit Panaudomsup; Techin Siritechavong; Hisayuki Aoyama; Kongsak Anuntahirunrat
ACM International Conference Proceeding Series, Association for Computing Machinery, 127852, 274-278, 18 Feb. 2017, Peer-reviwed, The paper proposes an explicit model predictive control framework for a two-dimensional handheld micromanipulator to track periodical reference paths within microscopic working range and for all holding angles of users' hand. The control objective is to achieve a minimum tracking error and a wide bandwidth. The micromanipulator's design is oriented to such bio cell treatments. Its structure consists of two flexible decoupling links, each of which is driven by the combination of electric coils and permanent magnets as an actuator. In the experiments, the proposed framework is compared with two types of PID controllers, parameters of which are designed by Skogestand's IMC and IMC method based on the underdamped transfer function, respectively. The experimental results exhibit the effectiveness of the two-dimensional handheld micromanipulator controlled by the model predictive control framework over the PID controller ones.
International conference proceedings, English - Path Planning and Obstacle Avoidance Approaches for Robot Arm
Tse-Ching Lai; Sheng-Ru Xiao; Hisayuki Aoyama; Ching-Chang Wong
2017 56TH ANNUAL CONFERENCE OF THE SOCIETY OF INSTRUMENT AND CONTROL ENGINEERS OF JAPAN (SICE), IEEE, 334-337, 2017, Peer-reviwed, In this paper, a new obstacle avoidance method based on Non Uniform Rational B-splines (NURBS) is proposed for a robot arm. A safe distance between the end-effector of robot arm and obstacle is considered to avoid the collision. A safety formula for the weights of NURBS is proposed so that the proposed method is able to generate a safer path. Some simulation results are presented to illustrate the effectivity of the proposed method.
International conference proceedings, English - Portable ECG real time signal monitoring device
Boonchana Purahong; Somsin Tongkraira; Vanvisa Chutchavong; Hideyuki Nomura; Chisato Kanamori; Hisayuki Aoyama
Proceedings of 2016 the 6th International Workshop on Computer Science and Engineering, WCSE, 2016
International conference proceedings - Approximation of Linear Gain Slope Equalizer using Bernstein-Stancu Polynomials
Vanvisa Chutchavong; Kanok Janchitrapongvej; Hideyuki Nomura; Chisato Kanamori; Hisayuki Aoyama
PROCEEDINGS OF THE 2016 IEEE REGION 10 CONFERENCE (TENCON), IEEE, 3344-3348, 2016, Peer-reviwed, This paper presents a design of linear gain slope equalizer for correcting the linear gain distortion. It is based on the Bernstein-Stancu polynomials, where the well-known and readily available approximated of the desired transfer function are applied. As it is known that the Bernstein-Stancu polynomials have the several advantages. For example, there is a flexible parameter as a that can be used to adjust the magnitude response for the best result. If the parameter a equals to zero, it becomes to the classical Bernstein polynomial. In addition, the phase response is linear. As the results, the proposed method is capable of designing linear gain slope equalizer which is also shown to be efficient performance without degrading its phase characteristics. The stability of the approximated of the transfer function can guarantee with Mihailov's criterion.
International conference proceedings, English - Empirical Analysis of the Relationship Between Trust and Ratings in Recommender Systems
Kulwadee Somboonviwat; Hisayuki Aoyama
Intelligent Information and Database Systems, ACIIDS 2016, Pt I, SPRINGER-VERLAG BERLIN, 9621, 116-126, 2016, Peer-reviwed, User-based collaborative filtering (CF) is a widely used recommendation method that suggests items to users based on ratings of other users in the system. The performance of user-based CF can be degraded due to its inherent weaknesses, such as data sparsity and cold start problems. To address these weaknesses, many researchers have proposed to incorporate trust information into user-based CF. However, as reported in many recent works on trust aware recommendation, effectively exploiting trust in recommendation is not straightforward due to insufficient understanding of the relationship between trust and ratings. This paper empirically analyses real-world ratings data and their associated trust networks. Specifically, we focus our analysis on comparative characteristics of cold users vs. non-cold users. Our results show that the characteristics of cold users and non-cold users are significantly different.
International conference proceedings, English - Development of piezo driven micro tilting stage in SEM for 3D microscopic observation
Yoshihiro Tanaka; Hisayuki Aoyama; Hirofumi Miura; Futoshi Iwata
Prof. of 13th Automation Technology, 45-48, 14 Nov. 2015, Peer-reviwed, Development of piezo driven micro tilting stage in SEM
for 3D microscopic observation is discussed and the experimental results were shown.
International conference proceedings, English - PARALLEL WIRES DRIVEN MICRO MANIPULATOR
Hisayuki Aoyama; Tateko Senda
Proc. of 30th ASPE Annual Meeting, 256-259, 04 Nov. 2015, Design of PARALLEL WIRES DRIVEN MICRO MANIPULATOR and the experimental results are discussed for the flexible tool spatial manipulation.
International conference proceedings, English - Impact Piezo-Driven Micro Dispenser and Precise Miniature XY Stage
Yuuka Irie; Shinnosuke Hirata; Chisato Kanamori; Hisayuki Aoyama
JOURNAL OF ROBOTICS AND MECHATRONICS, FUJI TECHNOLOGY PRESS LTD, 27, 3, 259-266, Jun. 2015, Recently, micro-droplet dispensation has been required in printed-electronics (PE) technology. Devices with micro dispensing mechanism are of key importance in achieving a higher performance with these products. In fact, it is very difficult for the conventional dispenser to squeeze highly viscous liquid with picoliter resolution. This paper describes the development of a dispensing mechanism comprising a dispensing device and XY stage, both driven by the piezo impulsive force. The dispensing device is mainly composed of a pipette and a taper needle that is driven by a piezoelectric element. When the needle passes through the pipette, a droplet of the liquid adheres to the needle-tip end. A micro droplet can be transcribed to a target surface by bringing the droplet at the needle-tip end in contact with the target surface. On the contrary, in the XY stage, the small tables on the V-shaped grooves can be driven by the impulsive force generated by the mass connected to the piezoelectric element. The X stage is stacked on the Y stage, which allows fine positioning in the plane. In the experiment, an array of a small amount of 0.2-picoliter droplets was successfully developed on the glass plate.
Scientific journal, English - A Heated Needle Micromanipulator with Hybrid Control for Heat-Caused Denaturation in Proteins
Sungwan Boksuwan; Taworn Benjanarasuth; Hisayuki Aoyama
2015 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), IEEE, 66-70, 2015, Peer-reviwed, The paper proposes a micromanipulator with the heated needle as an end effector in order to transfer heat around a micro area of a sample, egg whites. The proposed micromanipulator is controlled by a combination of an explicit model predictive control and PID controller, so-called the hybrid control, to accomplish tracking performances of several reference paths or shapes of heating the specific area. A tungsten needle wrapped with nichrome wire is used as a heat source mechanism and is connected to the two dimensional micromanipulator. The experimental results reveal that the heated needle can provide high temperature up to 50 degrees C with 1 0 mu m needle tip diameter. In addition, the results indicate the effective operations for a point heating and denaturing egg whites in micro scale. Moreover, the heated needle is able to heat along the desired paths (a circle, ellipse, square or triangle) with the error less than 2 mu m from the center of measurement.
International conference proceedings, English - Tremor suppression for handheld micromanipulator using robust hybrid control
Sungwan Boksuwan; Taworn Benjanarasuth; Chisato Kanamori; Hisayuki Aoyama
International Conference on Control, Automation and Systems, IEEE Computer Society, 267-271, 16 Dec. 2014, Peer-reviwed, This paper proposes a suppression of tremor effects, fluctuations caused by a user's hand, on a handheld micromanipulator by means of a robust hybrid control scheme. The proposed control scheme is a combination between an explicit model predictive control and a PID controller. The advantage of the PID controller is a robustness. It is suitable for handling the holding angle changes. The explicit model predictive control provides the excellent tracking performance. In addition, the robust hybrid control can handle tremor effects successfully. The control objective is to achieve robust tracking performance, to dampen the vibration of the mechanism and to suppress a disturbance, a tremor. The experimental results are used to investigate the effectiveness of the proposed method.
International conference proceedings, English - Robust hybrid control for two-dimensional handheld micromanipulator
Sungwan Boksuwan; Benjanarasuth; Chisato Kanamori; Hisayuki Aoyama
J. of Robotics and Mechatronics, Fuji Express, 26, 3, 331-340, 01 Oct. 2014, Peer-reviwed
Scientific journal, English - Design and Control of Magnetic Driven Active Handheld Medical Micromanipulator with Explicit Model Predictive Control
Sungwan Boksuwan; Benjanarasuth; Chisato Kanamori; Hisayuki Aoyama
Proc. of Control, automation and systems, 337-380, 24 Jun. 2014, Peer-reviwed
International conference proceedings, English - Tremor Suppression for Handheld Micromanipulator using Robust Hybrid Control
Sungwan Boksuwan; Taworn Benjanarasuth; Chisato Kanamori; Hisayuki Aoyama
2014 14TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS 2014), IEEE, 267-271, 2014, Peer-reviwed, This paper proposes a suppression of tremor effects, fluctuations caused by a user's hand, on a handheld micromanipulator by means of a robust hybrid control scheme. The proposed control scheme is a combination between an explicit model predictive control and a PID controller. The advantage of the PID controller is a robustness. It is suitable for handling the holding angle changes. The explicit model predictive control provides the excellent tracking performance. In addition, the robust hybrid control can handle tremor effects successfully. The control objective is to achieve robust tracking performance, to dampen the vibration of the mechanism and to suppress a disturbance, a tremor. The experimental results are used to investigate the effectiveness of the proposed method.
International conference proceedings, English - Precise Multiple Wires Driven Manipulation with Visual Image Measurement
Hisayuki Aoyama; Naoyuki Oko; Nadine Le Fort-Piat; Takashi Usuda
2014 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), IEEE, 70-73, 2014, Peer-reviwed, There are various precise spatial manipulators that have been employed in the field micro engineering, medical surgery and biology. For this reason, a lot of researches have been done, and a variety of control methods and mechanisms have been developed. However it is very small cases to give the wider working ranges in XYZ as well as large angular motion to such a scalpel or a syringe under the microscope. Because many spatial manipulators with multi degrees of freedom incorporate with mechanical linkages and the stacked linear stages, thus there are so difficult to implement into the limited space under the instrument. On the other hand, micro actuators are also used for micro manipulation, but the working range is so limited as several micrometer. In this report, we are proposing, designing and developing the simple spatial manipulator capable of controlling the position, the rotation angle phi and the inclined angle theta of the micro tool with multiple parallel wires driven mechanism. In our research, the micro injector can be controlled so that it can face to the small sample with various angular position.
International conference proceedings, English - Development of microscopic hardness and stiffness investigation system with microrobot 2nd report, vision based precise navigation
Montree PAKKRATOKE; Shinnosuke HIRATA; Chisato KANAMORI; Hisayuki AOYAMA
Journal of Robotics and Mechatronics, Fuji Technology Press Ltd., 25, 1, 97-105, Feb. 2013, Peer-reviwed, A microsurface measurement system that is composed of the microrobot with the indenter and a vision based navigation system is proposed for investigating hardness and stiffness of such microparts. Here the tiny robot with the electromagnetic legs and the piezo elements incorporates with an electromagnetic driven microforce generator. This force generator can provide small forces up to 17 mN with 50 µN resolutions and push down the microindenter to the surface. The displacement of the indenter head can be also measured by the Linear Valuable Differential Transformer (LVDT) on machine. Thus, this mechanism can generate the small force and monitor the depth behaviour of the indenter during whole dwell time. Since the overall size of this mechanism is small enough to implement on the piezo-driven microrobot, the tiny robot with the microindenter is capable tomove precisely step by step with 1 µm per step so that the microindenter could be penetrated anywhere on the sample surface. With the help of an image processing technique, the vision based coordination system with the local close-up view and the overall global view has been developed to identify the locations of small robot and the indenter precisely within ±3 µm accuracy over the working range. In the experimental results, several results that the indentation load-depth characteristics of the unhealthy human tooth are measured automatically at the specified point are discussed.
Scientific journal, English - Phase difference technique for material classification by using tuning fork with piezoelectric resonator
Suwilai Areejit; Pitikhate Sooraksa; Hisayuki Aoyama
Advanced Materials Research, 750-752, 2225-2231, 2013, Peer-reviwed, A tuning fork with piezoelectric (TFP) is an electro-mechanical device
its principle performance is based on specific frequency and limited voltage. As the principle, the device can result output significantly. This paper presents a material classification using phase difference value that is received from touching between material and modified TFP. For the modified TFP, it is customized by a millimeter needle. The frequency response method on Bode plot is used to observe the modified TFP behavior, and to select a specific frequency. The first-order model with cascade notch filters is employed to identify mathematical model of the TFP, and to verify the model by simulation. Experimentation is considered on 2 touching techniques: a shear-force type and a tapping mode type. There are hard plastic, iron, silicon rubber, vinyl eraser and hydrogel for test material. The results are described by both time series plots of input-output signals and numerical table of shifted phase. The technique can employed to classify the test materials effectively and explicitly. © (2013) Trans Tech Publications, Switzerland.
International conference proceedings, English - mprovement of the needle-type dispenser for precise micro-droplet dispensation -Gap measurement between the needle tip and the target surface based on needle vibration
Shinnosuke Hirata; Kazuki Hirose; Yuuka Irie; Hisayuki Aoyama
Journal of Robotics and Mechatronics, 24, 4, 284-290, Dec. 2012, Peer-reviwed
Scientific journal, English - Contact-Free Handling System for a Red-Blood Cell Using Multiple Micro Flows
Asa Ichinozuka; Hisayuki Aoyama
Proc. of 5th International Conference on Positioning Technology, 14-15, Nov. 2012
Scientific journal, English - High DOF Micromanipulation Using the Multi-needle-type Capillary –Resizable Capillary Tip for Pick-and-place Operation
Shinnosuke Hirata; Takuya Shigeta; Hisayuki Aoyama
Proc. of ACTUATOR 12 International Conference and Exhibition on New Actuators and Drive Systems, 587-590, Jun. 2012
Scientific journal, English - Evaluation of micro-gap control of the needle-type dispenser for precise micro-droplet dispensation
Shinnosuke Hirata; Kazuki Hirose; Yuuka Irie; Hisayuki Aoyama
Proc. of International Workshop on Piezoelectric Materials and Applications, CD-ROM, 2aOB05, May 2012
Scientific journal, English - Development of Microscopic Hardness and Stiffness Investigation System with Micro Robot
Montree Pakkratoke; Shinnosuke Hirata; Chisato Kanamori; Hisayuki Aoyama
Journal of Robotics and Mechatronics, 24, 1, 123-132, Feb. 2012, Peer-reviwed
Scientific journal, English - Development of a Miniature Hemispherical Tilt Stage Using Piezoelectric Actuators
Shinnosuke HIRATA; Masato TAKIZAWA; Hiroaki SHIRATORI; Yuuka IRIE; Chisato KANAMORI; Hisayuki AOYAMA
Journal of the Japan Society for Precision Engineering, Japan Society for Precision Engineering, 78, 1, 92-97, 2012
Scientific journal - Development of the Miniature Hemispherical Tilt Stage Driven by Stick-slip Motion using Piezoelectric Actuators
Hiroaki Shiratori; Masato Takizawa; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
MECATRONICS REM 2012, IEEE, 251-257, 2012, Peer-reviwed, Miniature hemispherical stage has been proposed for improvement of microscopic observation and manipulation. The stage can be rotated in arbitrary direction under a scanning electron microscope. The stage is composed of a hemisphere and three drive units. Besides, the drive unit is composed of a drive ball and two piezoelectric actuators. The drive ball is moved by two piezoelectric actuators, which are orthogonally arranged, in a plane. The movable plane of each drive ball is same as the tangent plane between the hemisphere and each drive ball. The hemisphere on three drive balls is rotated in arbitrary direction by stick-slip motion of each drive ball. The rotational direction of the stage can be controlled by the movable directions of each drive ball. In this paper, the design and fabrication of the small hemispherical stage are described. The rotational directions of the stage are evaluated using a laser autocollimator.
