Doctor, The University of Tokyo

MEMS

Surface Plasmon Resonance

Metamaterials

Infrared photodetector

Reconstructive spectroscopy

Mechatronics

Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Electronic devices and equipment, MEMS

Nanotechnology/Materials, Nano/micro-systems

Nanotechnology/Materials, Nanomaterials

Apr. 2022 - Present
The University of Electro-Communications, Professor

Apr. 2016 - Mar. 2022
The University of Electro-Communications, Associate Professor

Oct. 2015 - Mar. 2016
The University of Tokyo, Graduate School of Information Science and Technology, Project Lecturer

Jul. 2010 - Sep. 2015
The University of Tokyo, Graduate School of Information Science and Technology, Assistant Professor

Apr. 2008 - Jul. 2010
The University of Tokyo, Graduate School of Information Science and Technology, Project Assistant Professor

Oct. 2006 - Mar. 2008
The University of Tokyo, Graduate School of Information Science and Technology, Research fellow

Apr. 2003 - Mar. 2006
The University of Tokyo, Graduate School of Information Science and Technology, Doctor Course, Department of Mechano-Informatics

Apr. 2001 - Mar. 2003
The University of Tokyo, Graduate School of Information Science and Technology, Master Course, Department of Mechano-Informatics

Apr. 1997 - Mar. 2001
The University of Tokyo, Faculty of Engineering, Department of Mechano-Informatics

Apr. 2021 - Present
実行委員, 日本機械学会マイクロ・ナノ工学部門マイクロ・ナノ工学シンポジウム

Apr. 2021
実行委員, 日本機械学会マイクロ・ナノ工学部門第12回マイクロ・ナノ工学シンポジウム

Apr. 2020 - Mar. 2021
第34回センサ・マイクロマシンと応用システムシンポジウム論文委員会 主査, 電気学会センサ・マイクロマシン部門

Apr. 2020 - Mar. 2021
第35回センサ・マイクロマシンと応用システムシンポジウム論文委員会委員, 電気学会センサ・マイクロマシン部門

2021
委員, 電気学会マイクロマシン・センサシステム技術委員会, Society

Apr. 2019 - Mar. 2020
実行委員, 日本機械学会マイクロ・ナノ工学部門 第8回マイクロ・ナノ工学シンポジウム

Apr. 2018 - Mar. 2020
運営委員, 日本機械学会マイクロ・ナノ工学部門

Apr. 2019
運営委員, 日本機械学会マイクロ・ナノ工学部門, Society

Apr. 2019
広報委員, 日本機械学会マイクロ・ナノ工学部門

Apr. 2018 - Mar. 2019
実行委員, 日本機械学会マイクロ・ナノ工学部門 第8回マイクロ・ナノ工学シンポジウム

Feb. 2018 - Jan. 2019
主査, 電気学会センサ・マイクロマシン部門 第34回センサ・マイクロマシンと応用システムシンポジウム論文委員会

Feb. 2017 - Jan. 2018
副主査, 電気学会センサ・マイクロマシン部門 第34回センサ・マイクロマシンと応用システムシンポジウム論文委員会

Feb. 2017 - Jan. 2018
第33回センサ・マイクロマシンと応用システムシンポジウム論文委員会 副主査, 電気学会センサ・マイクロマシン部門

2018
論文委員会委員, 電気学会センサ・マイクロマシン部門, Society

Apr. 2016
調査委員, 電気学会E部門 メタマテリアル・プラズモニック構造を基軸とする新機能創成に関する調査専門委員会

Apr. 2016
論文委員, 第33 回「センサ・マイクロマシンと応用システム」シンポジウム論文委員会

Mar. 2025
日本機械学会
土壌センシングに向けた等方性メタマテリアルの反射特性評価
ロボティクス・メカトロニクス部門一般表彰 ROBOMECH表彰 （産業・実用分野）, 菅 哲朗;谷原 渉;佐藤 蒼馬;尾上 弘晃

Feb. 2025
電気学会
電流検出型表面プラズモン共鳴センサのAu/n-Si Schottky界面における拡散の影響
令和６年優秀論文発表賞Ａ, 宇梶 尚弥;今井 雄貴;Eslam Abubakr;菅 哲朗

Nov. 2024
CHEMINAS50
電磁波を用いた可食センサのワイヤレス位置・動き特定
優秀発表賞, 冨田健太朗;菅哲朗;尾上弘晃

Nov. 2024
第41回センサ・マイクロマシンと応用システムシンポジウム
金回折格子構造による電流検出型表面プラズモン共鳴センサの 生体分子計測への適用
優秀ポスター発表賞ファイナリスト, 今井 雄貴;宇梶 尚弥;小澤 徹也;瀧 真清;菅 哲朗

Nov. 2024
第41回「センサ・マイクロマシンと応用システム」シンポジウム
完全吸収メタマテリアルを用いた土壌pH ワイヤレ スモニタリングセンサ
優秀技術論文賞 ファイナリスト, 佐藤 蒼馬;阪部 拳;尾上 弘晃;菅 哲朗

Nov. 2024
第41回「センサ・マイクロマシンと応用システム」シンポジウム
電流検出型表面プラズモン共鳴センサのAu/n-Si Schottky界面における拡散の 影響
奨励賞, 宇梶 尚弥;今井 雄貴;Eslam Abubakr;菅 哲朗

Oct. 2024
日本微生物生態学会
Burkholderia近縁種を対象としたドリル運動の流路幅依存性検証
優秀発表賞, 島田 佳季;吉岡 青葉;上村 直輝;中根 大介;菅 哲朗

Oct. 2024
日本微生物生態学会
微小流体デバイスを用いた Helicobacter 属細菌の運動戦略の可視化
優秀発表賞, 横濱 さらら;林原 絵美子;島田 佳季;菅 哲朗;見理剛;中根 大介

Dec. 2023
日本機械学会マイクロ・ナノ工学部門
細菌のべん毛巻き付き運動解析のためのマイクロ流体デバイス
優秀講演論文賞表彰, 島田 佳季;吉岡 青葉;中根 大介;菅 哲朗

Dec. 2023
日本機械学会マイクロ・ナノ工学部門
金回折格子構造による電流検出型表面プラズモン共鳴センサの生体分子計測への適用
若手優秀講演表彰, 今井 雄貴;鈴木 紳一;Abubakr Eslam;瀧 真清;菅 哲朗

Nov. 2023
第40回「センサ・マイクロマシンと応用システム」シンポジウム
サブミクロンピッチ回折格子を持つプラズモニック光検出器による連続的な波長光源を用いた分光
優秀ポスター賞, 金田裕喜;齋藤伊吹;山岡詩菜;齋藤史郎;大下雅昭;菅哲朗

Jun. 2023
Cordon Research Conference（Animal-Microbe Symbioses）
Symbiotic bacteria break through the host's narrow gate by flagellar wrapping
Poster award, Aoba Yoshioka;Tetsuo Kan;Yoshitomo Kikuchi;Daisuke Nakane

Feb. 2023
電気学会
プラズモニック超小型分光素子のための静電変調機構
センサ・マイクロシステム部門大会優秀論文発表賞

Dec. 2022
日本機械学会
プラズモニック光検出器を用いた分光法による複数種のガス計測
第13回マイクロ・ナノ工学シンポジウム若手優秀講演表彰

Nov. 2022
日本微生物生態学会
ホソヘリカメムシの共生細菌は狭小空間をドリル戦車で泳ぐ
第35回大会 優秀ポスター賞（2位）

Nov. 2022
電気学会
プラズモニック超小型分光素子のための静電変調機構
第39回センサシンポジウム奨励賞

Dec. 2021
文部科学省ナノテクプラットフォーム事業
プラズモニック構造を利用したシリコンMEMSモノリシック赤外SPR分光センサ
文科省ナノテクプラットフォーム 令和3年度「秀でた利用成果」最優秀賞, 菅哲朗、大下雅昭、安永竣
Others

Dec. 2021
文部科学省ナノテクノロジープラットフォーム
プラズモニック構造を利用したシリコンMEMSモノリシック赤外SPR分光センサ
2020年度秀でた成果最優秀賞

Mar. 2021
日本機械学会
生分解性材料を用いた土壌pHワイヤレスセンサ
日本機械学会若手優秀講演フェロー賞受賞, 堀克紀, 稲見文香, 菅哲朗, 尾上弘晃
Japan society

Mar. 2021
日本機械学会
生分解性材料を用いた土壌pHワイヤレスセンサ
若手優秀講演フェロー賞

Nov. 2020
電気学会
表面プラズモン共鳴式光検出器を用いた近赤外分光法に よるガス検出
第34回センサシンポジウム奨励賞

Nov. 2019
電気学会
機械的変形可能な3DキラルTHzメタマテリアル
第36回「センサ・マイクロマシンと応用システム」シンポジウム（電気学会）奨励賞, 小菅拓也(共著者:菅哲朗)
Japan society

Feb. 2019
日本機械学会
プラズモニック金回折格子を備えた振動MEMSによる近赤外分光器
日本機械学会マイクロ・ナノ工学部門若手優秀講演表彰, 大下雅昭(共著者:菅哲朗、他機関から1名)
Japan society

Feb. 2019
日本機械学会
近赤外域を対象としたプラズモン光検出型分光法
日本機械学会若手優秀講演フェロー賞, 出納優(共著者:大下雅昭、Gaulier Thomas、安食嘉晴、菅哲朗)
Japan society