International conference proceedings, English - 圧電素子を用いた小型半球チルトステージの開発 -第1報: 設計と試作及び微動傾斜の評価
平田慎之介; 滝澤将人; 白取寛章; 入江優花; 金森哉吏; 青山尚之
精密工学会誌, 78, 1, 12-16, Jan. 2012, Peer-reviwed
Scientific journal, Japanese - Development of multi-needle-type capillary; high DOF micromanipulator using surface tension
Takuya Shigeta; Hisayuki Aoyama; Shinnosuke Hirata
2012 IEEE International Conference on Mechatronics and Automation, ICMA 2012, 819-824, 2012, In recent years, electrical equipments, including their components, have seen a downsizing. Thus there is a growing need for micromanipulators for microscopic objects. Direct holding type micromanipulators have become popular. However, manipulating microscopic objects with direct holding type micromanipulators, there is a danger of damaging the objects. Manipulation using surface-tension involves holding the object by a droplet created on the tip of capillary. There is no direct contact between the capillary and the object. However, this way of manipulation does not support multiple degrees of freedom. Multi-needle type capillary is composed of several thin needles which are arranged cylindrically. These needles are used as hypothetical capillary. Such a multi-needle capillary can hold microscopic objects with the surface tension of droplet on the capillary tip. The multi-needle capillary tip can be reconfigured by a linear movement of each needle. Accordingly, the droplet on the capillary-tip is also reshaped, so that a microscopic object in contact with the capillary-tip droplet can be manipulated. In this paper, design and fabrication of multi-needle-type capillary is described. © 2012 IEEE.
International conference proceedings, English - Development of the miniature hemispherical tilt stage driven by stick-slip motion using piezoelectric actuators
Hiroaki Shiratori; Masato Takizawa; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
2012 9th France-Japan and 7th Europe-Asia Congress on Mechatronics, MECATRONICS 2012 / 13th International Workshop on Research and Education in Mechatronics, REM 2012, CD=ROM, 251-257, 2012, Miniature hemispherical stage has been proposed for improvement of microscopic observation and manipulation. The stage can be rotated in arbitrary direction under a scanning electron microscope. The stage is composed of a hemisphere and three drive units. Besides, the drive unit is composed of a drive ball and two piezoelectric actuators. The drive ball is moved by two piezoelectric actuators, which are orthogonally arranged, in a plane. The movable plane of each drive ball is same as the tangent plane between the hemisphere and each drive ball. The hemisphere on three drive balls is rotated in arbitrary direction by stick-slip motion of each drive ball. The rotational direction of the stage can be controlled by the movable directions of each drive ball. In this paper, the design and fabrication of the small hemispherical stage are described. The rotational directions of the stage are evaluated using a laser autocollimator. © 2012 IEEE.
International conference proceedings, English - Development of wire-connected mechanism for precise positioning
Masahiro Shinoda; Shinnosuke Hirata; Hisayuki Aoyama
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, TRANSACTION PUBLISHERS, 523-524, 645-649, 2012, Peer-reviwed, Micro/nano positioning is one of important techniques to operate bio-cell and micro assembly. For realizing the precise positioning, the various piezo-driven stages have been already proposed and micro/nano scale resolution has been achieved. However, it is pointed out that the existing precision positioning tools are too large compared to operating area. Their devices are too difficult to combine other devices and use in tight environment under microscope. In this paper, a wire connected mechanism for precise positioning under microscope is proposed. The proposed positioning system is simply composed actuators including piezoelectric element and super extra-fine wires. By applying wire connected mechanism, the saving of larger work space compared to traditional devices is expected.
International conference proceedings, English - Development of the miniature hemispherical tilt stage driven by stick-slip motion using piezoelectric actuators,”
Hiroaki Shiratori; Masato Takizawa; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
ASPEN 2011 4th International Conference of Asian Society for Precision Engineering and “Nanotechnology,, 16-18, Nov. 2011, Peer-reviwed
International conference proceedings, English - Micro Gap Measurement based on Needle Vibration for Nano liter dispenser,
Kazuki Hirose; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
ASPEN 2011 4th International Conference of Asian Society for Precision Engineering and Nanotechnology,, 56, Nov. 2011, Peer-reviwed
International conference proceedings, English - Spatial micro manipulation with thin wires and piezo elements,”
Hisayuki Aoyama; Masahiro Shinoda; Shinnosuke Hirata
ASPE 26th Annual meeting,, 60-63, Nov. 2011
International conference proceedings, English - Development of Wire Connected Micro Manipulation Mechanism:2nd Report : Tension Control by the Strain Detection
Shinoda Masahiro; Irie Yuuka; Hirata Shinnosuke; Aoyama Hisayuki
Proceedings of JSPE Semestrial Meeting, The Japan Society for Precision Engineering, 2011, 559-560, 2011, 本研究は、圧電アクチュエータの変位の伝達に極細のワイヤを用いることで操作対象周りを軽量化し、高速なマニピュレーションを行える装置の開発を目的としている。ワイヤの張力変化に伴い装置内部の応力にも変化が生じるため、この応力変化から圧電アクチュエータの変位量を制御する方法を検討している。本報では、この装置内部の応力変化を用いたワイヤ駆動ユニットの高速制御手法について述べる。 - Compact USB camera-based navigation device with repetitive compensation of input signals for omnidirectional inchworm robot
Ohmi Fuchiwaki; Hisayuki Aoyama
International Journal of Automation Technology, Fuji Technology Press, 5, 6, 883-890, 2011, Peer-reviwed, In this paper, we describe the design and development of a navigation device for a 3-DOF inchworm robot. The robot has been developed to provide flexible and omnidirectional microscopic operations. The robot can move in any direction in the manner of an inchworm. However, many positioning errors exist because of an assembling error in four piezoelectric actuators and two electromagnets. In this report, we propose a USB camera-based navigation device with a signal compensation function. In experiments, we have succeeded in controlling the robot on an octagonal path, freely controlling the posture angle. When we compensate the input signal, the positioning time decreases to 62.9% of that when there is no compensation. The robot is 35 mm3, so we can attach it to various devices. As the navigation device is also compact, we can carry the device easily and set it up in a small work area. The design procedure to realize flexible and omnidirectional positioning and basic performance are also discussed.
Scientific journal, English - Micro gap measurement by vibration mode for needle-type dispenser
Kazuki Hirose; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, 555-560, 2011, A needle-type dispenser, consists of a thin needle and a glass capillary, has been developed for micro-droplet application from high viscosity liquids. A gap, which is a distance between the needle tip and the target surface, is formed in micro-droplet. If the gap is fluctuated, volumes of applied micro droplets are unstable. Therefore, a contact-detection method of the needle-tip droplet and the target surface is proposed. The needle is vibrated by the piezoelectric element through the leaf spring in the proposed method. Contact of the needle-tip droplet and the target surface can be detected from needle-vibration characteristics. In this paper, control of the gap and droplet volume using needle-vibration characteristics is reported. © 2011 IEEE.
International conference proceedings, English - Basic study of high DOF micromanipulation by surface tension using the multi-needle-type capillary
Shinnosuke Hirata; Takuya Shigeta; Hisayuki Aoyama
2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, 739-743, 2011, Peer-reviwed, High DOF manipulation method is required under microenvironment. In the typical method of micromanipulation by surface tension, however, tilting or rotating of a target is difficult. The multi-needle-type capillary is proposed for high DOF micromanipulation by surface tension. The multi-needle-type capillary is composed of thin needles which are cylindrically arranged, linear-motion mechanisms of the needles and a liquid pump mechanism inside the needles. The needles can be regarded as a hypothetical capillary. In case the capillary is filled with a liquid, then, a droplet is formed on the capillary tip. Therefore, a target can be held with the capillary-tip droplet by surface tension. In addition, the capillary-tip surface and the capillary-tip droplet are transformed when each needle is moved up or down. Therefore, the target, which is held with the capillary-tip droplet, can be tilted and rotated. In this paper, design and fabrication of the multi-needle-type capillary is described. Displacement of linear-motion mechanisms and transformation of capillary tip are evaluated in the experiment. Then, manipulation of chip resistors using the multi-needle-type capillary is evaluated. © 2011 IEEE.
International conference proceedings, English - Micro diagnostic by micro robot with stiffness indenter for BIO materials
P. Montree; N. T. Nguyen; S. Hirata; C. Kanamori; H. Aoyama
2011 IEEE International Conference on Robotics and Biomimetics, ROBIO 2011, 644-649, 2011, The development of the instrumented indentation testing robot for bio materials with micro surface hardness and stiffness test is described. This micro surface measurement system is composed of the piezo-driven micro-robot with the indenter that can move to the measurement area precisely step by step with 1 μm per step on a metal plate and camera base coordinate measurement instruments. The position of the small robot can be controlled precisely by vision base navigation system. With the help of image processing technique, the coordination of the small robot can be identified precisely within ±10 μm resolution. Since the performance of micro hardness sensing is compared with the hardness standard block to certify its ability, the sensing head is implemented on a micro-robot. In the experiment results, the elasticity investigation with human tooth is successfully checked by the indentation load-depth characteristics. © 2011 IEEE.
International conference proceedings, English - Needle positioning method of the sub-pico-liter dispensing mechanism using vibration response of the needle
Kazuki Hirose; Satoshi Adachihara; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
Proc of The 8th France-Japan and 6th Europe-Asia Congress on Mechatronics, 22-24, Nov. 2010, Peer-reviwed
International conference proceedings, English - Microcapsule production by double micro pipette injecters
Hisayuki Aoyama; Naoya Hata; Kiyoshi Terasaki; Shinnosuke Hirata
Proc. of 5th ASPE Annual meeting, 223-26, Oct. 2010
International conference proceedings, English - Omnidirectional Vision Based Robot Localization on Soccer Field by Particle Filter,
Chia-Yang Chen; Chang-Yao Ho; Ching-Chang Wong; Hisayuki Aoyama
Proc. of SCIE Annual Conf, 2976-2981, Aug. 2010, Peer-reviwed
International conference proceedings, English - Combination of VCA based Micro Force Generater and Micro Robot for Micro Hardness and Stiffness Test,
Montree Pakkaratok; Nachapon Luekiatphaisan; Hisayuki Aoyama
Proc. of SCIE Annual Conf., 3184-3189, Aug. 2010
International conference proceedings, English - Development of Piezo Driven Hemispherical Gonio Micro Stage and Thin Wire String Puppet Micro Positioner,
Hisayuki Aoyama; Masato Takizawa; Takumi Miyashita; Aya Toyoshima; Yuuka Irie; Shinnosuke Hirata
Proc. of 2010 ACTUATOR,, 513-517, May 2010
International conference proceedings, English - Development of Micromanipulation System Using Liquid Bridging Force for Micro Parts Assembly
D. Misaki; A. Kudo; S. Koshimizu; H. Aoyama
ACTUATOR 10, CONFERENCE PROCEEDINGS, MESSE BREMEN-HVG HANSEATISCHE VERANSTALTUNGS-GMBH, 1063-+, 2010, The demand for microscopic operations performed under a microscope is increasing in recent years. In this study, we proposed a micromanipulation system consisting of micromanipulation tools and using liquid bridging force and an operation supporting method, based on augmented reality, for assembling microparts. The pick-and-place method and the assembly method using the proposed system for microparts are demonstrated in this paper. Experiments using the proposed system for microparts manipulation confirmed the feasibility of microparts positioning and assembling.
International conference proceedings, English - Development of Piezo Driven Inchworm Micro X-Y Stage and Hemispherical Tilting Positioner with Microscope Head
Hisayuki Aoyama; Hiroyuki Chiba; Masato Takizawa; Youhei Itami; Yuuka Irie; Shinnosuke Hirata
ADVANCED PRECISION ENGINEERING, TRANS TECH PUBLICATIONS LTD, 447-448, 513-517, 2010, This paper deals with small piezo driven inchworm X-Y stage for a cell-manipulation in SEM chamber. Generally the electric noise from the moto causes the image destorsion in SEM operation. Thus the piczo driven inchworm small X-Y stage has been designed and fabricated as well as another tilting mechanism has been developed so that a micro pipettee can be implemented onto this tilting stage and manipulate such bio cell samples. Here we also developed a manipulation tool with micro force indicating system by using acoustic modulation technique since the microscopic operation in SEM without tactile information is difficult for the operator to control the tool precisely. On the other hand, a self-walking wafer inspection system is also described. The unique system is composed of the hemispherical manipulator and a self-walking piezo driven stage. This small walking mechanism can move on the glass plate that covers on the micro patterned plate. The hemispherical ball with microscope lens that can be rotated by the manner of stick-slip with three point contact piezo actuators is mounted on this self-walking stage so that the microscope lens can be focused onto the target sample to investigate the defect of micro patterns on the printed plate.
International conference proceedings, English - Development of a nano manipulator based on an atomic force microscope coupled with a haptic device: a novel manipulation tool for scanning electron microscopy
Futoshi Iwata; Shinsuke Kawanishi; Hisayuki Aoyama; Tatsuo Ushiki
ARCHIVES OF HISTOLOGY AND CYTOLOGY, INT SOC HISTOLOGY & CYTOLOGY, 72, 4-5, 271-278, Dec. 2009, Peer-reviwed, We developed a novel nano manipulator based on an atomic force microscope (AFM) that can be operated inside the sample chamber of a scanning electron microscope (SEM). This AFM manipulator is also coupled with a haptic device, and the nanometer-scale movement of the AFM cantilever can be scaled up to the millimeter-scale movement of the pen handle of the haptic device. Using this AFM manipulation system, we were able to observe the AFM cantilever and samples under the SEM and obtain topographical images of the AFM under the SEM. These AFM images contained quantitative height information of the sample that is difficult to obtain from SEM images. Our system was also useful for positioning the cantilever for accurate AFM manipulation because the manipulation scene could be directly observed in real time by SEM. Coupling of the AFM manipulator with the haptic device was also useful for manipulation in the SEM since the operator can move the AFM probe freely at any position on the sample surface while feeling the interaction force between the probe and the sample surface. We tested two types of cutting methods: simple cutting and vibration cutting. Our results showed that vibration cutting with probe oscillation is very useful for the dissection of biological samples which were dried for SEM observation. Thus, cultivated HeLa cells were successfully micro-dissected by vibration cutting, and the dissection process could be observed in real time in the SEM. This AFM manipulation system is expected to serve as a powerful tool for dissecting various biological samples at the micro and nanometer-scale under SEM observation.