Feb. 2019
日本機械学会
近赤外域を対象としたプラズモン光検出型分光法
若手優秀講演フェロー賞

Feb. 2019
日本機械学会
プラズモニック⾦回折格子を備えた振動MEMSによる近赤外分光器
マイクロ・ナノ工学部門若手優秀講演表彰

Nov. 2017
電気学会
自立構造型可変メタマテリアル
第34回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞, 磯崎瑛宏, 菅哲朗, 高橋英俊, 松本潔, 下山勲
Japan society

Nov. 2017
電気学会
金回折格子を有するショットキー型光検出器による近赤外分光器
第34回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞受賞, 陳文静, 菅哲朗, 安食嘉晴, 松本潔, 下山勲
Japan society

Nov. 2017
電気学会
金アンテナ構造によるプラズモン共鳴を用いた中赤外シリコンフォトディテクタ
第34回「センサ・マイクロマシンと応用システム」シンポジウム 優秀技術論文賞, 菅哲朗, 安食嘉晴
Japan society

Nov. 2017
電気学会
金回折格子を有するショットキー型光検出器による近赤外分光器
第34回センサシンポジウム優秀ポスター賞

Nov. 2017
電気学会
自立構造型可変メタマテリアル
第34回センサシンポジウム優秀ポスター賞

Nov. 2017
電気学会
金アンテナ構造によるプラズモン共鳴を用いた中赤外シリコンフォトディテクタ
第34回センサシンポジウム優秀技術論文賞

Apr. 2015
電気学会
金回折格子によるSPRを用いた近赤外Siディテクタアレイ
Good paper award, 菅哲朗;安食嘉晴;松本潔;下山勲

Jun. 2014
The Institute of Electrical Engineers of Japan
サブミクロンギャップを有するMEMS可変メタマテリアルの製作と設計
Good presentation award, 磯崎瑛宏;菅哲朗;高橋英俊;神田夏輝;根本夏紀;小西邦昭;五神真;松本潔;下山勲

May 2010
International Conference on Electronics Packaging (ICEP)
Nano-Mechanical Structure Fabrication Technology for Highly Integrated, Complex MEMS
Best paper award, Tetsuo Kan;Yusuke Takei;Hiroaki Onoe;Eiji Iwase;Tetsuji Dohi;Kiyoshi Matsumoto;Isao Shimyoama

Study on Temperature-Dependent Photoresponsivity and Stability of Mid-Infrared Photodetector Based on Si-Process-Compatible Plasmonic PtSi/p-Si Schottky Structure
Ashenafi Abadi Elyas; Eslam Abubakr; Daiji Noda; Ryo Ohta; Tetsuo Kan
Corresponding, Journal of Electronic Materials, Springer Science and Business Media LLC, 17 Mar. 2025, Peer-reviwed
Scientific journal, English

Bacteria break through one-micrometer-square passages by flagellar wrapping
Aoba Yoshioka; Yoshiki Y. Shimada; Toshihiro Omori; Naoki A. Uemura; Kazutaka Takeshita; Kota Ishigami; Hiroyuki Morimura; Maiko Furubayashi; Tetsuo Kan; Hirofumi Wada; Yoshitomo Kikuchi; Daisuke Nakane
Cold Spring Harbor Laboratory, 14 Feb. 2025, Abstract

Confined spaces are omnipresent in the micro-environments, including soil aggregates and intestinal crypts, yet little is known about how bacteria behave under such conditions where movement is challenging due to limited diffusion. Stinkbug symbiontCaballeronia insecticolanavigates a narrow gut passage about one micrometer in diameter to reach the stinkbug’s symbiotic organ. Here, we developed a microfluidic device mimicking the host’s sorting organ, wherein bacterial cells are confined in a quasi-one-dimensional fashion, and revealed that this bacterium wraps flagellar filaments around its cell body like a screw thread to control fluid flow and generate propulsion for smooth and directional movement in narrow passages. Physical simulations and genetic experiments revealed that hook flexibility is essential for this wrapping; increasing hook rigidity impaired both wrapping motility and infectivity. Thus, flagellar wrapping likely represents an evolutionary innovation, enabling bacteria to break through confined environments using their motility machinery.
Scientific journal, English

Advanced Room-Temperature NIR Plasmonic Photodetection and Reconstructive Spectroscopy
Eslam Abubakr; Ashenafi Abadi; Masaaki Oshita; Shiro Saito; Hironori Suzuki; Tetsuo Kan
Corresponding, IEEE Transactions on Electron Devices, Institute of Electrical and Electronics Engineers (IEEE), 72, 1, 301-305, Jan. 2025, Peer-reviwed
Scientific journal

Biodegradable RF Metamaterial Perfect Absorber for Wireless Soil pH Monitoring
Soma Sato; Ken Sakabe; Hiroaki Onoe; Tetsuo Kan
Corresponding, Advanced Materials Technologies, Wiley, 10, 8, 2401134, 28 Dec. 2024, Peer-reviwed, Abstract

A wireless soil pH sensor is proposed using a sheet‐type perfect absorber metamaterial. The sensor utilizes a high‐impedance surface metamaterial, which functions as a perfect absorber at the resonant frequency. This sensor has a uniform water‐soluble Mg film at the bottom coated with hydroxyapatite that degrades depending on the pH, and a periodic square split ring resonator metamaterial structure made on top of a lossy dielectric plate. The sensor detects the dissolution of the metamaterial due to soil pH conditions through the electromagnetic wave reflection response at GHz frequency. Because of the perfect absorbing characteristics, the influence of soil on the metamaterial's electromagnetic response is blocked, allowing for robust measurement regardless of soil type. By coating the Mg with hydroxyapatite, the difference between acidic (pH = 3.0) and neutral soils can be detected by the time difference by a factor of three in the reflectance change from 40% to 75% reflectance change, indicating a transition from absorptive to reflective of the metamaterial's response, at the resonant frequency of 4.12 GHz.
Scientific journal, English

High-selectivity NIR amorphous silicon-based plasmonic photodetector at room temperature
Eslam Abubakr; Giles Allison; Shiro Saito; Hironori Suzuki; Koki Hayashi; Tetsuo Kan
Corresponding, Sensors and Actuators A: Physical, Elsevier BV, 379, 115925-115925, Dec. 2024, Peer-reviwed
Scientific journal

Plasmonic photodetector with submicron grating for reconstructive spectroscopy of low-intensity broadband light
Yuuki Kaneda; Ibuki Saito; Utana Yamaoka; Shun Yasunaga; Masaaki Oshita; Shiro Saito; Tetsuo Kan
Corresponding, Optics and Lasers in Engineering, Elsevier BV, 183, 108501-108501, Dec. 2024, Peer-reviwed
Scientific journal

Assessment of Driver’s Head Acceleration during a Possible Car Skidding Effect
Miguel Ángel Martínez-Miranda; Yosuke Yamamoto; Shun Yasunaga; Tetsuo Kan; Carlos Alberto Espinoza-Garcés; Karla Nayeli Silva-Garcés; Christopher Rene Torres-SanMiguel
Applied Sciences, MDPI AG, 14, 17, 7887-7887, 05 Sep. 2024, Peer-reviwed, This document provides a design description of a data acquisition device that allows an alert to be issued to suggest to the driver to take a break after having subjected his body to a certain amount of acceleration and pressure changes after driving on a road with too many curves. The tests were carried out using sensors based on microelectromechanical systems. The system was strategically installed at specific points on the body of the driver and car. Several electronic arrays were carried out, like the design of a printed circuit board. The establishment of an inter-integrated circuit communication and its multiplexing to work with several devices with the same address simultaneously. Finally, in this context, the document also presents the critical velocity for each curve in the Hakone roadway, which was obtained by using a mathematical model and contrasted with data acquisition values for acceleration. The risk of skidding on a curve increases when the driver does not reduce driving velocity; only a slight variance in acceleration or environmental conditions is enough. The value of acceleration was acquired for the analysis of each curve; there is a greater possibility of skidding in curves 2 and 4 because their radius is smaller and the critical speed is approximately 60 km/h, which is very close to the driving speed. On the other hand, the deceleration value of −0.65 G read on the head accelerometer can increase fatigue symptoms such as blurry vision or dizziness.
Scientific journal

Biodegradable Cuboid Isotropic Metamaterial for Wireless Soil Monitoring
Tatsuya Yano; Wataru Tanihara; Soma Sato; Gaku Furusawa; Hiroaki Onoe; Tetsuo Kan
Corresponding, IEEE Sensors Journal, Institute of Electrical and Electronics Engineers (IEEE), 24, 17, 27256-27264, 01 Sep. 2024, Peer-reviwed
Scientific journal

Entirely Biodegradable Wireless pH Sensor with Split‐Ring Resonators for Soil pH Monitoring
Ken Sakabe; Tetsuo Kan; Hiroaki Onoe
Corresponding, Advanced Materials Technologies, Wiley, 9, 13, May 2024, Peer-reviwed, Abstract