Scientific journal, English - Nano Imprinting System Operated by Multiple Micro Robots
Aoyama, H; Hata, N; Suzuki, Y; Iwata, F; Ota, A; Usuda, T
Proc of 2009 Annual Meeting of American Soc. of Prec. Engg,, 216-219, Nov. 2009
International conference proceedings, English - Design and Development of Precision Micro Positioning Mechanism using Thin Wire Connected Piezoelectric Actuators
Takumi Miyashita; Aya Toyoshima; Shinnusuke Hirata; Hisayuki Aoyama
Proc. of Int. Conf. on Asian Soc. of Precision Enginnering and Nanotechnology, 1P-7-3CD-ROM, Oct. 2009
International conference proceedings, English - Developement of Self-walking Small X-Y Stage and Manipulation Tool with Acoustic Force Display
Hiroyuki Chiba; Yohei Itam; Shinnosuke Hirata; Hisayuki Aoyama
Proc. of Int. Conf. on Asian Soc. of Precision Enginnering and Nanotechnology,, 1E-7-1958 CD-ROM, Oct. 2009
International conference proceedings, English - Development of hemispherical manipulation and self-walking stage using piezoelectric actuators,
Masato Takizawa; Yuuka Irie; Shinnosuke Hirata; Hisayuki Aoyama
Proc. of Int. Conf. on Asian Soc. of Precision Enginnering and Nanotechnology, 1E-6-1953 CD-ROM, Oct. 2009
International conference proceedings, English - 超小型CNC旋盤の開発
林亮; 青山尚之; 山中将
精密工学会誌, 75, 9, 1093-1097, Sep. 2009, Peer-reviwed
Scientific journal, Japanese - Development process of micro CNC precision lathe
Akira HAYASHI; Hisayuki AOYAMA; Masashi YAMANAKA
Journal of the Japan Society for Precision Engineering, Japan Society for Precision Engineering, 75, 9, 1093-1097, 2009
Scientific journal - Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device
F. Iwata; S. Kawanishi; A. Sasaki; H. Aoyama; T. Ushiki
FIFTH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, SPIE-INT SOC OPTICAL ENGINEERING, 7133, 2009, Peer-reviwed, We describe a nanometer-scale manipulatoion and cutting method using ultrasonic oscillation scratching. The system is based on a modified atomic force microscope (AFM) coupled with a haptic device as a human interface. By handling the haptic device, the operator can directly move the AFM probe to manipulate nanometer scale objects and cut a surface while feeling the reaction from the surface in his or her fingers. As for manipulation using the system, nanometer-scale spheres were controllably moved by feeling the sensation of the AFM probe touching the spheres. As for cutting performance, the samples were prepared on an AT-cut quartz crystal resonator (QCR) set on an AFM sample holder. The QCR oscillates at its resonance frequency (9 MHz) with an amplitude of a few nanometers. Thus it is possible to cut the sample surface smoothly by the interaction between the AFM probe and the oscillating surface, even when the samples are viscoelastics such as polymers and biological samples. The ultrasonic nano-manipulation and cutting system would be a very useful and effective tool in the fields of nanometer-scale engineering and biological sciences.
International conference proceedings, English - Insect Based Automatic Precise Navigation of Piezo Driven Micro Robots for Artificial Insemination
Daigo Misaki; Hisayuki Aoyama
2008 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS, VOLS 1-4, IEEE, 961-+, 2009, Peer-reviwed, The small size robots less that 1 cubic inch have the potential benefits with the special tasks of such the facility maintenances and the microscopic operation with sub micron resolution as well. For these years, our group have been developed unique piezo driven tiny robots for precise production. However it is difficult to carry out precise artificial insemination robot manually from the problem of measuring accurate coordinate positions or over range of microscopic field. Here it has been also increased that the demand for automatic fine manipulation for bio cell surgeries. This paper describes the insect based precise navigation for the piezo driven micro robots system to provide the automatic insemination and incubation processes. These small robots with several range sensors can communicate each other and navigate themselves with the simple control sequences similar to insect behavior. In the experiment results, it is demonstrated that the male and the female robots succeeded in executing accurate navigation, insemination and incubation by using a fish egg.
International conference proceedings, English - Piezo Driven XY Stage With Nano-manipulators for SEM Operation
Kanegae, S; Hiroyuki, C; Irie, Y; Aoyama, H; Iwata, F; Ushiki, T
Proc of 2008 Annual Meeting of American Soc. of Prec. Engg, 332-335, Nov. 2008
International conference proceedings, English - Development of nano manipulator based on an atomic force microscope coupled with a haptic device for SEM operation,
S. Kawanishi; K. T. Miura; H. Aoyama; T. Ushiki; F. Iwata
Proc. of Int Conf. on Asia International Symposium on Mechatronics, 350-353, Oct. 2008, Peer-reviwed
International conference proceedings, English - Piezo Impact Driven X-Y stage for Accurate Micro Lens Alignment
Yuuka Irie; Hisayuki Aoyama; Junichi Kubo; Takahiro Fujioka; Takashi Usuda
Proc. of Int Conf. on Asia International Symposium on Mechatronics, 176-180, Oct. 2008, Peer-reviwed
International conference proceedings, English - Development of piezodriven small X-Y stage and micro tool turret with acoustic modulated micro force display for SEM operation
H.Chiba; S.Kanegae; H. Aoyama; F.Iwata; T.Ushiki
Proc. of Int Conf. on Asia International Symposium on Mechatronics,, 344-349, Oct. 2008
International conference proceedings, English - Feedback Nano Position Control for Micro Robot in XYθ Direction with Micro Linear Encoders,
Naoya Hata; Masahiro Taguchi; Hisayuki Aoyama
Proc. of 3th Int. Conf. on Popistioning Technology, 101-102, Sep. 2008
International conference proceedings, English - Piezo Driven Micro Robot with Displacement Amplification Mechanism,
Kaori Koga; Hisayuki Aoyama; Sadayuki Takahashi
Proc. of 3th Int. Conf. on Popistioning Technology, pp.45-46, Sep. 2008
International conference proceedings, English - Crossover IT Mechatronics Remote Control: Innovative Education Methodology Development
Taworn Benjanarasuth; Songmoung Nundrakwang; Jongkol Ngamwiwit; Chunquan Xu; Aiguo Ming; Chisato Kanamori; Hisayuki Aoyama
Proceedings of Third Asia International Symposium on Mechatronics, 198-203, Aug. 2008
International conference proceedings, English - Nanometer-scale manipulation and ultrasonic cutting using an atomic force microscope controlled by a haptic device as a human interface
Futoshi Iwata; Kouhei Ohara; Yuichi Ishizu; Akira Sasaki; Hisayuki Aoyama; Tatsuo Ushiki
JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY APPLIED PHYSICS, 47, 7, 6181-6185, Jul. 2008, Peer-reviwed, We describe a nanometer-scale manipulation and cutting method using ultrasonic oscillation scratching. Tire system is based on a modified atomic force microscope (AFM) Coupled with a haptic device as a human interface. By handling the haptic device. the operator can directly move the AFM probe to manipulate nanometer scale objects and Cut a Surface while feeling the reaction from the surface in his or her fingers. As for manipulation using the system, nanometer-scale spheres were controllably moved by feeling the sensation of the AFM probe touching the spheres. As for cutting performance, the samples were prepared on in AT-cut quartz crystal resonator (QCR) set on an AFM sample holder. The QCR oscillates at its resonance frequency (9 MHz) with an amplitude of a few nanometers. Thus it is possible to cut the samples surface smoothly by the interaction between the AFM probe and the oscillating surface, even when the samples are viscoelastics Such as polymers and biological samples. The ultrasonic nano-manipulation and cutting system would be a very useful and effective tool in the fields of nanometer-scale engineering and biological sciences.
Scientific journal, English - Development of the Orthogonal Micro Robot for Accurate Microscopic Operations
Ohmi Fuchiwaki; Daigo Misaki; Chisato Kanamori; Hisayuki Aoyama
Journal of Micro-Nano Mechatronics, 4, 1-2, 85-93, Feb. 2008, Peer-reviwed
Scientific journal, English - Internet Based Crossover Robot Remote Control Competition in Asian Countries -Development of practice based innovative education methodology-
Chunquan Xu; Aiguo Ming; Chisato Kanamori; Hisayuki Aoyama
2008 IEEE CONFERENCE ON ROBOTICS, AUTOMATION, AND MECHATRONICS, VOLS 1 AND 2, IEEE, 560-565, 2008, Peer-reviwed, Over the past decade, the internet has become more and more popular in human society which brings significant convenient to researchers and engineers in the joint development of highly complicated products such as robotic/mechatronic systems. Simultaneously, more and more opportunities are being given to students to attend robot competitions in universities. However, it is still very difficult for the students to collaborate with each other via the internet although the communication has become so advanced. This paper introduced an internet based crossover robot remote control competition project. We established a general platform for students to jointly develop robotic/mechatronic systems and hold competitions with the counterparts at oversea universities. The hardware and software of the systems are developed at two universities respectively during which the students of both universities negotiate with each other via the internet to exchange the design idea, unify the hardware/software interface, etc. The competition is implemented between the two systems whose hardware and software are cross-developed at the two universities. The demonstration of the preliminary competition between UEC and KMITL proves this project has unique benefits to students, such as the training of the internet based robot control technologies, the communication skills for collaboration with foreign member, and so on.
International conference proceedings, English - Motion Controller Design for Two-wheeled Robot Based on a Batch Learning Structure
Ching-Chang Wong; Hou-Yi Wang; Kuan-Hua Chen; Chia-Jun Yu; Hisayuki Aoyama
2008 PROCEEDINGS OF SICE ANNUAL CONFERENCE, VOLS 1-7, IEEE, 737-+, 2008, Peer-reviwed, A learning architecture with a fuzzy inference system. and Genetic Algorithm (GA) is proposed to automatically determine a motion controller for two-wheeled robots. This architecture in each generation can be separated into three states: a control state, a system identification state, and a controller learning state. TWO fuzzy inference systems are used in the proposed learning architecture. One is used to be a fuzzy controller and the other one is used to be a fuzzy identifier. The antecedent and consequent parameters of the fuzzy system are viewed as a parameter set and a fitness function is proposed in a GA method to choose an appropriate parameter set of the fuzzy system so that the selected fuzzy system has a good performance. Some practical tests are presented to illustrate that trajectories of the controlled robot from the initial point to the target position are short and straight.
International conference proceedings, English - Multi-axial micromanipulation organized by versatile micro robots and micro tweezers
Ohmi Fuchiwaki; Akira Ito; Daigo Misaki; Hisayuki Aoyama
2008 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-9, IEEE, 893-+, 2008, Peer-reviwed, In this paper, we describe development of the multi-axial micromanipulation organized by versatile micro robots using micro tweezers. To conduct microscopic operations, a unique locomotion mechanism composed of four piezoelectric actuators and two electromagnets is proposed. Here two legs arranged to cross each other are connected by four piezoelectric actuators so that the robot can move in any direction, i.e. in X and Y directions as well as rotate at the specified point precisely in the manner of an inchworm. To manipulate micro objects by these versatile micro robots, we have developed micro tweezers driven by 3 piezoelectric actuators. We have also developed an electromagnetic spherical micromanipulator to position the micro tweezers. The electromagnetic spherical micromanipulator rotates in yaw, roll and pitch directions independently. The electromagnetic spherical micromanipulator is a 1-inch cube size, so we can easily attach them on top of the versatile micro robots. We have developed the multi-axial micromanipulation organized by 3 versatile micro robots with the electromagnetic spherical micromanipulator and micro tweezers. The whole manipulation device is very small, 200mm in diameter and 70mm. in height, so we can easily attach the device to micro processing instruments even if the working area is very small. This device has 21 DOF with less than 100nm resolution. In experiments, we have demonstrated flexible handling of miniscule glass spheres with a diameter of 20 mu m. We have also succeeded in fixing miniscule glass spheres on a sample table by an ultraviolet cure adhesive. The design procedure, basic performance and micro-assembling applications of this tiny robot are also discussed as part of the new field of micro robotics requiring especially high precision in certain regions.
International conference proceedings, English - Development of a Positioning & Compensation Device for a Versatile Micro Robot
Ohmi Fuchiwaki; Takashi Kawai; Akihiro Ohta; Daigo Misaki; Hisayuki Aoyama
2008 IEEE/RSJ INTERNATIONAL CONFERENCE ON ROBOTS AND INTELLIGENT SYSTEMS, VOLS 1-3, CONFERENCE PROCEEDINGS, IEEE, 83-88, 2008, In this paper, we describe the design and development of a positioning and compensation device for a versatile micro robot. To provide microscopic operations, the versatile micro robot has developed. The robot can move in any direction in the manner of an inchworm. However many positioning errors exist because of an assembling error in the four piezoelectric actuators and two electromagnets. We need an automatic positioning device for more accurate work. Motion compensation is also highly required for more effective work. This robot is very small, so it can easily be set to work with the various devices. The positing device should also be small so that we can carry the device easily and set it up in a narrow working area. In this report, we propose a USB camera based positioning device with special compensation function. In experiments, we succeeded in controlling the robot on an octagonal path with controlling the posture angle freely. When we compensate for the motion, the positioning time becomes 60% compared to that of no compensation. The design procedure, basic performance and biomedical application are also discussed as an advance in the new field of micro-robotics used in precision regions.
International conference proceedings, English - Desktop Micro Robots Factory for Micro Production
H. Aoyama; C.Kanamori; O.Fuchiwaki; D.Misaki; F.Iwata
Proceedings of the International Conference on Engineering, Applied Sciences and Technology, 161-164, Nov. 2007, Peer-reviwed
Scientific journal, English - Microscopic Operation System Using Piezo Based Micro Robots
Atsushi OGURI; Daigo MISAKI; Ning ZHU; Ohmi FUCHIWAKI; Hisayuki AOYAMA
Proceedings of the 24th International Japan-Korea Seminar on Ceramics, 755-758, Oct. 2007, Peer-reviwed
Scientific journal, English - Versatile piezo driven micro robot for micro parts transportation
Masahiro Mikami; Ohmi Fuchiwaki; Yuka Irie; Hisayuki Aoyama; Daigo Misaki; Takashi Usuda
Asian Symposium for precision Engineering and Nanotechnology 2007, 130-134, Oct. 2007, Peer-reviwed
Scientific journal, English - Development of inertia driven micro robot with nano tilting stage for SEM operation
Yoshihiro Nomura; Hisayuki Aoyama
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, SPRINGER, 13, 8-10, 1347-1352, May 2007, Peer-reviwed
Scientific journal, English - Development of versatile micro robot for microscopic operation (4th report) -Improvement of the motion compensation and experimental results
Ohmi Fuchtwaki; Akihiro Ohta; Daigo Misaki; Futoshi Iwata; Takashi Usuda; Hisayuki Aoyama
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 73, 8, 955-959, 2007, In this paper, we describe improvement of compensation sequence and results of the motion compensation for the versatile micro robot. In order to provide microscopic operation, the unique locomotion mechanism which is composed of four piezoelectric actuators and two electromagnets is proposed. Here two legs arranged on cross each other are connected by four piezoelectric actuators so that it can move in any directions, i.e. in X and Y directions as well as rotate at the specified point precisely with the manner of an inchworm. Moreover the combination of particular wave forms of piezoelectric actuators can provide "arc trajectory motion with facing center", that is important for the micro manipulator to keep its tip end within the microscopic view area. In previous report, we have proposed the competitive compensation method supported by CCD camera based tracking system and confirmed the effectiveness from several experiments. However, we have also confirmed that we could not compensate straight motions in forward, back, right and left directions because of the assembling error of the four piezoelectric actuators and two electromagnets. In this report, we propose the unique mechanistic model which allows the assembling error to improve the compensation method. In the compensation experiments, we succeed in reducing the motion errors and confirm the effectiveness of newly developed compensation method. The design procedure, basic performance and biomedical application of this tiny robot are also discussed to open the new field for micro-robotics in precision region.