This paper describes a wireless and battery‐free soil pH sensor made entirely of degradable materials. Soil pH monitoring is significant for precision agriculture and environmental conservation because soil health can be estimated by measuring soil pH. Soil pH can be measured by collecting soil samples and analyzing them in a laboratory environment or by inserting an electrode‐type sensor into the soil and measuring soil pH on site. However, neither method is suitable for wide‐area soil pH sensing for precision agriculture or environmental conservation. Herein, a fully biodegradable wireless pH sensor is presented that can be dispersed to outdoor environment to detect soil acidity. The sensor is operated wirelessly through split‐ring resonators (SRRs) that consist of patterned octacalcium phosphate (OCP)‐coated magnesium (Mg) on a poly‐lactic acid (PLA) sheet. At acidic soil pH, the degradation of each SRR results in a change in the electromagnetic response of the sensor. The operation of the sensor in six different types of acidic soils is demonstrated to distinguish the acidic soil wirelessly. It is expected that the biodegradable sensor can be applied to low‐cost, easy‐to‐use, and environmentally friendly monitoring of soil pH.
Scientific journal

Optimizing geometry and metal-dependent performance of Si-based Schottky plasmonic photodetectors
Eslam Abubakr; Ashenafi Abadi; Masaaki Oshita; Shiro Saito; Tetsuo Kan
Corresponding, Optical Materials, Elsevier BV, 150, 115175-115175, Apr. 2024, Peer-reviwed
Scientific journal

Characterization of an uncooled mid-infrared Schottky photodetector based on a 2D Au/PtSi/p-Si nanohole array at a higher light modulation frequency
Ashenafi Abadi; Eslam Abubakr; Masaaki Oshita; Daiji Noda; Ryo Ohta; Tetsuo Kan
Corresponding, Applied Optics, Optica Publishing Group, 63, 8, 2046-2046, 04 Mar. 2024, Peer-reviwed, In this study, an uncooled 2D nanohole array PtSi/p-Si Schottky mid-infrared (MIR) photodetector, which is essential for on-chip Si-based low-barrier MIR detectors, is presented. Room temperature operation introduces susceptibility to thermal noise and can impact stability. Through modulation frequency and reverse bias optimization, the stability improved by 7 times at 170 Hz and −3.5V, respectively. The effective light detection and stability were confirmed through ON/OFF response measurements over a longer time. The wavelength-dependent responsivity, measured with a tunable MIR laser, confirmed the responsiveness of the device in the MIR region of 2.5 µm to 4.0 µm, with a maximum specific detectivity (D*) of 2.0×10³cmHz^1/2W⁻¹ at 3.0 µm; this result shows its potential applicability for noninvasive human lipid monitoring. Overall, this study focuses on the crucial role of signal analysis optimization in enhancing the performance of MIR photodetectors at room temperature.
Scientific journal, English

ARCaDia: single-round screening of a DNA-type targeted covalent binder possessing a latent warhead
Masumi Taki; Masayasu Kuwahara; Chaohui Li; Naoko Tomoda; Naoyuki Miyashita; Tetsuo Kan; Jay Yang
Chemical Communications, Royal Society of Chemistry (RSC), 60, 100, 14964-14967, 2024, Peer-reviwed, A covalent binder was identified using a single-round screening from a latent-warhead-modified DNA library, coupled with top k-mer analysis to pinpoint the optimal warhead position on the aptamer.
Scientific journal

Near-infrared gas spectroscopy based on plasmonic photodetector applied for multiple gas species
Utana Yamaoka; Yuuki Kaneda; Masaaki Oshita; Shiro Saito; Tetsuo Kan
Corresponding, Japanese Journal of Applied Physics, IOP Publishing, 63, 1, 012004-012004, 01 Jan. 2024, Peer-reviwed, Abstract

We proposed a NIR spectroscopy system that measures multiple types of gases using a plasmonic photodetector. We formed a gold diffraction grating on a silicon substrate to create a plasmonic photodetector and conducted gas spectral measurements in the NIR region. As a result, we could measure the transmission spectrum of water vapor gas at a concentration of 2%. Furthermore, we could measure ethanol gas transmittance at different concentrations of 4.5% and 2.7%, and change in transmission depending on concentration. Lastly, the transmission spectrum of 10% NH₃ gas was measured. Since these results are consistent with evaluations using Fourier transform IR spectroscopy, it was confirmed that the proposed gas measurement can be applied to multiple types of gas sensing.
Scientific journal

Detection of backside coupled propagating surface plasmon resonance on the sidewall of a wafer
M. Oshita; S. Suzuki; K. Masamoto; T. Kan
AIP Advances, AIP Publishing, 13, 11, 01 Nov. 2023, Peer-reviwed, We proposed a surface plasmon resonance (SPR) sensor structure that utilized a glass wafer with a diffraction grating and an n-type silicon piece bonded near the SPR coupling site. This configuration enabled surface plasmon excitation from the back of the substrate without the unwanted interaction between the excitation light and the sample, and electrical detection of the SPR response by a 0.7-eV Schottky barrier at the Au/n-Si interface formed on the sidewall of the silicon piece was achieved. Experimental evaluation of the surface plasmon coupling performance was conducted, showing clear peaks in the photocurrent for various wavelengths in the NIR-II window, ranging from 1100 to 1300 nm. The device’s ability to detect propagating surface plasmons as a photocurrent was confirmed; the results indicated a consistent trend with theoretical and numerical calculations. Since the device was composed of a glass substrate, the use of wavelengths shorter than the near-infrared wavelength was possible, including visible wavelengths where the optical absorption by water is negligible. Thus, our proposed sensor provides a compact and efficient solution for SPR sensing in aqueous solutions.
Scientific journal, English

(総説)表面プラズモン共鳴を利用したシリコン製MEMS赤外光センサの研究
菅 哲朗; Elyas Ashenafi Abadi; 大下 雅昭
Corresponding, 日本赤外線学会誌, 33, 1, 13-20, Aug. 2023, Invited
Scientific journal, Japanese

Spiral Chiral Metamaterial Structure Shape for Optical Activity Improvements
Kohei Maruyama; Miyako Mizuna; Takuya Kosuge; Yuki Takeda; Eiji Iwase; Tetsuo Kan
Corresponding, Micromachines, 14, 6, 1156, 30 May 2023, Peer-reviwed
Scientific journal, English

Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength
Masaaki Oshita; Shiro Saito; Tetsuo Kan
Corresponding, Microsystems & Nanoengineering, Springer Science and Business Media LLC, 9, 1, 09 Mar. 2023, Peer-reviwed, Abstract

Plasmonic photodetectors have received increasing attention because their detection properties can be designed by tailoring their metal structures on surfaces without using any additional components. Reconfiguration of the plasmonic resonant state in a photodetector is relevant for various applications, including investigating in situ adaptive detection property changes, depending on the situation, and performing single-pixel spectroscopy in geometrically limited regions. However, the spectral responsivity change with conventional reconfiguration methods is relatively small. Here, we propose a plasmonic photodetector that reconfigures its spectral responsivity with electromechanical deformation instead of bias tuning. The photodetector consists of a gold plasmonic grating formed on an n-type silicon cantilever, and the spectral responsivity is reconfigured by electromechanically scanning at an incident angle to the grating on the cantilever. The photodetector exhibits peak shifts in spectral responsivity in a wavelength range from 1250 to 1310 nm after electromechanical reconfiguration. Finally, for potential future applications, we demonstrate near-infrared spectroscopy using the photodetector. This photodetector has the potential to be adopted as a near-infrared spectrometer in industrial silicon imaging systems because its structure enables subbandgap photodetection on silicon by a Schottky junction.
Scientific journal

Si-based mid-infrared photodetector with dynamic Schottky barrier height modulation applicable for synchronous detection
Yoshiharu Ajiki; Tetsuo Kan
Corresponding, Japanese Journal of Applied Physics, IOP Publishing, 62, 3, 032004-032004, 01 Mar. 2023, Peer-reviwed, Abstract

We have proposed an electrical shutter operation of a nano-antenna infrared photodetector using Schottky barrier height (SBH) modulation, where the SBH is modulated by a reverse bias voltage V_b applied to the detector. The inhomogeneity of the Schottky junction may be dominant in the mechanism of barrier height reduction. Compared to the photocurrent i_ph obtained by modulating the frequency of on–off of the incident light, the proposed method yields almost the same value. Therefore, it can be concluded that the proposed method is capable of synchronous detection measurement. In addition, since the proposed method does not require a mechanical shutter, it is a compact system that can be used in very small electrical equipment.
Scientific journal

Grating-Based Surface Plasmon Resonance Sensor for Visible Light Employing a Metal/Semiconductor Junction for Electrical Readout
Ryota Kuroki; Shinichi Suzuki; Shun Yasunaga; Masaaki Oshita; Tetsuo Kan
Corresponding, IEEE Sensors Journal, Institute of Electrical and Electronics Engineers (IEEE), 22, 23, 22557-22563, 01 Dec. 2022, Peer-reviwed, In this study, we proposed an electrical readout surface plasmon resonance (SPR) chemical sensor coupled with visible light to avoid significant light absorption of water. A gold (Au) diffraction grating with a submicrometer pitch, designed using the rigorous coupled-wave analysis (RCWA) method to have a submicrometer pitch and 30-nm-tall Au grating, was fabricated on an n-type silicon (n-Si) substrate by nanofabrication/microfabrication. The hot electrons generated by SPR on the grating are converted to photocurrent at the Schottky barrier at the Au/n-Si interface. The Schottky barrier height was estimated based on the $I-V$ characteristics of the device to be $q{\Phi}_{\mathrm{B } } = 0.72$ eV. The peak shift of photocurrent was observed to be consistentwith the SPR theory when the concentration of glucose aqueous solution changed the refractive index on the Au grating. Assuming that the incident wavelength and angle were fixed, a noise analysis revealed a refractive index resolution of $3.4-4.0 \times 10<^>{-5}$ refractive index unit (RIU). Since this structure eliminated bulky optics in SPR experiments, it would contribute to the realization of a thin single-chip label-free chemical sensor.
Scientific journal, English

Plasmonic mid-infrared photodetector with narrow trenches for reconstructive spectroscopy
Shun Yasunaga; Tetsuo Kan
Corresponding, OPTICS EXPRESS, Optica Publishing Group, 30, 12, 20820-20838, Jun. 2022, Peer-reviwed, True, Reconstructive spectroscopy in the mid-infrared (MIR) range is an attractive method for miniaturizing MIR spectrometers. Although detectors with a sharp responsivity spectrum and a high dynamic range are required, there remains room for improvement. This article reports on a set of MIR photodetectors that satisfy these requirements with aluminum-covered narrow trench gratings. We experimentally found the optimal grating design, by which the responsivity changed 0.75% of the maximum value per nanometer of wavelength, and the minimum/maximum ratio was 8.7% in the wavelength range of 2.5-3.7 mu m. A detector set of this optimal design was capable of accurate and robust reconstruction against measurement errors. This simple design structure based on standard materials will assist in realizing miniature MIR spectrometers. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
Scientific journal, English

Room-temperature plasmonic mid-infrared photodetector based on PtSi/p-Si low Schottky-barrier junction
Masahiko Shiraishi; Daiji Noda; Ryo Ohta; Tetsuo Kan
Corresponding, APPLIED OPTICS, Optica Publishing Group, 61, 14, 3987-3996, May 2022, Peer-reviwed, True, In this study, a low Schottky-barrier photodetector with a plasmonic assist using a two-dimensional (2D) nanohole array was demonstrated, which receives mid-infrared (MIR) light at room temperature. In the structural design, it was confirmed that the 2D nanohole-array photodetector has high absorbance in the MIR region using rigorous coupled-wave analysis. The result showed that the nanoholes formed in p-type silicon (p-Si), platinum silicide (PtSi), to form Schottky barriers, and gold (Au), for photocurrent extraction, had high absorbance in the MIR region along with the Fabry-Perot resonance mode toward the depth of the nanohole. The 2D nanohole array, with Au/PtSi/p-Si layers, has high absorbance for illuminating MIR light near 3.46 mu m from the backside. The current-voltage characteristics indicated a low Schottky barrier of 0.32 eV, confirming the photoresponsive potential in the MIR photodetection. The photocurrent response to the modulation signal was obtained at room temperature. In addition, signal processing through transimpedance and lock-in amplifiers enabled us to obtain characteristics with high linearity for light intensities in milliwatts. Light acquisition for 2.5-3.8-mu m-long MIR wavelength became possible, and applications in gas sensing, including vibrational absorption bands of alkane groups, are expected. (C) 2022 Optica Publishing Group
Scientific journal, English

Near-Infrared Spectroscopic Gas Detection Using a Surface Plasmon Resonance Photodetector with 20 nm Resolution
Yosuke Yamamoto; Masaaki Oshita; Shiro Saito; Tetsuo Kan
Corresponding, ACS APPLIED NANO MATERIALS, AMER CHEMICAL SOC, 4, 12, 13405-13412, Dec. 2021, Peer-reviwed, This paper reports on gas sensing based on near-infrared (NIR) reconstructive spectroscopy using a surface plasmon resonance (SPR) photodetector. The reconstructive spectrometer consists of an Au grating structure on an n-type silicon substrate. When the Au grating is irradiated with transverse magnetic polarized light, SPR emerges at different incident angles for each wavelength, producing an electric current via the Schottky barrier at the Au/n-type Si interface. The irradiated light spectrum can be derived by analyzing the relationship between the incident angle and the current. The proposed reconstructive spectrometer presented a 20 nm wavelength resolution in the NIR region. NIR light absorption appeared at approximately 1392 nm in the 1.5% ethanol gas spectrum by the SPR photodetector, which is coherent with Fourier transform infrared spectroscopy, indicating that the proposed reconstructive spectrometer is applicable to gas measurements.
Scientific journal, English

Si-Based Infrared Detector Using Organic Nano-Dot Array
Yoshiharu Ajiki; Tetsuo Kan
Corresponding, IEEE Sensors Journal, Institute of Electrical and Electronics Engineers (IEEE), 21, 21, 23965-23970, 01 Nov. 2021, Peer-reviwed
Scientific journal

S/N ratio improvement of a nanocuboid array photodetector based on a Au/n-Si Schottky junction for broadband near-infrared light
Masahiko Shiraishi; Takahiro Enoki; Kazuki Kobayashi; Shun Yasunaga; Yoshiharu Ajiki; Tetsuo KAN
Corresponding, Japanese Journal of Applied Physics, IOP Publishing, 60, 7, 21 May 2021, Peer-reviwed, In this paper, an improvement in the signal-to-noise (S/N) ratio of a nanocuboid array near-infrared (NIR) photodetector is demonstrated by using a combination of a small Schottky junction area and a converging lens. The combination of the small Schottky junction area and the lens showed a higher S/N ratio than a Schottky area of 1 cm(2) for wavelengths above 1.2 mu m, indicating 3.5 and 9.5 dB improvements in the S/N ratio at wavelengths of 1.2 and 1.5 mu m, respectively. The structural parameters of the nanocuboids were determined to be 600 nm in length, 535 nm in height, and 900 nm in periodicity with high absorption efficiency in the broadband NIR region. The photocurrent signal was obtained over a broadband in the NIR region from 1.1 to 1.5 mu m in wavelength by converging light with a convex lens above the nanocuboid array with a Schottky junction area of 1 mm(2).
Scientific journal, English

Si grating structure for surface plasmon resonance excitation by back-side normal incidence illumination
Yoshiki Saito; Shinichi Suzuki; Tetsuo Kan
Corresponding, APPLIED PHYSICS EXPRESS, IOP PUBLISHING LTD, 14, 3, Mar. 2021, Peer-reviwed, We propose a structure suitable for surface plasmon resonance (SPR) excitation with light incident on the back-side of the device, which has affinity with the semiconductor process. We constructed a diffraction grating on the top layer of a silicon-on-insulator wafer and completely embedded the grating in a polymer. According to a reflectance measurement, SPR could be efficiently excited, and its behavior presented consistency with the calculations. Since this structure is semiconductor fabrication based and allows elimination of both the prism and the light receiver commonly used in SPR experiments, it will contribute to realization of a thin one-chip SPR device.
Scientific journal, English

研究紹介：光を操るシリコンプラズモンアンテナ
安永竣, 古澤岳, 大下雅昭, 菅哲朗
Corresponding, 応用物理学会, 応用物理学会, 89, 11, 651-655, 10 Nov. 2020, Invited, False
Scientific journal, Japanese

Densely Arrayed Active Antennas Embedded in Vertical Nanoholes for Backside-Illuminated Silicon-Based Broadband Infrared Photodetection
Shun Yasunaga; Hidetoshi Takahashi; Tomoyuki Takahata; Isao Shimoyama; Tetsuo Kan
Corresponding, ADVANCED MATERIALS INTERFACES, WILEY, 7, 21, Sep. 2020, Peer-reviwed, Plasmonic metal nanoantennas arrayed on silicon have attracted attention as silicon-based sub-bandgap infrared detectors. Localized surface plasmons induced on metal nanoblocks can provide a broadband responsivity, and the silicon-based configuration offers the potential for complementary metal oxide semiconductor-compatible infrared photodetectors. The responsivity of such devices, however, needs further improvement. In this report, a nanoantenna structure consisting of a nanoblock with electrical connection to it built in a narrow, vertical, and deep nanohole is presented, which generates a photocurrent in response to backside illumination. Inclined evaporative deposition of copper onto an array of nanoholes, 150 nm in diameter and 560 nm in depth, simultaneously forms nanoblocks and thin conductive films. The structure's effectiveness is demonstrated from the reflectance and responsivity to infrared laser illumination 1.1-1.8 mu m in wavelength. When the periodicity of the nanoholes is 500 nm, a responsivity of 9.8 mA W(-1)at 1.55 mu m is obtained, which is sustained over a broad band. The responsivity-density relationship has a limitation between periodicities of 250 and 500 nm, possibly because of overlapped near fields around antennas and the resultant altered resonant mode. With its simple fabrication and efficient functionality, the nanoantenna structure contributes to the realization of silicon-based infrared imaging.
Scientific journal, English

可変 3D キラル THz メタマテリアルのための機械的変形方法の研究
小菅拓也、菅 哲朗
Corresponding, 電気学会論文誌E, 電気学会, 140, 7, 170-176, 01 Jul. 2020, Peer-reviwed, False
Scientific journal, Japanese

Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever
Romain Pommois; Gaku Furusawa; Takuya Kosuge; Shun Yasunaga; Haruki Hanawa; Hidetoshi Takahashi; Tetsuo Kan; Hisayuki Aoyama
Corresponding, MICROMACHINES, MDPI, 11, 7, Jul. 2020, Peer-reviwed, True, In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 mu L/s to 400 mu L/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.
Scientific journal, English