Scientific journal - Development of versatile micro robot for microscopic operation (5th report) -performance analysis of piezoelectric actuator and improvement of motion speed
Ohmi Fuchiwaki; Daigo Misaki; Akihiro Ohta; Futoshi Iwata; Takashi Usuda; Hisayuki Aoyama
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 73, 10, 1164-1168, 2007, In this paper, we describe the performance analysis of the piezoelectric actuator and results of the motion speed of the newly developed micro robot which can be applied for flexible positioning device as well as microscopic operation. In order to provide microscopic operation, the unique locomotion mechanism which is composed of four piezoelectric actuators and two electromagnets is proposed. Here two legs arranged on cross each other are connected by four piezoelectric actuators so that it can move in any directions, i.e. in X and Y directions as well as rotate at the specified point precisely with the manner of an inchworm. However, this robot takes a long time to move long distance because the maximum speed is only a few millimeters. For example, the robot takes over 30 seconds for 10 centimeters. In order to analyze the relationship between the motion speed and parameters of the piezoelectric actuator, we use the simple dynamical model. Then, we have selected the special piezoelectric actuator with amplification mechanism in order to improve the motion speed. In several experiments, we have checked that the robot equipped with the newly selected actuators becomes over 7 times faster than previous one. We have also discussed the influence of the mechanical distortion and the delay time of the electromagnet for more accurate approximation of the motion speed. The possibility of this tiny robot for flexible positioning device is also discussed to open the new field for micro-robotics in precision region.
Scientific journal - 3D model reconstruction with non-contact rotation mechanism using micro robots
Daigo Misaki; Atushi Oguri; Nigh Zhu; Ohmi Fuchiwaki; Hisayuki Aoyama
Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007, 2007
International conference proceedings - Preliminary implementation of primary calibration system for laser vibrometer
Akihiro Oota; Takashi Usuda; Tamio Ishigami; Hideaki Nozato; Hisayuki Aoyama; Sojun Sato
SEVENTH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER TECHNIQUES: ADVANCES AND APPLICATIONS, SPIE-INT SOC OPTICAL ENGINEERING, 6345, 2006, Peer-reviwed, In this paper, we outline a preliminary implementation of primary calibration for a laser vibrometer (LV) on the basis of newly proposed first ISO draft. The sine approximation method is applied to our calibration system. Under some different measurement conditions, primary calibration is preliminarily carried out for achieving reliable measurements. From these results, the effects of acceleration amplitude stability, mechanical distortion, position of measuring beam, and spot diameter of measuring beam have been discussed. Some conditions required for achieving the reliable calibration is indicated on the basis of the discussion. Additionally; the strict regulations of the distance between spots and such amount of mechanical distortion would be indispensable for guaranteeing a higher reliability of such calibration within an expanded uncertainty (k = 2) of less than 0.5 %.
International conference proceedings, English - Development of primary calibration system for vibration and acceleration standard in high frequency range with laser interferometer with multifold optical path
Akihiro Oota; Takashi Usuda; Hisayuki Aoyama; Sojun Sato
IEEJ Transactions on Sensors and Micromachines, 126, 11, 612-620, 2006, Peer-reviwed, This paper outlines the development of a new primary calibration system for vibration and acceleration standard extending to the frequency range up to 10 kHz at the National Metrology Institute of Japan (NMIJ). In order to achieve this purpose, two types of laser interferometer with multifold optical path (twofold and fourfold optical paths) are discussed as measurement technique for quite small dynamic displacement down to 25 nm. These laser interferometers are successfully installed into the primary calibration system for the sine-approximation method in compliance with ISO-16063-11. The primary calibration system with the laser interferometer with multifold optical path are capable of performing practical calibration within maximum expanded uncertainty of 3.5 % in a higher frequency range up to 10 kHz.
Scientific journal, Japanese - 91st Report: Automatic ampulitude control of the pico litter dispenser using the micro displacement senser
EKKO Tooyuki; KIHARA Hirotaka; TOBE Nobuyuki; AOYAMA Hisayuki; FUCHIWAKI Ohmi; MISAKI Daigo; USUDA Takashi; INOUCHI Michikatsu
2005年度精密工学会春季大会, The Japan Society for Precision Engineering, 1149-1150, 2005
Research society, Japanese - Development of Versatile Micro Robot for Microscopic Operation (3rd Report) : Analysis and Experimental Results of Motion Compnesation
FUCHIWAKI Ohmi; NANJO Ryuichi; AOYAMA Hisayuki
Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers, The Japan Society for Precision Engineering, 70, 1, 86-90, 05 Jan. 2004, In this paper, we describe the compensation sequence and the result of motion compensation of the newly developed versatile micro robot which can be applied to microscopic operation. In order to provide microscopic manipulation, the unique locomotion mechanism which is composed of four piezoelectric elements and two electromagnets is proposed. Here two legs arranged on cross each other are connected by four piezoelectric elements so that it can move in any directions, i.e. in X and Y directions as well as rotate at the specified point precisely with the manner of an inchworm. Moreover the combination of particular wave forms for piezoelectric elements can provide "arc trajectory with facing center", that is important for the micro manipulator to keep its tip end within the microscopic view area. However, the versatile micro robot can not move precisely without the motion compensation because of the difference of characteristics of four piezoelectric elements and the assembling error of four piezoelectric elements and two electromagnets. We analyze the mechanical kinematics for locomotion and propose the competitive compensation method supported by the CCD camera based image tracking system. In the compensation experiments, we succeed in reducing the motion error and confirm the effectiveness of our compensation method. The design procedure, basic performance and biomedical application of this tiny robot also are discussed to open the new field for micro-robotics in precision region.
Japanese - An Ultra Precision Production System Organized by Multiple Micro Robots (89th Report : Accurate control for dispensing amount by pico liter dispenser)
Kihara Hirotaka; Mizutani Yusuke; Fuchiwaki Ohmi; Misaki Daigo; Aoyama Hsayuki; Inouchi Yasukatu
Proceedings of JSPE Semestrial Meeting, The Japan Society for Precision Engineering, 2004A, 550-550, 2004, 本研究では、μTAS分野において活用可能な微少量の液体をハンドリングするといった分注機構を搭載させた超小型ロボットの開発を目的としている。今回は、前回報告した微少液滴塗布機構を用いた液体の塗布量の制御について報告する。本報では基礎実験として試料液体と塗布面との表面エネルギーの差(親疎水性)に焦点を当て実験を行い、塗布量の計測及び塗布された液体の形状観察を行った。そして、表面エネルギーの差による塗布量制御の結果について述べる。 - The current progress of measurement standards for vibration in NMIJ/AIST
T Usuda; A Ohta; T Ishigami; O Fuchiwaki; D Misaki; H Aoyama; S Sato
SIXTH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER TECHNIQUES: ADVANCES AND APPLICATIONS, SPIE-INT SOC OPTICAL ENGINEERING, 5503, 30-38, 2004, Peer-reviwed, This paper outlines the current progress of measurement standards for vibration at the National Metrology Institute of Japan (NMIJ) since 2000. Up to 2000, two accelerometer calibration systems of national standards have established at the NMIJ. These two systems are for the low frequency range (1 Hz to 200 Hz) and for the middle frequency range (20 Hz to 5 kHz). They have been used for national calibration services and their uncertainties have been published on the Appendix C of the CIPM-MRA as the calibration and measurement capabilities (CMCs). Currently, other two systems are under development to extend calibration frequency range. One of the systems is for the very low frequency range (0.1 Hz to 80 Hz). And the other one is for the high frequency range (5 kHz to 10 kHz). The NMIJ is planning to establish these two systems until 2006, and to start the calibration services for 0.1 Hz to 10 kHz together with all 4 systems. Two systems under development are described. Technical features, uncertainty sources of the systems, and the future plan are reported.
International conference proceedings, English - Development of Versatile Micro Robot for Microscopic Operation (2nd Report) : Analysis and Experimental Result of Arc Trajectory Motion
FUCHIWAKI Ohmi; SYOUJI Yuuichi; AOYAMA Hisayuki
Journal of the Japan Society of Precision Engineering, The Japan Society for Precision Engineering, 69, 1, 69-73, 05 Jan. 2003, In order to provide microscopic manipulation, the unique locomotion mechanism which is composed of four piezo elements and two electromagnets were proposed in the 1st report. Here two legs arranged on cross each other are connected by four piezo elements so that it can move in any directions, i.e. in the X and Y directions as well as rotate at the specified point precisely with the manner of inch worm. Moreover the combination of specified wave forms for piezo elements can provide "arc trajectory motion", that is important for the micro manipulator to keep its tip end within the microscopic area. In this paper, we analyse the arc trajectory motion and design the signals of each actuator, and then we checked its motion accuracy and precise dexiterity by the CCD camera based image tracker. Finally, we confirmed that the robot can move the arc trajectoy motion with respect, to any center point precisely.
Japanese - An Ultra Precision Production System Organized by Multiple Micro Robots (77th Report : Development and Implementation of pico liter dispenser)
Mizutani Yusuke; Aoyama Hisayuki
Proceedings of JSPE Semestrial Meeting, The Japan Society for Precision Engineering, 2003A, 696-696, 2003, 本研究ではμTAS分野において活用可能な微少量の液体をハンドリングするといった分注機構を搭載させた超小型ロボットの開発を目的としている。
そこで今回は、超小型ロボットに搭載可能な小型単純構造であり、様々な粘度の試料液体を吐出することが可能、吐出量を調整することが可能、さらに［pl］オーダーの吐出量を目標とした極微量液体吐出機構の試作・開発を行なった。
本報では、この機構による分注の実験方法と結果について示した。 - 顕微作業用 XYθ小型自走機械の開発(第1報)-機構の設計と基本動作
淵脇大海; 庄司裕一; 青山尚之
精密工学会誌, 68, 3, 403-407, Mar. 2002, Peer-reviwed
Scientific journal, Japanese - Micromanipulation by Miniature Robots in a SEM Vacuum Chamber
Ohmi Fuchiwaki; Hisayuki Aoyama
J . of Robotics and Mechatronics, 14, 3, 221-226, 2002, Peer-reviwed
Scientific journal, English - Micro Turning System:A Super Small CNC Precision Lathe for Microfactories
Daisuke IIjima; Sumio Ito; Akira Hayashi; Hisayuki Aoyama
Proc of Int. Worshop on Microfactories, 37-40, 2002
International conference proceedings, English - Artificial Insemination System by Male and Female Micro Robots
Hisayuki Aoyama; Hideharu Takubo
Proc of 17th ASPE Annual Meeting, 16, 271-271, 2002
International conference proceedings, English - Visual Based Motion Error Compensation for Precise Versatile Micro Robot
Ohmi Fuchiwaki; Hisayuki Aoyama
Proc of 17th ASPE Annual Meeting, 17, 148-151, 2002
International conference proceedings, English - 小型自走機械群による超精密生産機械システム（第3報）－毛細管捕獲プロ－ブの設計と応用－
青山尚之; 新野弘司
精密工学会誌, The Japan Society for Precision Engineering, 61, 11, 1792-1797, Nov. 2001, Peer-reviwed, This paper deals with the precise miniature robot which has been developed to perform surface clearing operation. The basic principle of this mechanism for precise locomotion is based on the combination of piezo elements and electromagnets for providing an inchworm manner. In order to capture such small objects on the surface, the unique capillary probe that the water in the tube can be pushed off by the magnetic piston and then the object can be taken in the water drop with the help of surface tension force was designed and fabricated. As a primaly experiment, it was confirmed that the capillary probe was successfully capable of capturing several small materials such as metal ball, particle and scraped paper. And the tiny robot with the capillary probe succeeded in capturing the small object on the surface and coveying it to the trash, and then throwing it away.
Scientific journal, Japanese - Design and Control of Versatile Micro Robot for Microscopic Manipulation
Ohmi Fuchiwaki; Hisayuki Aoyama
Proc. of 15th Ann. Meeting of ASPE, 204-207, Oct. 2001
International conference proceedings, English - Precise Sphere Positioning Control by Two Micro Robots
Hisayui Aoyama; Takeshi Ida
Proc. of 3rd IFToMM Int. Micromechanism Symposuim, 53-56, Sep. 2001
International conference proceedings, English - Swarm Control for Automatic Drilling Operation by Multiple Micro Robots
Tokuji Kuronita; Hisayuki Aoyama
Proc. of 2001 Australian Conf. on Robotics & Automation, 7-12, Jul. 2001, Peer-reviwed
International conference proceedings, English - 小型自走機械群による超精密生産機械システム（第49報）XYθの自走機械の開発
淵脇大海; 庄司裕一; T.Chomchana; 青山尚之
2001年度精密工学会春季大会講演論文集, 627, Mar. 2001
Japanese - 小型自走機械群による超精密生産機械システム（第50報）中間評価と今後の予定
青山尚之
2001年度精密工学会春季大会講演論文集, 628, Mar. 2001
Japanese - 小型自走機械群による超精密生産機械システム（第51報）―微小液滴の混合撹拌（2）―
新野弘司; 宮嵜 武; 青山尚之
2001年度精密工学会春季大会講演論文集, 623, 623, Mar. 2001
Japanese - 小型自走機械群による超精密生産機械システム（第52報）―微生物の捕獲と処理の試み―
田窪 秀治; 丸山 歌織; 青山尚之
2001年度精密工学会春季大会講演論文集, 624, Mar. 2001
Japanese - 小型自走機械群による超精密生産機械システム（第53報）―複数台の反射動作による自動作業―
田所 茂; 黒仁田徳士; 青山尚之
2001年度精密工学会春季大会講演論文集, 626, Mar. 2001
Japanese - 小型自走機械群による超精密生産機械システム（第54報）―微小傷の自動探査と修復動作―
宮本 諭; 渡辺竜馬; 青山尚之
2001年度精密工学会春季大会講演論文集, 622, 622, Mar. 2001
Japanese - Desktop Micro Drilling System by Multiple Miniature Robots
Hisayuki Aoyama; Shigeru Tadokoro; Tomohiro Shigeno
J. of Robotics & Mechatronics, 13, 1, 36-41, Jan. 2001, Peer-reviwed
Scientific journal, English - Flexible micro-processing by multiple micro robots in SEM
H Aoyama; O Fuchiwaki
2001 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS I-IV, PROCEEDINGS, IEEE, 3, 3429-3434, 2001, Peer-reviwed, In this paper, we describe the newly developed flexible micro processing system assisted by 1 inch size robots in the scanning electron microscope. After showing the overall system, the basic performances of the small robot that is composed of piezo elements and electromagnets are presented and then the magnetic shield property is considered to prevent the SEM image distortion due to magnetic flux.
In order to handle sonic small objects, the electrostatic micro manipulator driven by the piezo bimorph is also incorporated on the robot. And the small sliding table on the robot can transport them at SEM focusing point accurately. This arrangement can allow the x-v accurate positioning at any location within the chamber. On the sample table, a micro manipulator from another small robot can pick up and down the small objects simultaneously. In addition, the fiber guided YAG-laser is also employed to provide the micro material abrasion. The operator can control each small robot easily with the help of the real time monitoring of SEM image and the PC assisted interface. This collaboration of small robots have interesting benefit for providing both flexible and accurate micro processing in the SEM with good operability.