Self-focusing 3D lithography with varying refractive index polyethylene glycol diacrylate
Hidetoshi Takahashi; Tetsuo Kan; Gayeong Lee; Nilsu Donmez; Jieun Kim; Jihoon Park; Dongwook Kim; Yun Jung Heo
APPLIED PHYSICS EXPRESS, IOP PUBLISHING LTD, 13, 7, Jul. 2020, Peer-reviwed, This work presents self-focusing 3D lithography based on the refractive index changes of polyethylene glycol diacrylate (PEGDA) during photopolymerization. Since the polymerization of PEGDA leads to an increase in the refractive index, the UV light rays in the PEGDA undergo a refraction effect during exposure, thus being focused and forming 3D photopolymerized structures. We demonstrate the potential of self-focusing 3D lithography by fabricating PEGDA microneedles and trapezoid-shaped microwells. Their structures well match our theoretical estimation. Therefore, our theoretical approach can provide a short route to realizing on-demand, complicated 3D structures of refractive-index-variable materials with single UV exposure.
Scientific journal, English

Au Nanospirals Transferred onto PDMS Film Exhibiting Circular Dichroism at Visible Wavelengths.
Gaku Furusawa; Tetsuo Kan
Corresponding, Micromachines, 11, 7, 29 Jun. 2020, Peer-reviwed, True, We propose a thin, single-layered circular dichroic filter with Au nanospiral structures on a polydimethylsiloxane (PDMS) thin film that has strong circular dichroism at visible wavelengths. Au nanospiral structures with a diameter of 70 nm were fabricated by cryogenic glancing angle deposition on a substrate with a nanodot array template patterned with the block copolymer PS-PDMS. The Au nanospiral structures were transferred onto a transparent and flexible PDMS thin film to fabricate a thin, single-layered circular dichroic filter. The filter had a very large circular dichroism peak of -830 mdeg at 630 nm. The results show that the Au nanospiral structures transferred onto PDMS thin film exhibit large circular dichroism at visible wavelengths.
Scientific journal, English

Tunable and nonlinear metamaterials for controlling circular polarization
Kuniaki Konishi; Tetsuo Kan; Makoto Kuwata-Gonokami
Journal of Applied Physics, {AIP} Publishing, 127, 23, 230902-230902, 21 Jun. 2020, Peer-reviwed, Invited
Scientific journal, English

Reconfigurable Surface Plasmon Resonance Photodetector with a MEMS Deformable Cantilever
Masaaki Oshita; Hidetoshi Takahashi; Yoshiharu Ajiki; Tetsuo Kan
Corresponding, ACS Photonics, American Chemical Society (ACS), 7, 3, 673-679, 18 Mar. 2020, Peer-reviwed
Scientific journal

Extension of the Measurable Wavelength Range for a Near-Infrared Spectrometer Using a Plasmonic Au Grating on a Si Substrate
Yu Suido; Yosuke Yamamoto; Gaulier Thomas; Yoshiharu Ajiki; Tetsuo Kan
Corresponding, MICROMACHINES, MDPI, 10, 6, Jun. 2019, Peer-reviwed, True, In this paper, we proposed near-infrared spectroscopy based on a Si photodetector equipped with a gold grating and extended the measurable wavelength range to cover 1200-1600 nm by improving a spectrum derivation procedure. In the spectrum derivation, photocurrent data during alteration of the incidence angle of the measured light were converted using a responsivity matrix R, which determines the spectroscopic characteristics of the photodetector device. A generalized inverse matrix of R was used to obtain the spectrum and to fit a situation where multiple surface plasmon resonance (SPR) peaks appeared in the scanning range. When light composed of two wavelengths, 1250 nm and 1450 nm, was irradiated, the two wavelengths were distinctively discriminated using the improved method.
Scientific journal, English

Electrical detection SPR sensor with grating coupled backside illumination
Yoshiki Saito; Yosuke Yamamoto; Tetsuo Kan; Takuya Tsukagoshi; Kentaro Noda; Isao Shimoyama
Corresponding, OPTICS EXPRESS, OPTICAL SOC AMER, 27, 13, 17763-17770, Jun. 2019, Peer-reviwed, True, A current detection surface plasmon resonance (SPR) sensor with an Au grating on an n-Si wafer was proposed. SPR excitation light is illuminated from the backside of the device and diffracted by the grating. Since the diffraction provides matching conditions, SPR can be coupled to the Au/analyte interface. Since the coupled SPR excites free electrons on the Au surface, the SPR can be detected as a current signal by a Schottky barrier diode formed on the Au/n-Si interface. The obtained angular current spectrum showed clear agreement with SPR coupling theory, thereby confirming that the sample on the Au surface can be electrically detected using the proposed sensor. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Scientific journal, English

Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers
Hidetoshi Takahashi; Tetsuo Kan; Akihito Nakai; Tomoyuki Takahata; Takanori Usami; Isao Shimoyama
SENSORS AND ACTUATORS A-PHYSICAL, ELSEVIER SCIENCE SA, 287, 39-47, Mar. 2019, Peer-reviwed, This paper describes an angular acceleration sensor that uses liquid ring channels and piezoresistive cantilevers. The detection of fluidic rotation has attracted attention as a sensing principle for angular acceleration due to the simple structure and potentially low power consumption of devices that use said principle. Although the existing angular acceleration sensors that use this sensing principle have the potential for high sensitivity to angular acceleration about the target axis, crosstalk is an issue-specifically, crosstalk with angular accelerations about other axes and with linear acceleration. Here, we propose an angular acceleration sensor that uses a MEMS piezoresistive cantilever as the sensing element and two mirror-symmetric ring channels. This mirror symmetry cancels out the signals due to accelerations about the other axes, while the signal for the angular acceleration about the target axis is doubled. The experimental results show that the sensitivity to other axial angular accelerations and linear acceleration is sufficiently small. The obtained sensitivity for the angular acceleration is as high as 3.1 x 10(-4)(rad/s(2))(-1), similar to theoretical predictions. This value for the sensitivity is maintained over a range of frequencies from 0.1 Hz to 100 Hz. Therefore, the proposed sensor is suitable for practical angular acceleration detection applications. (C) 2019 Elsevier B.V. All rights reserved.
Scientific journal, English

Compact surface plasmon resonance system with Au/Si schottky barrier
Takuya Tsukagoshi; Yuta Kuroda; Kentaro Noda; Nguyen Binh-Khiem; Tetsuo Kan; Isao Shimoyama
Sensors (Switzerland), MDPI AG, 18, 2, 01 Feb. 2018, Peer-reviwed, True, Ethanol concentration was quantified by the use of a compact surface plasmon resonance (SPR) system, which electrically detects hot electrons via a Schottky barrier. Although it is well known that SPR can be used as bio/chemical sensors, implementation is not necessarily practical, due to the size and cost impediments associated with a system with variable wavelength or angle of incidence. However, scanning capability is not a prerequisite if the objective is to use SPR in a sensor. It is possible to build a small, inexpensive SPR sensor if the optics have no moving parts and a Schottky barrier is used for electrical current detection in place of a photodetector. This article reports on the design and performance of such a novel SPR sensor, and its application for quantifying ethanol concentration. As the concentration of ethanol is increased, the change in the angle dependence of the SPR current is observed. This change can be understood as a superposition of contributions of SPR coupled with the +3rd- and −3rd-order diffraction. Moreover, real-time monitoring of ethanol concentration was demonstrated using the proposed SPR system.
Scientific journal, English

Electrically detectable surface plasmon resonance sensor by combining a gold grating and a silicon photodiode
Ajiki Yoshiharu; Kan Tetsuo; Matsumoto Kiyoshi; Shimoyama Isao
APPLIED PHYSICS EXPRESS, 11, 2, Feb. 2018, Peer-reviwed

Analysis of THz Response of Frame Structures for Achieving Thin-film-type Metamaterials
磯崎瑛宏; 菅哲朗; 高橋英俊; 松本潔; 下山勲; 下山勲
電気学会論文誌 E, 138, 7, 281‐286(J‐STAGE), 2018, Peer-reviwed
Japanese

Near-infrared Si based photodetector using Au/Si nano-antenna structures
Yoshiharu Ajiki; Tetsuo Kan
IEEJ Transactions on Sensors and Micromachines, Institute of Electrical Engineers of Japan, 137, 11, 387-392, 2017, Peer-reviwed, We developed a near-infrared photodetector using nano-pillars formed on an n-typed Si wafer. Au nano-pillars performed as optical antennas, which absorb the infrared light effectively. Each nano-pillar had several hundreds nm of diameter, 1.0-μm-height, and was arrayed with 2-μm-pitch over 100 μm ×100 μm area, fabricated using a MEMS 8-inch line. The absorbed photo energy was transduced to photocurrent by a Schottky barrier formed at the interface between the Au/Cr and n-typed Si. The photocurrent sensitivity (responsivity) of the nano-pillar photodetector exhibited around 10-times increase in average, and 23-times in the maximum, compared with a control Schottky typed photodetector with a flat Au surface. The detectable wavelength limit was extended to 1.8 μm. Because this method was clarified to be compatible with a standard Si fabrication process, it will serve as a fundamental way to construct a photodetector for multi-wavelength photodetection.
Scientific journal, Japanese

NIR spectrometer using a Schottky photodetector enhanced by grating-based SPR
Wenjing Chen; Tetsuo Kan; Yoshiharu Ajiki; Kiyoshi Matsumoto; Isao Shimoyama
OPTICS EXPRESS, OPTICAL SOC AMER, 24, 22, 25797-25804, Oct. 2016, Peer-reviwed, True, We present a near-infrared (NIR) spectrum measurement method using a Schottky photodetector enhanced by surface plasmon resonance (SPR). An Au grating was fabricated on an n-type silicon wafer to form a Schottky barrier and act as an SPR coupler. The resulting photodetector provides wavelength-selective photodetection depending on the SPR coupling angle. A matrix was pre-calculated to describe this characteristic. The spectrum was obtained from this matrix and the measured photocurrents at various SPR coupling angles. Light with single and multiple wavelengths was tested. Comparative measurements showed that our method is able to detect spectra with a wavelength resolution comparable to that of a commercial spectrometer. (C) 2016 Optical Society of America
Scientific journal, English

Scalable fabrication of microneedle arrays via spatially controlled UV exposure
Hidetoshi Takahashi; Yun Jung Heo; Nobuchika Arakawa; Tesuo Kan; Kiyoshi Matsumoto; Ryuji Kawano; Isao Shimoyama
MICROSYSTEMS & NANOENGINEERING, NATURE PUBLISHING GROUP, 2, 16049, Oct. 2016, Peer-reviwed, This paper describes a theoretical estimation of the geometry of negative epoxy-resist microneedles prepared via inclined/rotated ultraviolet (UV) lithography based on spatially controlled UV exposure doses. In comparison with other methods based on UV lithography, the present method can create microneedle structures with high scalability. When negative photoresist is exposed to inclined/rotated UV through circular mask patterns, a three-dimensional, needle-shaped distribution of the exposure dose forms in the irradiated region. Controlling the inclination angles and the exposure dose modifies the photo-polymerized portion of the photoresist, thus allowing the variation of the heights and contours of microneedles formed by using the same mask patterns. In an experimental study, the dimensions of the fabricated needles agreed well with the theoretical predictions for varying inclination angles and exposure doses. These results demonstrate that our theoretical approach can provide a simple route for fabricating microneedles with on-demand geometry. The fabricated microneedles can be used as solid microneedles or as a mold master for dissolving microneedles, thus simplifying the microneedle fabrication process. We envision that this method can improve fabrication accuracy and reduce fabrication cost and time, thereby facilitating the practical applications of microneedle-based drug delivery technology.
Scientific journal, English

Rigid two-axis MEMS force plate for measuring cellular traction force
Hidetoshi Takahashi; Uijin G. Jung; Tetsuo Kan; Takuya Tsukagoshi; Kiyoshi Matsumoto; Isao Shimoyama
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, IOP PUBLISHING LTD, 26, 10, 105006, Oct. 2016, Peer-reviwed, Cellular traction force is one of the important factors for understanding cell behaviors, such as spreading, migration and differentiation. Cells are known to change their behavior according to the mechanical stiffness of the environment. However, the measurement of cell traction forces on a rigid environment has remained difficult. This paper reports a micro-electromechanical systems (MEMS) force plate that provides a cellular traction force measurement on a rigid substrate. Both the high force sensitivity and high stiffness of the substrate were obtained using piezoresistive sensing elements. The proposed force plate consists of a 70 mu m x 15 mu m x 5 mu m base as the substrate for cultivating a bovine aortic smooth muscle cell, and the supporting beams with piezoresistors on the sidewall and the surface were used to measure the forces in both the horizontal and vertical directions. The spring constant and force resolution of the fabricated force plate in the horizontal direction were 0.2 N m(-1) and less than 0.05 mu N, respectively. The cell traction force was measured, and the traction force increased by approximately 1 mu N over 30 min. These results demonstrate that the proposed force plate is applicable as an effective traction force measurement.
Scientific journal, English

Silicon based near infrared photodetector using self-assembled organic crystalline nano-pillars
Yoshiharu Ajiki; Tetsuo Kan; Masayuki Yahiro; Akiko Hamada; Junji Adachi; Chihaya Adachi; Kiyoshi Matsumoto; Isao Shimoyama
APPLIED PHYSICS LETTERS, AMER INST PHYSICS, 108, 15, 151102, Apr. 2016, Peer-reviwed, We propose a silicon (Si) based near-infrared photodetector using self-assembled organic crystalline nano-pillars, which were formed on an n-type Si substrate and were covered with an Au thin-film. These structures act as antennas for near-infrared light, resulting in an enhancement of the light absorption on the Au film. Because the Schottky junction is formed between the Au/n-type Si, the electron excited by the absorbed light can be detected as photocurrent. The optical measurement revealed that the nano-pillar structures enhanced the responsivity for the near-infrared light by 89 (14.5 mA/W) and 16 (0.433 mA/W) times compared with those of the photodetector without nano-pillars at the wavelengths of 1.2 and 1.3 mu m, respectively. Moreover, no polarization dependency of the responsivity was observed, and the acceptable incident angle ranged from 0 degrees to 30 degrees. These broad responses were likely to be due to the organic nano-pillar structures' having variation in their orientation, which is advantageous for near-infrared detector uses. (C) 2016 AIP Publishing LLC.
Scientific journal, English

Enantiomeric switching of chiral metamaterial for terahertz polarization modulation employing vertically deformable MEMS spirals
Tetsuo Kan; Akihiro Isozaki; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Hidetoshi Takahashi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama
NATURE COMMUNICATIONS, NATURE PUBLISHING GROUP, 6, 8422-8422, Oct. 2015, Peer-reviwed, True, Active modulation of the polarization states of terahertz light is indispensable for polarization-sensitive spectroscopy, having important applications such as non-contact Hall measurements, vibrational circular dichroism measurements and anisotropy imaging. In the terahertz region, the lack of a polarization modulator similar to a photoelastic modulator in the visible range hampers expansion of such spectroscopy. A terahertz chiral metamaterial has a huge optical activity unavailable in nature; nevertheless, its modulation is still challenging. Here we demonstrate a handedness-switchable chiral metamaterial for polarization modulation employing vertically deformable Micro Electro Mechanical Systems. Vertical deformation of a planar spiral by a pneumatic force creates a three-dimensional spiral. Enantiomeric switching is realized by selecting the deformation direction, where the polarity of the optical activity is altered while maintaining the spectral shape. A polarization rotation as high as 28 degrees is experimentally observed, thus providing a practical and compact polarization modulator for the terahertz range.
Scientific journal, English

Out-of-plane actuation with a sub-micron initial gap for reconfigurable terahertz micro-electro-mechanical systems metamaterials
Akihiro Isozaki; Tetsuo Kan; Hidetoshi Takahashi; Kiyoshi Matsumoto; Isao Shimoyama
OPTICS EXPRESS, OPTICAL SOC AMER, 23, 20, 26243-26251, Oct. 2015, Peer-reviwed, True, We propose a reconfigurable terahertz (THz) metamaterial that can control the transmittance by out-of-plane actuation with changing the sub-micron gap distance between electrically coupled metamaterial elements. By using the out-of-plane actuation, it was possible to avoid contact between the coupled metamaterial elements across the small initial gap during the adjustment of the gap size. THz spectroscopy was performed during actuation, and the transmission dip frequency was confirmed to be tunable from 0.82 to 0.92 THz for one linear polarization state and from 0.80 to 0.91 THz for the other linear polarization; the two polarizations were orthogonal. The proposed approach will contribute to the development of tunable metamaterials based on structural deformations. (C) 2015 Optical Society of America
Scientific journal, English

Stretchable cell culture platforms using micropneumatic actuators
Yun Jung Heo; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
MICRO & NANO LETTERS, INST ENGINEERING TECHNOLOGY-IET, 8, 12, 865-868, Dec. 2013, Peer-reviwed, A stretchable cell culture platform in which elastic micropneumatic actuators are embedded has been developed. By using the softlithography of polydimethylsiloxane (PDMS), the platform can be fabricated to any size and shape. It also permits cell culture by using the same standard methods that one would use with a Petri dish and it is transparent, permitting optical inspection of the cells. Thus, the platform is promising for studying cell responses because of mechanical stimulus. In this reported work, cells were cultured on a PDMS diaphragm of the micropneumatic actuators. Owing to input pressure, the micropneumatic actuators swell like a balloon, thereby stretching the cell membranes on the PDMS. The design flexibility of the presented approach is demonstrated by developing two kinds of stretchable platforms with diaphragm diameters of 558 and 24.8 m to stretch whole and local cell membranes, respectively. Then, the cell membranes attached on the PDMS diaphragms are stretched by applying pressure on the pneumatic actuators. The applied stress causes an increase in the intracellular calcium ion concentration that is a fast cellular mechanotransduction. Therefore, it is concluded that the method for stretching cell membranes can stimulate either whole or local cell membranes, thus showing the potential to be used in in vitro studies of cellular mechanotransduction.
Scientific journal, English