International conference proceedings, English - Micro surface damage detecting and repairing system by precise micro robots
H Aoyama; S Miyamoto; R Watanabe
INITIATIVES OF PRECISION ENGINEERING AT THE BEGINNING OF A MILLENNIUM, SPRINGER, 304-308, 2001, Peer-reviwed, In this report, an unique system in which many micro robots with micro tool can collaborate to detect the mechanical damages such scratched grooves and crack and to re air them automatically is described. One miniature robot can explore to scan over the surface with the stylus and propagate its acoustic signal to other small robots with micro repairing tool. Another small robot with microphones can distinguish the destination of signal source and approach to the location of damage to repair it automatically. The primary experiments that the small robots succeed in detecting mechanical damages and in repairing them by UV cement.
International conference proceedings, English - 小型自走機械群による超精密生産機械システム（第45報）表面微小傷の自動探査と補修機の精密誘導
宮本 諭; 渡辺竜馬; 青山尚之
2000年度精密工学会秋季学術講演会講演論文集, 2000, 2, 390-390, Oct. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第46報）微少液滴の撹拌
新野弘司; 青山尚之
2000年度精密工学会秋季大会講演論文集, 391, Oct. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第47報）単純反射動作による自動作業
田所 茂; 黒仁田徳士; 青山尚之
2000年度精密工学会秋季大会講演論文集, 2000, 2, 392-392, Oct. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第48報）SEM内での微小部品のYAGレ-ザ接合組立の試み
淵脇大海; 庄司裕一; 青山尚之
2000年度精密工学会秋季大会講演論文集, 2000, 2, 393-393, Oct. 2000
Japanese - 微小傷探査用超小型精密ロボットの開発
渡辺竜馬; 宮本 諭; 青山尚之
2000年度マイクロメカトロニクス秋季学術講演会論文集, 7-8, Sep. 2000
Japanese - 三台のマイクロロボットの協調によるSEM内でのフレキシブル試料台の位置決めシステム
淵脇大海; 青山尚之
電気学会第12回電磁力関連のダイナミクスシンポジウム論文集, 12, 519-52, Jun. 2000
Japanese - 多機能毛細管マニピュレ-タを搭載した小超型自走機械の設計と試作
新野弘司; 青山尚之
電気学会 第12回 電磁力関連のダイナミクスシンポジウム論文集, 12, 517-518, Jun. 2000
Japanese - SEM内微細作業用マイクロロボットとYAGレ-ザによる微細加工
淵脇大海; 郡 和寛; 青山尚之
日本機械学会ロボメカ部門講演会論文集[CD-ROM]，2P2-61-090, 一般社団法人日本機械学会, 2000, 104-104, May 2000, 本研究では走査型電子顕微鏡内で微細な作業を実行する昆虫型小型ロボットを用いたフレキシブル生産システムの構築を目標としている。本報では外部からファイバーでYAGレーザを導入し, これを1台超小型ロボットに搭載し, また他の2台のロボットが協調して試料の保持と位置決めを行い, 任意の微細加工を実施するシステムを開発した。ここではこの基本構成とユニークな加工に成功したので報告する。
Japanese - ネットワ-クによるマイクロロボットの遠隔操作（微細操作用の実機システムの構築）
羯磨亮二; 淵脇大海; 青山尚之; 田中 豊
日本機械学会ロボメカ部門講演会論文集，[CD-ROM]，2P2-35-048, 一般社団法人日本機械学会, 82-82, May 2000, 本研究では, 実作業交換と仮想空間をネットワークを用いて接続することにより, 時間的, 距離的にへ離れた遠隔地の作業者が介在することを前提としてシステムの構築を目標としている。本報では既に開発している微細作業用のマイクロロボットをインターネットを介して遠隔制御するシステムを開発したので, その構成や実験結果について報告する。
Japanese - ネットワ-クによるマイクロロボットの遠隔操作（微細操作仮想空間の構築）
星野 賢; 田中 豊; 青山尚之
日本機械学会ロボメカ部門講演会論文集[CD-ROM]，2P2-35-042, May 2000
Japanese - SEM内微細作業用超小型自走機械の開発
淵脇大会; 郡和寛; 青山尚之
2000年度マイクロメカトロニクス学術講演会論文集, 13-14, Mar. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第41報）CCDカメラ搭載による加工痕の観察・評価
佐伯 聡; 小山直之; 青山尚之
2000年度精密工学会春季学術講演会講演論文集, 2000, 1, 403-403, Mar. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第42報）ドリル加工の高精度化
黒仁田徳士; 田所 茂; 青山尚之
2000年度精密工学会春季学術講演会講演論文集, 2000, 1, 404-404, Mar. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第43報）ホッピング加工の計測と制御
田窪秀治; 阿部貴史; 青山尚之
2000年度精密工学会春季学術講演会講演論文集, 2000, 1, 405-405, Mar. 2000
Japanese - 小型自走機械群による超精密生産機械システム（第44報）インタ-ネットによる遠隔操作システム
羯磨亮二; 青山尚之; 星野 賢; 田中 豊
2000年度精密工学会春季学術講演会講演論文集, 2000, 1, 406-406, Mar. 2000
Japanese - マイクロ振動モータによる共振式跳躍移動機構（第3報）旋回機能について
李 成嚇; 青山尚之
2000年度精密工学会春季大会講演論文集, 2000, 1, 409-409, Mar. 2000
Japanese - Flexible micro-processing by multiple miniature robots in SEM vacuum chamber
O Fuchiwaki; H Aoyama
MHS 2000: PROCEEDINGS OF THE 2000 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, IEEE, 145-150, 2000, In this paper, we describe the newly developed flexible micro processing system organized by the insect size robots in SEM(Scanning Electron Microscope). The small robots that are composed of piezo elements and electromagnets can move and control their position with the resolution of sub micron. And these robots are small enough to be installed in the SEM vacuum chamber in which conventional machines can not be easily set up without special procedures. As a basic function, one small robot which has the micro sliding table can transport it at the SEM focus point precisely and this sliding table call be also positioned by the other small robot. This two robots combination can provide the x-y accurate positioning at any location within the chamber. On the sample table, the small robot with a micro manipulator can handle the small object for picking up and down. And as an advanced micro processing system, the fiber guided YAG-laser is also employed to provide the special material treatment. The operator can control each small robot easily with the help of the real time monitoring Of SEM image. This collaboration of small robots in SEM have great benefit for providing both flexible and accurate micro processing performance with low cost.
International conference proceedings, English - Automatic surface damage exploring and repairing system by precise micro wobots
H Aoyama; S Miyamoto
PROCEEDINGS OF THE FIFTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, AMER SOC PRECISION ENGINEERING, 332-335, 2000
International conference proceedings, English - 小型自走機械群による超精密生産機械システム（第35報）SEM内遠隔操作による微細作業システムの試み
淵脇大会; 青山尚之; 郡和寛; 熊谷徹; 島谷孝
1999年度精密工学会沖縄地方講演会講演論文集, 121-122, Dec. 1999
Japanese - 小型自走機械群による超精密生産機械システム（第39報）衝突干渉を考慮した自動集散動作
田所 茂; 黒仁田徳士; 青山尚之
1999年度精密工学会沖縄地方講演会講演論文集, 123-124, Dec. 1999
Japanese - 小型自走機械群による超精密生産機械システム（第40報）表面凹凸の検出と自動誘導の試み
宮本 諭; 青山尚之
1999年度精密工学会沖縄地方講演会講演論文集, 125-126, Dec. 1999
Japanese - 小型自走機械群による超精密生産機械システム（第36報）音響信号による自動誘導
宮本 諭; 青山尚之
1999年度精密工学会秋季大会講演論文集, 46, Oct. 1999
Japanese - 小型自走機械群による超精密生産機械システム（第37報）微小液体の捕獲と混合
新野弘司; 青山尚之
1999年度精密工学会秋季大会講演論文集, 126, Oct. 1999
Japanese - 小型自走機械群による超精密生産機械システム（第38報）微小化学反応操作の自動化
小野 敬之; 青山尚之; 新野弘司
1999年度精密工学会秋季大会講演論文集, 127, Oct. 1999
Japanese - マイクロ振動モータによる共振式跳躍移動機構（第2報）試作と性能
李 成嚇; 青山尚之
1999年度精密工学会秋季大会講演論文集, 124, Oct. 1999
Japanese - A Low-Cost Passive Acoustic Resonator for Insect-Like Micro Robotic Systems
Pitikhate Sooraksa; Satoshi Miyamoto; Hisayuki Aoyama
Proc. of 16th IAARC/IFAC/IEEE Int.Symp. on Automation and Robotics in Construction,（Madrid Spain）, 725-729, Sep. 1999
English - マイクロ振動モータによる跳躍共振式移動機構の設計と試作
李 成嚇; 青山尚之
第4回知能メカトロニクスワ-クショップ, 213-214, Sep. 1999
Japanese - 微細ファイバスコ-プを搭載した昆虫サイズロボット
佐伯 聡; 青山尚之
日本機械学会ロボメカ部門講演会論文集[CD-ROM]，1A1-58-081, 99-9, No.99-9, Jun. 1999
Japanese - 超小型精密作業ロボットの音響信号による誘導
宮本 諭; 青山尚之
日本機械学会ロボメカ部門講演会論文集[CD-ROM]，1A1-58-082, 99-9, Jun. 1999
Japanese - 微細作業用マイクロロボット群の開発と応用
青山尚之; 小野敬之
日本機械学会ロボメカ部門講演会講演論文集[CD-ROM]，1P1-01-003, 99-9, Jun. 1999
Japanese - Micro Robot with Hopping Indenter for Micro Molding,
Hisayuki Aoyama; Yasuo Kurosaki
Proc. of 1999 Spring Topical Meeting of A.S.P.E,（Chapel Hill, USA）, 19-21, Apr. 1999
English - Precision Miniature Robots with Micro Actuators for Desktop Flexible Production
Hisayuki Aoyama
ICAT 27th Smart Actuator Symposium, （Pittburgh USA）, 6, Apr. 1999
English - Multiple micro robots for desktop precise production
H Aoyama; A Hayashi
PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS, SHAKER VERLAG GMBH, 60-63, 1999
International conference proceedings, English - Automatic precise micro-drilling system by distributed insect robots
H Aoyama; S Tadokoro; T Shligeno; T Ono
PROCEEDINGS OF THE FOURTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, AMER SOC PRECISION ENGINEERING, 283-286, 1999
International conference proceedings, English - マイクロ振動モータによる共振式跳躍移動機構（第1報）動作原理と機構の設計
李 成嚇; 青山尚之
1999年度精密工学会秋季大会講演論文集, 123, 1999
Japanese - マイクロロボットの位置決め技術
青山尚之
精密工学会誌, 65, 10, 1415-1419, 1999
Japanese - 小型自走機械群による超精密生産機械システム（第2報）-精密点描加工と遠隔制御-
青山尚之; 加藤秀剛
精密工学会誌, 64, 12, 1796-1800, 1998
Japanese - Symbiotic system of micro robot and coordinate measuring machine for flexible surface measurement
H Aoyama; M Chujo; G Egashira
PROCEEDINGS OF THE THIRTEENTH ANNUAL MEETING OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, AMER SOC PRECISION ENGINEERING, 316-319, 1998
International conference proceedings, English - Precise Miniature Robots and Desktop Flexible Production
Hisayuki Aoyama
Proc. of Int. Workshop on Microfactories, Tsukuba, 149, 149-156, 1998
English - 精密工学会産学研究協議会
青山尚之
昆虫型精巧ロボットの開発と精密工業への応用研究分科会報告書, 1998
Japanese - Miniature robots for a desktop flexible micro manufacturing system
H Aoyama; F Iwata; A Sasaki
IEEE CONTROL SYSTEMS MAGAZINE, IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 16, 1, 6-12, Feb. 1996, Peer-reviwed, This article describes the basic structure and performance of miniature robots which incorporate micro-tools and micro-probes to produce micro-devices such as LSI materials. In the experiment, typical results at the microscopic level, such as fine grating and micro indenting, are demonstrated. It is suggested that a strategy of combining aspects in a centralized and distributed manner might be useful to increase both productivity and flexibility in manufacturing. The architecture, based on a production process including capability recognition, initial planning,grouping, and dispatching to the working area, will be described to control multiple miniature robots under graphical simulation for the desktop precise flexible micro manufacturing system.
Scientific journal, English - Desktop flexible manufacturing system by movable miniature robots - Miniature robots with micro tool and sensor
H AOYAMA; F IWATA; A SASAKI
PROCEEDINGS OF 1995 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-3, I E E E, 660-665, 1995, Peer-reviwed
International conference proceedings, English - An Ultra Precision Production System Organized by Miniature Robots.
AOYAMA Hisayuki; IWASAKI Takayuki; SASAKI Akira; FUKAYA Jisuke; SHIMOKOHBE Akira
J. of Jpn. Soc. of Pre. Engg., The Japan Society for Precision Engineering, 59, 6, 1006-1012, 1993, This paper describes design, fabrication and performance of the miniature walker developed for a new precision production system. This machine consists of piezo-actuators and electromagnetic legs which are synchronized as to move like an inchworm and those elements are jointed mechanically for the machine to walk on any curved surface including a wall and a ceiling. The magnetic forces of this small machine can be remote controlled critically for preventing from slipping and falling down although conventional inchworm mechanisms need some guide rails or are restricted on a horizontal plane. This arrangement also allows the lack of mechanical elements which may provide a very high positioning resolution with a wider working area. In the experiments, our miniature machines which are the size of golf ball are fabricated and they can move on any inclined surface with continuous sub-micron steps. This results means the mini-walkers have the feasibility for applying to a new precision production system where they can cooperate with conventional machines.