Batch fabrication of a double-layer metamaterial resonator using scalloping structures
Akihiro Isozaki; Tetsuo Kan; Keisuke Takano; Masanori Hangyo; Kiyoshi Matsumoto; Isao Shimoyama
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, IOP PUBLISHING LTD, 23, 8, 085006, Aug. 2013, Peer-reviwed, We propose a batch fabrication method for a double-layer microscale metamaterial resonator operating in the terahertz (THz) region. The proposed method takes advantage of scalloping structures formed by a general deep etching process. The scalloping structures function as a shadow mask. The shadow mask structure allows for the simultaneous fabrication of multiple metal layers with only a one-time evaporation step. The evaporated metal layers are electrically isolated from each other. In this paper, we fabricated a double-layer split-ring resonator (SRR) on a silicon substrate. The typical length of an arm of the SRRs was 40 mu m, and the interlayer distance was 4 mu m. Using energy-dispersive x-ray analysis, we confirmed that there was a nonevaporation area between the two SRR layers. We also confirmed that the fabricated sample functioned as a metamaterial in the THz region by transmittance measurements and simulation. These results prove that our method could lead to the realization of multilayer metamaterials.
Scientific journal, English

Spiral metamaterial for active tuning of optical activity
Tetsuo Kan; Akihiro Isozaki; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama
Applied Physics Letters, 102, 22, 221906, 03 Jun. 2013, Peer-reviwed, We propose an electrostatically actuated spiral structure as a metamaterial for circularly polarized light in the terahertz (THz) frequency range. An array of planar spiral structures was fabricated with micro electro mechanical system technology, and the geometry of the structures can be changed by electrostatic actuation. The actuation transforms the planar spirals into three-dimensional helices, resulting in optical activity in which the differential polarization response of the material depends on whether the incident light is left- or right-circularly polarized. THz spectroscopy confirmed that the optical activity can be tuned with the proposed structures. © 2013 AIP Publishing LLC.
Scientific journal, English

Measurement method for light transmittance of layered metamaterials
Akihiro Isozaki; Tetsuo Kan; Yoshiharu Ajiki; Kiyoshi Matsumoto; Isao Shimoyama
OPTICS LETTERS, OPTICAL SOC AMER, 38, 11, 1811-1813, Jun. 2013, Peer-reviwed, True, We propose a method to measure light transmittance of layered metamaterials by placing the metamaterials directly on a Si photodiode. Our measurement method enables the direct detection of transmitted light that appears as an evanescent wave in natural materials. Here, we report the transmittance measurements of a typical metamaterial using this method. The metamaterial was composed of Ag/Al2O3 layers and was fabricated by direct evaporation on the Si photodiode. The measured transmittance agrees with the simulated transmittance. Our results confirmed that this measurement method can determine the transmittance properties of metamaterials and that it is applicable to other types of metamaterials. (C) 2013 Optical Society of America
Scientific journal, English

A photoresponse-compensated parallel piezoresistive cantilever for cellular force measurements
Uijin G. Jung; Kenta Kuwana; Yoshiharu Ajiki; Hidetoshi Takahashi; Tetsuo Kan; Yusuke Takei; Kentaro Noda; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
Journal of Micromechanics and Microengineering, 23, 4, 45015, Apr. 2013, Peer-reviwed, This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%. © 2013 IOP Publishing Ltd.
Scientific journal, English

Ratiometric Optical Temperature Sensor Using Two Fluorescent Dyes Dissolved in an Ionic Liquid Encapsulated by Parylene Film
Tetsuo Kan; Hironori Aoki; Nguyen Binh-Khiem; Kiyoshi Matsumoto; Isao Shimoyama
SENSORS, MDPI AG, 13, 4, 4138-4145, Apr. 2013, Peer-reviwed, True, A temperature sensor that uses temperature-sensitive fluorescent dyes is developed. The droplet sensor has a diameter of 40 mu m and uses 1 g/L of Rhodamine B (RhB) and 0.5 g/L of Rhodamine 110 (Rh110), which are fluorescent dyes that are dissolved in an ionic liquid (1-ethyl-3-methylimidazolium ethyl sulfate) to function as temperature indicators. This ionic liquid is encapsulated using vacuum Parylene film deposition (which is known as the Parylene-on-liquid-deposition (PoLD) method). The droplet is sealed by the chemically stable and impermeable Parylene film, which prevents the dye from interacting with the molecules in the solution and keeps the volume and concentration of the fluorescent material fixed. The two fluorescent dyes enable the temperature to be measured ratiometrically such that the droplet sensor can be used in various applications, such as the wireless temperature measurement of microregions. The sensor can measure the temperature of such microregions with an accuracy of 1.9 degrees C, a precision of 3.7 degrees C, and a fluorescence intensity change sensitivity of 1.0%/K. The sensor can measure temperatures at different sensor depths in water, ranging from 0 to 850 mu m. The droplet sensor is fabricated using microelectromechanical system (MEMS) technology and is highly applicable to lab-on-a-chip devices.
Scientific journal, English

Design of a piezoresistive triaxial force sensor probe using the sidewall doping method
Tetsuo Kan; Hidetoshi Takahashi; Nguyen Binh-Khiem; Yuichiro Aoyama; Yusuke Takei; Kentaro Noda; Kiyoshi Matsumoto; Isao Shimoyama
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, IOP PUBLISHING LTD, 23, 3, 35027, Mar. 2013, Peer-reviwed, In this study, we propose a triaxial force measurement sensor probe with piezoresistors fabricated via sidewall doping using rapid thermal diffusion. The device was developed as a tool for measuring micronewton-level forces as vector quantities. The device consists of a 15 mu m thick cantilever, two sensing beams and four wiring beams. The length and width of the cantilever are 1240 mu m and 140 mu m, respectively, with a beam span of 1200 mu m and a width of 10-15 mu m. The piezoresistors are formed at the root of the cantilever and the sidewalls of the two sensing beams. The sensor spring constants for each axis were measured at k(x) = 1.5 N m(-1), k(y) = 3.5 N m(-1) and k(z) = 0.64 N m(-1). We confirmed that our device was capable of measuring triaxial forces with a minimum detectable force at the submicronewton level.
Scientific journal, English

Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever
Hidetoshi Takahashi; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
MEASUREMENT SCIENCE AND TECHNOLOGY, IOP PUBLISHING LTD, 24, 2, 25107, Feb. 2013, Peer-reviwed, This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 mu m x 200 mu m x 0.29 mu m. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 x 10(-3) (m/s)(-1) from 0 to 2.5 m s(-1). When a particle of 35 mu m diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 x 10(-3) (m/s)(-1) when the airflow velocity varied between 0 and 2.5 m s(-1).
Scientific journal, English

Electrochemical impedance measurement of a carbon nanotube probe electrode
Akira Inaba; Yusuke Takei; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
NANOTECHNOLOGY, IOP PUBLISHING LTD, 23, 48, 485302-485302, Dec. 2012, Peer-reviwed, True, We measured and analyzed the electrochemical impedance of carbon nanotube (CNT) probe electrodes fabricated through the physical separation of insulated CNT bridges. The fabricated CNT electrodes were free-standing CNTs that were completely covered with an insulator, except for their tips. Typical dimensions of the nanoelectrodes were 1-10 nm in CNT diameter, 80-300 nm in insulator diameter, 0.5-4 mu m in exposed CNT length and 1-10 mu m in probe length. The electrochemical impedance at frequencies ranging from 40 Hz to 1 MHz was measured in physiological saline. The measured impedance of the CNT electrode was constant at 32 M Omega at frequencies below 1 kHz and was inversely proportional to frequency at frequencies above 10 kHz. By means of comparison with the parasitic capacitive impedance of the insulator membrane, we confirmed that the electrode was sufficiently insulated such that the measured constant impedance was given by the exposed CNT tip. Consequently, we can use the CNT electrode for highly localized electrochemical impedance measurements below 1 kHz. Considering an equivalent circuit and the nanoscopic dimensions of the CNT electrode, we demonstrated that the constant impedance was governed by diffusion impedance, whereas the solution resistance, charge-transfer resistance and double-layer capacitance were negligible.
Scientific journal, English

Optical measurement of directional strain by scattering from nano-disk pairs aligned on an elastomer
Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
NANOTECHNOLOGY, IOP PUBLISHING LTD, 23, 31, 315201-315201, Aug. 2012, Peer-reviwed, True, We propose a strain measurement method utilizing light scattered by a pair of nano-disks onto an elastomer sheet. Such nanoparticle pairs exhibit a scattering spectrum that is dependent on the gap distance and the incident light polarization. We utilized this behavior by forming nano-disk pairs with a diameter of 105 nm and a gap of 20-50 nm on a polydimethylsiloxane (PDMS) sheet so that the gap could be altered with strain. The axial direction of the nano-disk pair could be identified by finding the peak wavelength maximum while rotating the polarization angle. Under tensile strain, the peak wavelength decreased from 674 nm at a strain of 0% to 637 nm at a strain of 9.5%, with a peak-shift sensitivity of -3.4 nm/% strain. Under compression strain, the peak wavelength increased from 681 nm at a strain of 0% to 705 nm at a strain of -3.8%, and the peak-shift sensitivity was -16 nm/% strain for strains of 0 to -1%. These experimentally determined peak scattering wavelength positions and peak-shift directions are consistent with the simulation results. This method offers wireless measurements of in situ strain on a nanometric scale.
Scientific journal, English