Scientific journal, English
MISC
- The foresight "JSPE micro/nano systems research technical committee", review of activities
Mikio Horie; Fumikazu Oohira; Yuichi Nakazato; Takahiro Ito; Shinsuke Matsui; Hisayuki Aoyama; Hidetsugu Terada; Takaaki Ishii; Daigo Misaki; Katsumi Hosoya
Oct. 2015, Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 81, 10, 899-903, Book review, 0912-0289, 84946011019 - 2A1-A01 Development of micro-mechanical dynamic characteristics measurement system for biological cell with micro tuning fork(Tactile and Force Sensing (1))
Jing Xiaobei; Simizu Yuutai; Aoyama Hisayuki
In recent years, there is a demand to measure the actual state of bio-cells in the field of bio-medical science.As we know, there are severalmethods to observemechanical or viscoelastic characteristics of cellsthrough the microscopic visual observation. Therefore, we propose a method to measure the mechanical characteristics of bio-material, especially by using vibration of piezo driven micro tuning fork. In our device, there is a tiny needle adhered to the end of the tuning fork. We can vibrate this tuning fork at its resonance frequency and the precise mechanically driven platform can lift up the sample so that it can touch the vibration needle. Whit different contact conditions, small changes of the amplitude and the phase shift of the micro vibration can be measured. Thus we can get the mechanical characteristics of the sample and then estimate the health condition of bio-cells in term of the mechanical properties., The Japan Society of Mechanical Engineers, 22 May 2013, ロボティクス・メカトロニクス講演会講演概要集, 2013, "2A1-A01(1)"-"2A1-A01(3)", Japanese, 110009963182, AA11902933 - 1A2-P17 Development of precise attitude and position control system by the drive of the wire(Mechanism and Control for Wire Actuation System)
OUKO Naoyuki; TAKAHASHI Shuhei; TAKAYA Tsubasa; AOYAMA Hisayuki
Mechanical device with high accuracy and high degree of freedom such as the manipulator, they are often used in industrial robots. In addition, the research and development in this area have been proposed. However, in the environment of the microscope, there is no small and flexible manipulator which can be applied a small subject from the various direction and the angle by tools such as a syringe or knife. In this study, by using the drive with wire as a control method, we developed a control system of the manipulator with small size can be controlled angular coordinate θ and φ. We assume that the micro-injector as a target to control posture freely and it's used at the target of millimeter size., The Japan Society of Mechanical Engineers, 22 May 2013, ロボティクス・メカトロニクス講演会講演概要集, 2013, "1A2-P17(1)"-"1A2-P17(3)", Japanese, 110009962968, AA11902933 - 4105 Microscopic operations system using micro robots : Development of the micro manipulation tool using micro fluid control
Misaki Daigo; Koshimizu Shigeomi; Oguri Atsushi; Suzuki Kengo; Aoyama Hisayuki
The Japan Society of Mechanical Engineers, 03 Jul. 2008, Manufacturing Systems Division Conference, 2008, 93-94, Japanese, 110007706139, AA11903029 - Development of the micro manipulation tools using micro liquid control for microscopic operations system
Daigo Misaki; Shigeomi Koshimizu; Ohmi Fuchiwaki; Hisayuki Aoyama
2008, Proc. of the Third International Conference on Positioning Technology 2008 (ICPT 2008) - レーザ振動計校正規格案ISO16063‐41の検証
大田明博; 臼田孝; 野里英明; 石神民雄; 青山尚之; 工藤勝久
01 Mar. 2007, 精密工学会大会学術講演会講演論文集, 2007, G03, Japanese, 200902259258587001 - 小型自走機械群による超精密生産機械システム 第109報 電磁石を用いた極微少液滴塗布機構の作成
越湖智之; 安達原裕; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝; 加藤好志; 入江優花
01 Mar. 2007, 精密工学会大会学術講演会講演論文集, 2007, E03, Japanese, 200902216464028603 - Sub-pico Liter Dispensing Mechanism With Precise Optical Gap Detector
Aoyama H; Ekko T; Adachihara Y; Fuchiwaki O; Misaki D; Irie Y; Dejima S; Kato Y; Usuda T
2007, Proc. of ASPE2007 Annual meeting, 223-226, 84884737345 - Precise Micro Robot Bio-Cell Manipulation Based on the Microscopic Image Recognition
Daigo Misaki; Chiba Naoto; Takeshi Usuda; Ohmi Fuchiwaki; Hisayuki Aoyama
2007, Mechatronics for Safety, security and Dependability in a New Era, 241-246 - Development of the Orthogonal Micro Robot for Accurate Microscopic Operations
Ohmi Fuchiwaki; Daigo Misaki; Chisato Kanamori; Hisayuki Aoyama
2007, Proc. of International Conference on Mechatronics and Automation (ICMA 2007), 416-421 - Micro rescue robot for Tokai earthquake
Daigo Misaki; Hisayuki Aoyama; Micro rescue robot; for; Tokai earthquake
2007, Proceedings of the International Conference on Engineering, Applied Sciences and Technology (ICEAST 2007), 169-172 - 小型自走機械群による超精密生産機械システム 第106報 圧電変位拡大機構による高速化
三上匡博; 渕脇大海; 青山尚之; 見崎大悟; 臼田孝
04 Sep. 2006, 精密工学会大会学術講演会講演論文集, 2006, B74, Japanese, 200902234277580252 - 小型自走機械群による超精密生産機械システム 第105報 極微少液滴塗布機構の性能評価
越湖智之; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
04 Sep. 2006, 精密工学会大会学術講演会講演論文集, 2006, B73, Japanese, 200902266910614632 - 小型自走機械群による超精密生産機械システム 第107報 超小型精密移動機構の移動性能の評価方法について
入江優花; 淵脇大海; 青山尚之; 臼田孝
04 Sep. 2006, 精密工学会大会学術講演会講演論文集, 2006, B75, Japanese, 200902223304494566 - 小型自走機械群による超精密生産機械システム 第103報 FB制御とFF制御を用いた作業システムの開発
川井崇史; 鈴木義昭; 渕脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Mar. 2006, 精密工学会大会学術講演会講演論文集, 2006, L10, Japanese, 200902205327788321 - 微小磁性柔軟体の形状制御
小図子武弘; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Mar. 2006, 精密工学会大会学術講演会講演論文集, 2006, L23, Japanese, 200902201605060657 - 小型自走機械群による超精密生産機械システム 第101報 最小二乗法と逐次学習機能を用いたXYθ型移動機構の動作補正
田中哲治; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Mar. 2006, 精密工学会大会学術講演会講演論文集, 2006, L08, Japanese, 200902227112204810 - 小型自走機械群による超精密生産機械システム 第102報 インチワーム式球面3自由度マニピュレータの搭載
伊藤曉; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Mar. 2006, 精密工学会大会学術講演会講演論文集, 2006, L09, Japanese, 200902273057806077 - 小型自走機械群による超精密生産機械システム 第104報 ピペット振動による局所流動を用いた新しい細胞操作方法の提案
千葉直人; BINGHU Piao; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Mar. 2006, 精密工学会大会学術講演会講演論文集, 2006, L11, Japanese, 200902275387262785 - Micro rescue robot with CCD camera and IR sensor for earthquake rescue
Daigo Misaki; Akira Saito; Atushi Himoto; Hisayuki Aoyama
2006, Extend Abst. of IASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006) - Desktop Micro Machining System by Multiple Micro Robots
Hisayuki Aoyama; Ohmi Fuchiwaki; Daigo Misaki; Takashi Usuda
2006, Proc. of the 2nd IEEE International Conference Cybernetics & Intelligent Systems and Robotics, Automation & Mechatronics, 638-643 - Non-Contact Bio Cell Manipulation by Nonlinear Micro Flow around the Vibrated Pipette on Micro Robot
Hisayuki Aoyama; Naoto Chiba; Ohmi Fuchiwaki; Daigo Misaki; Takashi Usuda
2006, Proc. of ASPE2006 Annual meeting, Poster Sessions Mechatronics-1 - Development of the micro rescue robot for survivor position identification
Daigo Misaki; Akira Saito; Tadashi Masuda; Hisayuki Aoyama
2006, Proc. of 2nd Int. Conf. on Positioning Technology, 132-133 - Precise microscopic observation system based on the non-contact rotational mechanism using a micro robot
Daigo Misaki; Atishi Oguri; Ning Zhu; Ohmi Fuchiwaki; Hisayuki Aoyama
2006, Proc. of 2nd Int. Conf. on Positioning Technology, 104-105 - Micro Robot Manipulation System for Micro Object Observation and Manipulation
Daigo Misaki; Atushi Oguri; Naoto Chiba; Nomura Yoshihiro; Ohmi Fuchiwaki; Hisayuki Aoyama
2006, Proc. of 2nd Asia International Symposium on Mechatronics, D4-05 - Development of micro robots and launching mechanism for survivors survey in rescue operation
Katsuya Mugishima; Hisayuki Aoyama; Daigo Misaki; Theodore Sumrall
2006, Proc. of 2nd Asia International Symposium on Mechatronics, D1-06 - 小型自走機械群による超精密生産機械システム 第95報 XYθ型小型自走機械のインチウォーム動作の等速補正手法
鈴木義昭; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Sep. 2005, 精密工学会大会学術講演会講演論文集, 2005, L14, Japanese, 200902207961473565 - 小型自走機械群による超精密生産機械システム 第98報 複数のピペット振動による局所流動を用いた卵細胞の位置決めと三次元精密回転の試み
千葉直人; 野村英寛; PIAO Binghu; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Sep. 2005, 精密工学会大会学術講演会講演論文集, 2005, L17, Japanese, 200902232989938460 - 小型自走機械群による超精密生産機械システム 第99報 XYθ型移動機構の固有パラメータを用いた自動補正システムの改良
田中哲治; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Sep. 2005, 精密工学会大会学術講演会講演論文集, 2005, L18, Japanese, 200902233076372183 - 小型自走機械群による超精密生産機械システム 第97報 マイクロピンセットの開発
伊藤暁; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Sep. 2005, 精密工学会大会学術講演会講演論文集, 2005, L16, Japanese, 200902252969103304 - 小型自走機械群による超精密生産機械システム 第96報 デスクトップマイクロファクトリの可搬性に優れた補正システムの開発
川井崇史; 鈴木義昭; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Sep. 2005, 精密工学会大会学術講演会講演論文集, 2005, L15, Japanese, 200902257572273353 - 微細ツールを搭載した超小型ロボットと焦点自動位置決め
梅木偉斗; 藤井裕介; 千葉直人; 鈴木義昭; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
09 Jun. 2005, 日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM), 2005, 2A1-N-083, Japanese, 200902243501310702 - XYθ型自走機械による精密ドリル加工システムの開発
川井崇史; 脇海道豊; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
09 Jun. 2005, 日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM), 2005, 2A1-N-082, Japanese, 200902263770265692 - 産総研における振動加速度標準の整備と今後の課題
臼田孝; 大田明博; 石神民雄; 淵脇大海; 見崎大悟; 青山尚之; 佐藤宗純
01 Mar. 2005, 精密工学会大会学術講演会講演論文集, 2005, L68, Japanese, 200902292408213765 - 小型自走機械群による超精密生産機械システム 第94報 自走機械のための精密誘導システムの開発
脇海道豊; 川井崇史; 茅野史郎; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝
01 Mar. 2005, 精密工学会大会学術講演会講演論文集, 2005, N04, Japanese, 200902203212338362 - 小型自走機械群による超精密生産機械システム 第91報 微小変位センサを用いた極微少液滴塗布機構の自動振幅制御
越湖智之; 木原浩孝; 戸部信幸; 淵脇大海; 青山尚之; 見崎大悟; 臼田孝; 井野内康克
01 Mar. 2005, 精密工学会大会学術講演会講演論文集, 2005, N01, Japanese, 200902242555194302 - Micro Hopping Robot with IR Sensor for Disaster Survivor Detection
Hisayuki Aoyama; Atushi himoto; Ryutaro Misumi; Ohmi Fuchiwaki; Daigo Misaki; Thedore Sumrall
2005, Pro. of the 2005 IEEE International Workshop on Safety,Security and Robotics, 189-194 - Automatic Micro-Indentation and Inspection System by Piezo Driven MicroRobot with Multiple Inner Sensors
Ohmi Fuchiwaki; Nobuyuki Tobe; Hisayuki Aoyama; Daigo Misaki; Takashi Usuda
2005, Proc. of the IEEE International Conference on Mechatronics & Automation, 83-88 - Development of micro rescue robot - human detection
Atsuhisa Himoto; Hisayuki Aoyama; Ohmi Fuchiwaki; Daigo Misaki; Theodore Sumrall
2005, Proc. of the 2005 IEEE International Conference on Mechatronics, 526-631 - Micro Robotics and Its Bio-Applications
Daigo Misaki; Ohmi Fuchiwaki; Naoto Chiba; Hisayuki Aoyama
2005, Proc. of International Conference on Precision Engineering and Micor/Nano Technology in Asia, 600-634 - Development of pico dispenser mechanism for microrobot : Accurate control for dispensing amount
Kihara H; Mizutani Y; Fuchiwaki O; Misaki D; Aoyama H
The Japan Society of Mechanical Engineers, 18 Jun. 2004, ロボティクス・メカトロニクス講演会講演概要集, 2004, 133-133, Japanese, 110004069885, AA11902933 - Development of In-Briefcase Micro Robots System for Nano-Operation
Suzuki Y; Fujii Y; Fuchiwaki O; Misaki D; Aoyama H
The Japan Society of Mechanical Engineers, 18 Jun. 2004, ロボティクス・メカトロニクス講演会講演概要集, 2004, 132-132, Japanese, 110004069882, AA11902933 - Precise Navigation for Piezo Based Versatile Miniature Robot with self-gauging Detector
Nobuyuki Tobe; Ohmi Fuchiwaki; Daigo Misaki; Takeshi Usuda; Hisayuki Aoyama
2004, Proc. of 1st Int. Conf. on Positioning Technology, 127-128 - Piezo Based Micro Robots System for Precise Micro Bio and Chemical Applications
Hisayuki Aoyama; Ohmi Fuchiwaki; Daigo Misaki
2004, Proc .of Smart Actuator 2004, 164-167 - Insect Based Navigation of Micro Robots for Artificial Insemination
Hisayuki Aoyama; Daigo Misaki; Ohmi Fuchiwaki
2004, Proc. of Int. Conf. on Intelligent Mechatronics and Automation, 125-129 - Precise Automatic Guiding and Positioning of Micro robots with a Fine Tool for Microscopic Operations
Daigo Misaki; Shiro Kayano; Yutaka Wakikaido; Ohmi Fuchiwaki; Hisayuki Aoyama
2004, Proceedings of 2004 IEEE/RSJ International Conference on Intelligent, Robots and Systems, 210-223 - Self-positioning control doe micro robot with optical surface sensor
Nobuyuki Tobe; Ohmi Fuchiwaki; Daigo Misaki; Hisayuki Aoyama; Takeshi Usuda
2004, Proc. of 1st Asia International symposium on Mechatronics, 811-815 - 3D Micro Image Recognition for in Bio-Cell Operation by Micro Robots
Daigo Misaki; Chiba Naoto; Usuda Takeshi; Ohmi Fuchiwaki; Hisayuki Aoyama
2004, Proc. of The 19th annual meeting of ASPE, 273-276 - Desktop Micro Drilling and Assembling System by Microrobots -Combination of Global and Local Positioning System
Yutaka Wakikaido; Takeshi Kawai; Shirou Kayano; Daigo Misaki; Ohmi Fuchiwaki; Takeshi Usuda; Hisayuki Aoyama
2004, Proc. of the 4th International Workshop on Microfactories, 1 - 3D Micro Robot Manipulation Control Based on Intelligent MicroscopicImage Recognition
Daigo Misaki; Chiba Naoto; Takeshi Usuda; Ohmi Fichiwaki; Hisayuki Aoyama
2004, Proc. of International Conference on Machine Automation, 463-464 - Flexible Microprocessing Organized by Versatile Microrobots
Ohmi Fuchiwaki; Daigo Misaki; Hisayuki Aoyama
2003, 7th International Conference on Mechatronics Technology, 121-126 - 小型自走機械群による超精密生産機械システム : 第68報 XYθ型小型自走機械用マニピュレータの開発
庄司 裕一; 淵脇 大海; 青山 尚之
01 Oct. 2002, 精密工学会大会学術講演会講演論文集, 2002, 2, 112-112, Japanese, 10009984021, AN1018673X - 小型自走機械群による超精密生産機械システム : 第69報 XYθ型移動機構の円弧動作の自動補正システム
淵脇 大海; 南條 隆一; 青山 尚之
01 Oct. 2002, 精密工学会大会学術講演会講演論文集, 2002, 2, 113-113, Japanese, 10009984025, AN1018673X - 小型自走機械群による超精密生産機械システム:第64報XYθ型移動機構の顕微鏡下微細作業
淵脇 大海; 木須 隆; 青山 尚之
01 Mar. 2002, 精密工学会大会学術講演会講演論文集, 2002, 1, 96-96, Japanese, 10008499727, AN1018673X - 小型自走機械群による超精密生産機械システム:第62報XYθ型移動機構のツール先端の円弧動作
庄司 裕一; 南條 隆一; 淵脇 大海; 青山 尚之
01 Mar. 2002, 精密工学会大会学術講演会講演論文集, 2002, 1, 32-32, Japanese, 10008499531, AN1018673X - 小型自走機械群による超精密生産機械システム:第63報XYθ型移動機構の自動補正システム
庄司 裕一; 南條 隆一; 淵脇 大海; 青山 尚之
01 Mar. 2002, 精密工学会大会学術講演会講演論文集, 2002, 1, 33-33, Japanese, 10008499533, AN1018673X - マイクロロボットによる微細作業技術の開発と応用
青山尚之
Mar. 2002, 計測と制御, 41, 3, 231-237, Japanese, Peer-reviwed, Introduction other - 加工痕を観察・評価する超小型ロボット
青山尚之
日本工業出版, Dec. 2001, 画像ラボ(日本工業出版), 12, 12, 10-12, Japanese, Introduction other, 0915-6755, 40005024401, AN10164169 - 微小傷を自動探査・補修する超小型精密ロボット
青山尚之
Nov. 2001, M&E(工業調査会), 11, 138-145, Japanese, Introduction other - 小型自走機械群による超精密生産機械システム(第34報), 複数台による微小穴加工と自動化
青山尚之
1999, 1999年度精密工学会春季大会学術講演会講演論文集, 297, 10004271798, AN1018673X - 超小型精密ロボット集団による卓上生産システム
青山尚之
1998, 機械学会75期通常総会講演論文集, 1998, 628-631, 80010269322 - センチサイズ精密ロボットによる三次元形状計測 (特集 計測技術の最新動向)
青山 尚之
工業調査会, Mar. 1997, 自動化技術, 29, 3, 32-37, Japanese, 0287-8461, 40001575612, AN00105709 - Collaborative Precise Operation by Two Miniature Robots-Single Diamond Cutting with Local Position Feedback
AOYAMA Hisayuki
1994, Proc. of 9th Annual Meeting of A. S. P. E., 238-241, 10007950980
Books and other publications
Lectures, oral presentations, etc.
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伊丹洋平; 平田慎之介; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会秋季大会 学術講演会
Sep. 2011 - ワイヤ駆動式マイクロマニピュレータの開発 -第二報 ひずみ検出による張力制御-
篠田昌宏; 入江優花; 平田慎之介; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会秋季大会 学術講演会講演論文集
Sep. 2011 - ニードル式微少液滴塗布機構における液体の粘性によるニードルの振動特性変化
平田慎之介; 廣瀬一樹; 入江優花; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会秋季大会 学術講演会講演論文集
Sep. 2011 - 微小エマルション生成機構の試作とマイクロカプセル生成法への応用
寺崎清; 平田慎之介; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会秋季大会 学術講演会講演論文集
Sep. 2011 - 対向微流動を用いた微小物体の非接触位置決めシステムの検討,” 2011.
豊島彩; 平田慎之介; 青山尚之; 黄維軍; 張勤
Oral presentation, Japanese, 2011年度精密工学会秋季大会 学術講演会講演論文集
Sep. 2011 - マルチニードル型キャピラリを用いた表面張力によるマイクロマニピュレーション -ニードル直動機構の自動化と対象姿勢の静的制御
平田慎之介; 重田琢也; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会秋季大会 学術講演会講演論文集,
Sep. 2011 - 表面張力によるマイクロマニピュレーションを目的としたマルチニードル型キャピラリの開発
重田琢也; 平田慎之介; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会春季大会 学術講演会講演論文集
Mar. 2011 - 微少液適塗布機構におけるニードルの振動特性変化を用いた位置決め機構の開発
平田慎之介; 廣瀬一樹; 入江優花; 青山尚之; ニードル式
Oral presentation, Japanese, 2010年度精密工学会秋季大会 学術講演会講演論文集,2010年度精密工学会秋季大会
Mar. 2011 - ニードル式微少液滴塗布機構におけるニードルの振動特性を用いた塗布ギャップ及び液適塗布量の制御
平田慎之介; 廣瀬一樹; 入江優花; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会春季大会 学術講演会講演論文集,
Mar. 2011 - ワイヤ駆動式マイクロマニピュレータの開発 -第一報 試作と基本性能-,
篠田昌宏; 入江優花; 平田慎之介; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会春季大会 学術講演会講演論文集
Mar. 2011 - 表面張力によるマイクロマニピュレーションを目的としたマルチニードル型キャピラリの開発
重田琢也; 平田慎之介; 青山尚之
Oral presentation, Japanese, 2011年度精密工学会春季大会 学術講演会講演論文集
Mar. 2011 - ニードル式微少液適塗布機構におけるニードルの振動特性変化を用いた位置決め機構の開発
平田慎之介; 廣瀬一樹; 入江優花; 青山尚之
Oral presentation, Japanese, 2010年度精密工学会秋季大会 学術講演会,2010年度精密工学会秋季大会 学術講演会講演論文集
Sep. 2010 - ワイヤー駆動式マイクロマニピュレータの開発
豊島; 青山
Oral presentation, Japanese, 第22回電磁力関連のダイナミクスシンポジウム講演論文集,第22回電磁力関連のダイナミクスシンポジウム
May 2010 - 多品種少量生産型マイクロカプセル生成装置の開発
秦; 青山
Oral presentation, Japanese, 精密工学会秋季大会学術講演論文集(2009.9),精密工学会秋季大会
Sep. 2009 - 微小液滴塗布機構におけるニードルの振動特性変化を用いた 位置決め手法の基礎的研究
平田; 青山
Oral presentation, Japanese, 精密工学会秋季大会学術講演論文集(2009.9),精密工学会秋季大会学術講会
Sep. 2009 - 階段清掃ロボットの開発-第1報 基本コンセプトと機構設計
岡部俊介; 青山尚之; 江森幸一
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第59報) -ホッピング機構を利用した微細加工機の搭載
新村 武; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第60報) -受精細胞の孵化
田窪秀治; 茅野史朗; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第61報) -磁気センサ群による位置推定と精密誘導作業
羯磨亮二; 井田剛史; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第62報) -XYθ型移動機構のツ－ル先端の円弧動作
庄司裕一; 南條隆一; 淵脇大海; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第63報) -XYθ型移動機構の自動補正システム
南條隆一; 庄司裕一; 淵脇大海; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第64報) -XYθ型移動機構の顕微鏡下微細作業
淵脇大海; 木須隆; 青山尚之
Oral presentation, Japanese, 002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第65報) -磁気痕跡に基づく誘導
渡辺竜馬; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第66報) -表面微小傷の自動探査と修復動作(2)
辺竜馬; 青山尚之
Oral presentation, Japanese, 2002年度精密工学会春季大会講演論文集
Mar. 2002 - 小型自走機械群による超精密生産機械システム(第55報) -熱の搭載と熱処理作業の試み-
近藤真; 池辺健一; 青山尚之
Oral presentation, Japanese, 2001年度精密工学会秋季大会講演論文集
Oct. 2001 - 小型自走機械群による超精密生産機械システム(第56報) -精密交接による細胞操作の試み-
田窪秀治; 茅野史朗; 青山尚之
Oral presentation, Japanese, 2001年度精密工学会秋季大会講演論文集
Oct. 2001 - 小型自走機械群による超精密生産機械システム(第57報) -磁気による位置推定と遠隔誘導-
羯磨亮二; 井田剛史; 青山尚之
Oral presentation, Japanese, 2001年度精密工学会秋季大会講演論文集
Oct. 2001 - 小型自走機械群による超精密生産機械システム(第58報) -XYθ型小型自走機械の位置決め性能と微細加工ステ－ジへの応用
淵脇大海; 庄司裕一; 木須隆; 南条隆一; 青山尚之
Oral presentation, Japanese, 2001年度精密工学会秋季大会講演論文集
Oct. 2001 - 超小型自走機械による球の精密位置決め
井田剛史; 羯磨亮二; 青山尚之
Oral presentation, Japanese, 電気学会第13回電磁力関連のダイナミクスシンポジウム論文集
Jun. 2001
Courses
- Summer Training
The University of Electro-Communications - サマートレーニング
電気通信大学 - Gradute International Jointly Offered Academic Training(Long term)
The University of Electro-Communications - 大学院国際協働学術研修（長期）
電気通信大学 - Gradute International Jointly Offered Academic Training
The University of Electro-Communications - 大学院国際協働学術研修
電気通信大学 - Mechatronics Experiment
The University of Electro-Communications - メカトロニクス実験
電気通信大学 - Applied Robotivs Engineering
The University of Electro-Communications - 応用ロボット工学特論
電気通信大学 - Advanced Robotics and Mechatronics Engineering
電気通信大学 - Advanced Robotics and Mechatronics Engineering
The University of Electro-Communications - Advanced Robotics and Mechatronics Engineering
The University of Electro-Communications - 知能機械工学基礎実験ⅠおよびⅡ
The University of Electro-Communications - 知能機械工学基礎
The University of Electro-Communications - 計測工学
電気通信大学 - 知能機械工学基礎
The University of Electro-Communications - 知能機械工学基礎
電気通信大学 - 大学院インターンシップ 海外長期
The University of Electro-Communications - 大学院インターンシップ 海外長期
電気通信大学 - 大学院インターンシップ 海外
The University of Electro-Communications - 大学院インターンシップ 海外
電気通信大学 - 大学院インターンシップ(長期)
The University of Electro-Communications - 大学院インターンシップ(長期)
電気通信大学 - 大学院インターンシップ
The University of Electro-Communications - Mechatronics
The University of Electro-Communications - メカトロニクス
電気通信大学 - 計測工学概論
The University of Electro-Communications - 知能機械工学基礎実験ⅠおよびⅡ
The University of Electro-Communications - 知能機械工学基礎実験ⅠおよびⅡ
電気通信大学 - Advanced Internship (Long-term & Overseas)
The University of Electro-Communications - 大学院インターンシップ（海外長期）
電気通信大学 - Advanced Internship (Overseas)
The University of Electro-Communications - 大学院インターンシップ（海外）
電気通信大学 - Advanced Internship (Long-term)
The University of Electro-Communications - 大学院インターンシップ（長期）
電気通信大学 - Advanced Internship
The University of Electro-Communications - 大学院インターンシップ
電気通信大学 - Internship (overseas）
The University of Electro-Communications - インターンシップ（海外・Ｍ科）
電気通信大学 - Internship
The University of Electro-Communications - インターンシップ（Ｍ科）
電気通信大学 - 知能機械工学基礎実験I
The University of Electro-Communications - 知能機械工学基礎実験IⅡ
The University of Electro-Communications - 知能機械工学基礎実験IⅡ
電気通信大学 - ロボット応用工学特論
The University of Electro-Communications - Graduate Technical English
The University of Electro-Communications - Introduction to Mechatronics
電気通信大学 - ロボット応用工学特論
The University of Electro-Communications - ロボット応用工学特論
電気通信大学 - 大学院技術英語
The University of Electro-Communications - 大学院技術英語
電気通信大学 - Introduction to Mechatronics
The University of Electro-Communications - Introduction to Mechatronics
The University of Electro-Communications - 知能機械工学基礎実験I
The University of Electro-Communications - 知能機械工学基礎実験I
電気通信大学 - Engineering Metrology
The University of Electro-Communications - 計測工学概論
電気通信大学
Research Themes
- Development of micro injection system for high viscous liquid
AOYAMA HISAYUKI; IWATA Futoshi; HIRATA Shinnosuke; OOTA Akihiro
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, The University of Electro-Communications, Grant-in-Aid for Scientific Research (B), In this project, the new method that is composed of thin glass pipette and tungsten needle has been propsed so that micro capsules with the size less than 100 micro meter in diameter. In this mechanism, the thin needle can push out the small amount of the high viscous liquid in the tube to the target surface. Then the liquid at the tip end can be transfered on the target surface and it can be capsule in another liquid.In the experiments, the conditions such as the tube diameter and the viscosity were surveyed to get the appropriate size of the capsule and droplet. This simple mechanism is unique so that it can provide the small amount of the high viscous liquid with 50,000mPas with high repeatability., 24360094
01 Apr. 2012 - 31 Mar. 2015 - Cooperation Among Distributed Autonomous Robots
KAJITANI Makoto; KANAMORI Chisato; MING Aiguo; AOYAMA Hisayuki
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, The University of Electro-Communications, Grant-in-Aid for Scientific Research (B)., This project is a fundamental research on cooperation among multiple distributed autonomous mobile robots. The purpose is to develop cooperative control algorithms, sensor systems and several prototypes of mobile robot and mobile manipulator and to demonstrate the availability of developed systems by experiments. The basic concept of intelligent distributed autonomous robot system has been discussed and experiments by newly developed robots have been done by researchers at both University of Electro-Communications and Griffith University. The results obtained are as follows. 1) Several methods of obstacle detection and obstacle avoidance have been developed by using characteristics of multiple infrared sensor and ultrasonic sensor cooperatively. 2) As a case study, cooperation among multiple autonomous robots in intelligent vehicles and trans-portation systems is considered. Algorithm for road intersection crossing, front-vehicle tracking, overtaking, lane following, obstacle avoidance, front-vehicle distance control, narrow bridge crossing and formation driving have been developed and implemented to the robot system. 3) A new method, that is, rapid obstacle sensing using mobile robot sonar (ROSUM), for treating the crosstalk data of a so-called sonar ring, while employing a simultaneous firing regime has been proposed. It is shown by experiments that the robot with ROSUM sonar ring can avoide obstacles quickly and smoothly in complicated environment. 4) A new prototype of mobile manipulator with exchangeable active/passive joints has been developed in order to solve various problems in performing a cooperated task, in which a long pipe is to be moved out from a restrained location, transferred to an assigned position and set to a new restrained location. Experiments on proposed task by the cooperation of human and the mobile manipulator have been performed. The task was performed successfully by the simple control method. Cooperation for the task by two mobile manipulators will be done in the next work., 10044141
1998 - 1999 - BASIC RESEARCH ON INTEGRATION OF MICRO FABRICATION BASED ON MECHANICAL AND PHYSICAL PROCESS ASSISTED BY MINIATURE ROBOTS
AOYAMA Hisayuki; IWATANI Futoshi; SASAKI Akira
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (C), In 1996 the design and development of micro robots with micro tools were investigated. Micro fabrication process which is the combination of microscopit mechanical removal and physical deposition of metal were proposed. As the results of primary experiments, several performances were obtained as mentioned below, (1) Precise positioning for the sample and the mask plates was accomplished. (2) different materials of metal grains can be picked up and transported into the melting pot for flash-deposition. (3) Dopping process can be used for heat difusion of material. In 1997 the special samples of SiO2 sputtered Si substrate were machined by the micro hopping tool of the miniature robot for micro indentation in the vacuum chamber. And another trial experiment was also carried out for investigating the possibility of semiconductor micro devices., 08650131
1996 - 1997 - 超小型自走機械による薄膜プロセスの精密制御
青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 奨励研究(A), 1.高真空容器中で動作可能な超小型自走機械の設計・試作 接合部のない一体構造による超小型自走機械計:これまでは部材を組立ることにより超小型機構を構成していたが、接着材などが高真空中では蒸発することが予想された。そこで接合部ができるだけ少なくなるような構造体の提案と設計を行った。ここでは材料自体もステンレス材を使用し、駆動用アクチュエータなども特殊加工を施したものを用いて試作した。また高真空容器内で移動させるため、現有の真空蒸着装置を改造し、内部への信号供給系を組込んだ。その結果、真空度10^<-5>Torrの高真空状態で、精密に移動する超小型自走機械の試作に成功した。さらには左右の旋回能力も確認し、真空中での超精密作業の可能性を示唆することができた。 2.蒸着法により空間を浮遊する金属原子群を超小型自走機械により選択的に試料に付着させる実験: 試験片に現有するスパッタ装置で薄膜片を生成し、これをベース材として、超小型自走機械により微小薄膜を生成する実験を行った。自走機械には予め微細なパターンを搭載し、これを試料上で精密位置決めし、金属を蒸着させた。その結果、任意の位置に性格に金属薄膜パターンを生成することが確認された。電子顕微鏡による観察では、エッジ部において、パターン精度も確認された。 またこの試料に対して微小電極を搭載した超小型自走機械で精密に接近し、局所的にプラズマを発生させて材料が精密の除去できるかどうかを実験的に検討した。その結果、局所的な放電現象を発生することは成功した。しかしこれによる材料の除去は、探針と試料の距離により、除去される材料の範囲が変化すること、真空度が増加するに従って、放電が発生しなくなるため、不活性ガスなどの導入が必要であることなどが明らかになった。, 07750138
1995 - 1995 - Development of Microfabrication and Measurement System by Multiple Miniature Robots with Micro Tools in High Vacuum Chamber
AOYAMA Hisayuki; SUGAWARA Ryosuke; HARA Tsutomu; MURAKAMI Kenji; SHIMOKOHBE Akira; SASAKI Akira
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, SHIZUOKA UNIVERSITY, Grant-in-Aid for Developmental Scientific Research (B), -a. Scanning Probe Microscope Imprementation and Microfabrication (Sasaki and Hara) Several kinds of fine probe, tunneling current, atomic forow and near field, for scanning the surface of sample were developed and characteristics of those probes were investigated. Furthermore the pulse discharge from micro probe was applied to the sample to make the microscopic machining which should be useful for micro devices production. -b. Miniature Robot for ultra high vacuum chamber (Aoyama and Sasaki) Convensional miniature mechanisms are designed for moving in the atmospher condition. However it must be reconsidered to work in vacuum condition. Then the mechanical elements, joint components and electrical wiring should be improved so much. Finally the new miniature robot which can move even in high vacuum condition of 10^5 Torr was assembled successfully to control the microfabrication process. -c. Microscopic behavior of semiconductor material surface in high vacuum condition (Murakami) Surface condition of several metal and ceramics were investigated to the level of atoic size in ultra high vacuum condition. Interference between the sample and the probe in-situ contact were characterized. And the miniature robot with a micro discharge probe could be made for microfabrication in high vacuum condition., 06555035
1994 - 1995 - 汎用機械と超小型自走機械との共存協調による精密作業
青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 奨励研究(A), 本研究ではまず作業機器を小型・高機能化すると同時にそれ自体に精密移動機能を持たせ、それらの複数を遠隔から協調制御させることで高度でしかも柔軟な精密作業・保守システムを構築することを目的としている。そこで移動性や精密作業領域を拡張する場合これらの小型自走機械群を汎用機械と共存協調させる必要があり、このための“機構的な結合手法"や“制御情報の変換方法"などの検討を行った。 (1)自由曲面移動が可能なプローブ付き超小型自走機械の設計・試作: すでに基礎的な設計方法と実験により超小型機械の製作に必要な材料、機械要素、アクチュエータなどを明らかにしており、これに基づいて試作する。この場合、対象面に対して測定プローブを常に垂直に設定する機構が必要となるのでその設計と試作を行った。(超小型自走機械用部品、駆動回路部品を購入) (2)超小型自走機械上のプローブと三次元測定機アーム先端の結合機構: 超小型自走機械に取り付けられたプローブを包囲するように微小3次元変位計を内蔵した機構を設計・試作し、基本性能などを実験的に明らかにした。その結果、x,y方向の変位では±100μmの測定範囲で0.1μmの精度で、また角度では2方向の角度成分を±0.1秒の精度で計測が可能であることを明らかにした。 (結合部用の機械材料、アクチュエータを購入), 06750118
1994 - 1994 - ホットウォール法で作製した有機薄膜・半導体超格子の走査型トンネル顕微鏡による観察
佐々木 彰; 秋山 鐵夫; 藤安 洋; 青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 重点領域研究, 有機薄膜・半導体超格子のトンネル物性は興味が持たれており、本研究においてホットウォール法で作製した薄膜、多様な機能を発現する有機分子及び半導体超格子のSTM観察及びI-V測定を行った。 有機薄膜においては直線分子である1,10-ジアミノデカンを基板に対して水平配向するように制御して作製した。基板は原子レベルでフラットなAu(111)を用いた。STM像ではAu基板のステップやグレイン境界部分でSTM像が乱れる部分があり、この部分を有機分子と断定し、I-V測定を行った。I-V測定ではAu基板とは明らかに異なる傾向が見られ、約2eV程度のエネルギーギャップが観察された。またバイアス負側で負性抵抗が数カ所観察された。しかしまだ個々の分子が見えていないので今後、個々の分子を観察して分子の配列や基などとこれらのI-V特性の関係を明らかにする必要がある。 半導体超格子についてはZnSe-ZnS超格子についてSTM観察をおこなった。STM像は量子ポテンシャルの違いから生じる超格子の周期構造を観察できた。またn型にドープされたZnSe(100)についてI-V特性ではサンプルバイアスがマイナス側のみでトンネル電流が流れるダイオード特性を示した。またGaAs基板にホットウォール法で作製したZnSe(100)は方向性をもって成長していることを確認した。, 06236210
1994 - 1994 - 精密加工計測用の超小型自走機械とその組織化制御
青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 奨励研究(A), 本研究ではあらゆる自由曲面を精密に移動可能でしかも小型化された工具、プローブを搭載し加工・測定機能を有する超小型精密自走機構を設計・試作し、複数のこれらを遠隔分散制御することでより高度な精密生産システムの構築を試みた。本年度は挟所において実際に精密作業を実行させるためにこれら複合の小型自走機械を最も効果的に作業させる計測系と動作指令系について設計および実験を行う。まず第1段階として精密作業に関する指令情報を3階層レベルに整理、それぞれをコンピュータネットワークで結合することで自走機械群を精密作業課題に応じて組織化することを試みた。 (1)最上位は統轄レベルとして精密作業の全体計画をマンマシンインターフエ-ス介してオペレータと決定する。この時作業課題の概略が設定される。15EA03:(2)次に組織化レベルとして、前述の作業課題に必要な機能が抽出・選択されるとともに実際の工程が計画・評価される。 (3)機器制御レベルにおいては小型自走機械のアクチュエータ・マニピュレータ、センター機器、動力エネルギーなどが実時間で制御・処理される。 この時上位レベルからは要求される精密作業を遂行するために必要な動作指令が伝達されるとともに機器レベルで得られた精密情報は逆に上位のレベルにデータベースとして蓄積される。このように自走機械群を階層的に組織化し運用する方法について機器間の通信ネットワークシステムの構築と実験を行った。 その結果3台の超小型機械を遠隔制御し、測定作業を精密に実行可能なシステムの試作に成功し、実際の測定課題実験では対象物を自走機械が包囲・接触し、測定が可能であることを明らかにした。, 05750114
1993 - 1993 - ホットウォール法で作製した有機薄膜・半導体超格子の走査型トンネル顕微鏡による観察
佐々木 彰; 秋山 鐵夫; 藤安 洋; 青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 重点領域研究, 1.有機薄膜・半導体超格子観察用STMシステムの製作を行った。 1)トンネルバリアハイトをSTM観察と同時に行えるシステムとした。 2)大気中で金原子を観察可能な高安定システムとした。 3)熱的及び機械的に安定で、±15Vの制御信号で観察可能なシステムとした。 4)上記システムを使用し、これから種々の材料で必要になると考えられるSTMナノ加工を試みた。 2.ステアリン酸薄膜をHOPGグラファイト、ITO、金薄膜基板上にホットウォール法で作製し、STM・バリアハイト同時観察を行い、薄膜特性の違いを観察した。また、基板のバリアハイトの値は小さいが有機薄膜での値は大きくなった。 3.上記システムに、探針と試料の間に働く、ずれ応力を同時観察可能である水晶振動子を検出素子に用いた新たな走査型プローブ顕微鏡機能を付加し、バリアハイト発生メカニズムに関連する新たな知見を得る試みをおこなった。このシステムを使用し、金蒸着薄膜を試料として用い観察を試みた。試料の凹凸による傾斜部分でずれ応力が変化し、観察可能であった。 4.製作したシステムの性能向上を行い、STSを観察可能なシステムに改良中であり、有機薄膜及び半導体超格子の観察を試みる。, 05245206
1993 - 1993 - Study of Nanometer Accuracy Positioning in Consideration of Feed Element and Guide Elements
OTSUKA Jiro; FURUTANI Katsushi; YOSHIMOTO Shigeka; UCHIDA Yoshiyuki; SHIMIZU Shigeo; MORONUKI Nobuyuki
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Grant-in-Aid for Co-operative Research (A), 1. Feed Elements (1)Ball screws : Fundamental data, concerning the nut preload control, were abtained and applied to a practical machine (S.Fukada). (2)Friction drive : The reason became clear why the nonlinear elastic characteristic on the driving point varied along the table movement (J.Otsuka). By the simulation of the positioning appratus, the designing method was established (H.Shimizu). 2. Guide elements (1)Rolling guides : The positioning charasteristics were made clear about several kinds of rolling guide (M.Izawa). When the railway had misalignment, the table tilting motion and friction change was analyzed (S.Shimizu). (2)Hydrostatic air bearing : The bearing with double restristors was newly developed and its experimental and theoretical results showed that it was very effective to obtain infinite stiffness (S.Togo and O.Saito). The bearing with sub-mum clearance was manufactured and its dynamic characteristics were studied (S.Yoshimoto). 3. Parallel springs The characteristics of displacement magnification mechanism attached to the parallel springs were made clear (Y.Yoshimura). 4. Sensing As for the diffraction moire sensor, an optimal design using soft and hard methods was established for settling a precise angular position (Y.Uchida). By applying the sensor fusion to the lathe, effective results could be obtained to get good surface and contour (M.Shiraishi). 5. Positioning below 100nm accuracy On the foundation of the above results, the new several positioning apparatuses were developed and high performance for ultraprecision positioning could be achieved with the positioning accuracy below 0.1mum (100nm) ; The positioning characteristics of the aerodynamic drive motor was studied (Y.Uchida). The experiment showed that double integration of the table acceleration without position sensor during table movement was capable of rough positioning (S.Fukada). Precise tilting of the rotating table for the facing lathe be controlled within the sensor resolution (Y.Aoyama). The minute-displacement table to obtain several nm cutting depth and 10nm surface flatness to grind the brittle materials was manufactured for the ultraprecision surface grinder, which could give 5nm displacement resolution, infinite stiffness and frequency bandwidth of 80 Hz (K.Furutani and J.Otsuka). An open-loop type positioning system a ball screw and ball linear guide could gain 0.1mum positioning resolution (S.Shimizu)., 04302030
1992 - 1993 - 超小型精密自走機械群の協調制御と表面形状測定の試み
青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 奨励研究(A), 04750099
1992 - 1992 - 加工・測定機能を有する超小型自走機構群とその遠隔分散制御
青山 尚之
日本学術振興会, 科学研究費助成事業, 静岡大学, 奨励研究(A), 03855017
1991 - 1991 - An Active Air Bearing
SHIMOKOHBE Akira; MORIYAMA Shigeo; TOYAMA Akira; AOYAMA Hisayuki
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Tokyo Institute of Technology, Grant-in-Aid for Developmental Scientific Research, An air journal bearing, capable of controlling two radial motion of its axis was proposed, constructed and its good performance at low axis rotation speed was demonstrated. This step of research focuses on problems which occur, when the axis is rotated at a high speed of more than 1000rpm as well as solutions for these problems. An air turbine was installed in the bearing. By this turbine, the axis is rotated without mechanical contact with a constant and high speed of more than 1000rpm. In order to execute a repetitive control (mentioned later), two noncontact magnetoresistive elements was installed. These elements generate 400 pulses per each revolution of the axis. These pulses express the angle of rotation of the axis. In preliminary experiments, a rotation accuracy of 0.3mum was obtained when the axis is rotating at 1000rpin. By using a basic controller of PID-PDD^2 type, the rotation accuracy was improved to less than 0.lmum. A better accuracy could not be achieved. The remaining rotation error had repeatability and it was caused by roundness errors in the axis and the bearing. In order to reduce the error, a repetitive controller (a 32 bit microprocessor) was added to the basic controller. Experiments showed that, even with a imbalance in the axis, a motion accuracy better than 25nm can be achieved. Moreover, a fast and ultra-precise positioning of the rotating axis is possible. Because of vibrations in the bearing structure, the control was not possible at a rotation speed higher than 1000rpm. This problem was solved by changing the axis and reducing the air film thickness of 20mum to 10mum. Experiments showed that at 1740rpm, the rotation accuracy of the uncontrolled bearing is approximately 0.6mum. This accuracy is improved to less than 0.2mum by the basic controller and to less than 15nm by the repetitive controller., 63850030
1988 - 1989 - 空間運動精度の測定法に関する研究
下河辺 明; 青山 尚之
日本学術振興会, 科学研究費助成事業, 東京工業大学, 一般研究(C), ロボットアーム, 3次元座標測定機測定ヘッドなどの空間移動する物体の3次元座標を測定するために, 超音波を用いる方法を検討した. .測定原理の提案 検討した方法ではまず運動体に超音波送波素子を1個取付け, 変調した複数種類の波を順次送り出す. そしてその超音波を位置が固定された複数個の素個で受波する. それぞれの送波-受波素子間の距離を伝達時間法と多重位相差法により高精度に測定し, 三角測量原理により, 3次元座標を求める. さらにこの測定系とは独立に間隔がわかっている送波-受波素子を用い, 随時音速を測定する. 2.測定装置, 回路の設計, 試作 この原理に基づいて, 測定装置, 演算回路, データ処理システムを設計, 製作した. (1)測定時間の短縮:計算処理時間を短縮するため, 従来の三角測量法を拡張し, 4個の受波素子と送波素子との距離を測定し, 演算した. (2)測定範囲の拡大:4個の受波素子により構成される測定空間を幾つか統合し, 測定空間を拡張した. 3.測定実験 40KHz, 2KHz, 200Hzの3種類の超音波信号と13個の受波素子を用い, 空間を移動する物体の3次元座標の測定実験を行なった. (1)測定範囲:1000mm×600mm×500mm (2)測定精度:2mm (3)測定速度:6.5回/秒, 62550107
1987 - 1987
Industrial Property Rights
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Patent right, 特願平13-052402, Date applied: 06 Mar. 2002 - 微小液滴の撹拌方法およびこれに用いる装置
Patent right, 特願平13-153217, Date applied: 24 May 2000 - 小型自走機械を用いた物質生産方法
Patent right, 特願平12-090280, Date applied: 29 Mar. 2000