Mechanical impulses can control metaphase progression in a mammalian cell
Takeshi Itabashi; Yasuhiko Terada; Kenta Kuwana; Tetsuo Kan; Isao Shimoyama; Shin'ichi Ishiwata
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, NATL ACAD SCIENCES, 109, 19, 7320-7325, May 2012, Peer-reviwed, True, Chromosome segregation machinery is controlled by mechanochemical regulation. Tension in a mitotic spindle, which is balanced by molecular motors and polymerization-depolymerization dynamics of microtubules, is thought to be essential for determining the timing of chromosome segregation after the establishment of the kinetochore-microtubule attachments. It is not known, however, whether and how applied mechanical forces modulate the tension balance and chemically affect the molecular processes involved in chromosome segregation. Here we found that a mechanical impulse externally applied to mitotic HeLa cells alters the balance of forces within the mitotic spindle. We identified two distinct mitotic responses to the applied mechanical force that either facilitate or delay anaphase onset, depending on the direction of force and the extent of cell compression. An external mechanical impulse that physically increases tension within the mitotic spindle accelerates anaphase onset, and this is attributed to the facilitation of physical cleavage of sister chromatid cohesion. On the other hand, a decrease in tension activates the spindle assembly checkpoint, which impedes the degradation of mitotic proteins and delays the timing of chromosome segregation. Thus, the external mechanical force acts as a crucial regulator for metaphase progression, modulating the internal force balance and thereby triggering specific mechanochemical cellular reactions.
Scientific journal, English

Long-range surface plasmon resonance sensor with liquid micro-channels to maintain the symmetry condition of the refractive index
Tetsuo Kan; Hiroyuki Kojo; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, IOP PUBLISHING LTD, 20, 12, 125005, Dec. 2010, Peer-reviwed, We propose a method to maintain the symmetry of the refractive index with respect to an Au film, in which the refractive indices are the same near both surfaces of the Au film, for LRSPR (long-range surface plasmon resonance) sensors. Maintenance of the symmetry is necessary for exciting the LRSPR mode. However, because the buffer layer under the Au film is usually made of a solid dielectric material with a constant refractive index, the quality of the measurement is reduced when the refractive index of the analyte used is dramatically different from that of the buffer layer. To solve this problem, the proposed sensor is equipped with liquid channels under the Au film. The Au film used in this study was supported by a thin (100 nm) polymer film forming parallel, one-dimensional liquid channels with a 29 mu m pitch. Because the analyte solution flows in the channels, both surfaces of the Au film face the same analyte. Thus, this configuration automatically satisfies the symmetry condition for analytes with a wide range of refractive indices. We examined the validity of the sensor and compared it to that of a conventional sensor by measuring the LRSPR for five analyte solutions with different refractive indices. LRSPR dips were clearly observed for all of the analytes tested. The dip of the conventional LRSPR sensor became shallow when the refractive index increased, with the final dip depth being 65% of the initial dip depth for a refractive index of 1.358. In contrast, the dip depth of the proposed LRSPR sensor remained constant over the entire measured refractive index range of 1.331 to 1.358. These results indicate that the proposed sensor maintains the symmetry condition and confirm that the proposed method is effective for highly sensitive LRSPR measurements for a wide variety of analyte species.
Scientific journal, English

Tunable gold-coated polymer gratings for surface plasmon resonance coupling and scanning
Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, IOP PUBLISHING LTD, 20, 8, 85032, Aug. 2010, Peer-reviwed, We propose an surface plasmon resonance (SPR) coupling device that can tune the coupling condition by changing the pitch of an Au grating. A grating with a micrometer-sized pitch was produced on a flexible thin parylene membrane, making an 8 mm x 8 mm diaphragm. An SPR can be coupled to the Au grating surface by direct laser irradiation, and the dependence of the SPR angles (within 6 degrees. to 56 degrees.) on the grating pitch (ranging from 1000 to 1500 nm) shows good agreement with the SPR theory. We demonstrate that the SPR matching condition can be tuned by changes in pitch due to strain caused by membrane expansion. The SPR angle shift reached about 0.2 degrees, corresponding to about 0.6% strain, by 15 kPa pressure application. The SPR angle shift sensitivity to the pressure was 0.015 degrees kPa(-1). This value is almost equal to that calculated from strain measurements (0.014 degrees kPa(-1)), and we conclude that the SPR angle shift was caused by the grating pitch change due to the pressure application. Theoretical consideration indicates that a refractive index change of about 0.01 RIU is possible with this device near the refractive index of water.
Scientific journal, English

Fabrication of three dimensional silicon slopes using mask With square openings
Yusuke Takei; Takahiro Ohori; Tomoyuki Takahata; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
IEEJ Transactions on Sensors and Micromachines, 130, 5, 6-187, 2010, Peer-reviwed, We propose a fabrication method of three-dimensional silicon slopes using RIE-lag. RIE-lag is a lag of an etching rate depending on square openings area of a mask. We measured relationship between area of square openings and etched depths. We confirmed that etched depths were defined as a function of the square openings. With this relationship, we designed a mask with various sizes of the squares for slope structures. Square openings of various sizes were patterned using EB lithography. Silicon was etched vertically with ICP-RIE (Inductive Coupled Plasma - Reactive Ion Etching). By RIE-lag, trenches with multiple depths depending on the area of the square openings were formed. Silicon surface was smoothed by SF6 isotropic dry etching. As a result, by the combination of ICP-RIE anisotropic etching RIE-lag and SF6 isotropic etching, we fabricated 57° silicon slopes of surface roughness 10 nm in plane and 35 nm in slope surface. © 2010 The Institute of Electrical Engineers of Japan.
Scientific journal, Japanese

Planar near-infrared surface plasmon resonance sensor with Si prism and grating coupler
Tetsuo Kan; Naoko Tsujiuchi; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
SENSORS AND ACTUATORS B-CHEMICAL, ELSEVIER SCIENCE SA, 144, 1, 295-300, Jan. 2010, Peer-reviwed, We have developed a silicon-microfabrication-based surface plasmon resonance (SPR) sensor with Si prisms and an optical grating. Since this sensor is compatible with microelectromechanical systems technology. it can be further miniaturized and integrated with optical parts or fluidic components for the realization of a one-chip SPR sensor. The Si prism structure, transparent in the near-infrared range, was used to lead the 1550-nm measuring light to the sensing Surface where the evanescent light was generated. Smooth prism slopes were obtained by using anisotropic etching to Utilize the (1 1 1) planes on the (1 0 0) Surface plane of single-crystalline Si wafer. The result Was a 200-mu m-pitch array of prisms with 54.74 slope angles. In this configuration the range of incident angles at which near-infrared light produces an SPR dip is from 38.26 degrees to 71.24 degrees. Because the SPR angles for major specimens (16.60 degrees for air. 22.06 degrees for water, and 22.79 degrees for ethanol) are Out of range, we used an optical grating with a roughly 400-nm-pitch to make an SPR clip position move to fit within the available angle range by the diffraction effect. SPR measurements with several specimens confirmed that the combination of Si prisms and the optical grating excited Surface plasmons. The measured SPR dip positions and their sensitivity to refractive index were compared with the theoretical values, and their consistency confirmed the utility of this device as an SPR sensor. (C) 2009 Elsevier B.V. All rights reserved.
Scientific journal, English

Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning
Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
REVIEW OF SCIENTIFIC INSTRUMENTS, AMER INST PHYSICS, 78, 8, 083106-083106, Aug. 2007, Peer-reviwed, True, Scanning near-field optical microscopes (SNOMs) with fluorescence-based probes are promising tools for evaluating the optical characteristics of nanoaperture devices used for biological investigations, and this article reports on the development of a microfabricated fluorescence-based SNOM probe with a piezoresistor. The piezoresistor was built into a two-legged root of a 160-mu m-long cantilever. To improve the displacement sensitivity of the cantilever, the piezoresistor's doped area was shallowly formed on the cantilever surface. A fluorescent bead, 500 nm in diameter, was attached to the bottom of the cantilever end as a light-intensity-sensitive material in the visible-light range. The surface of the scanned sample was simply detected by the probe's end being displaced by contact with the sample. Measuring displacements piezoresistively is advantageous because it eliminates the noise arising from the use of the optical-lever method and is free of any disturbance in the absorption or the emission spectrum of the fluorescent material at the probe tip. The displacement sensitivity was estimated to be 6.1x10(-6) nm(-1), and the minimum measurable displacement was small enough for near-field measurement. This probe enabled clear scanning images of the light field near a 300x300 nm(2) aperture to be obtained in the near-field region where the tip-sample distance is much shorter than the light wavelength. This scanning result indicates that the piezoresistive way of tip-sample distance regulation is effective for characterizing nanoaperture optical devices. (c) 2007 American Institute of Physics.
Scientific journal, English

研究室だより：電気通信大学 大学院情報理工学研究科 機械知能システム学専攻 菅研究室
菅哲朗
01 Apr. 2022, 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, 142, 4, NL4_2, Japanese, Others, False

国際会議報告：The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
菅 哲朗
一般社団法人 電気学会, 01 Apr. 2021, 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, 141, 4, NL4_1-NL4_1, Japanese, 1341-8939, 1347-5525, 130008014076

Electric Detection of Surface Plasmon Resonance using the Schottky Barrier
塚越拓哉; 菅哲朗; 野田堅太郎; 下山勲
2021, 電子情報通信学会技術研究報告(Web), 121, 136(ED2021 11-14), 2432-6380, 202102250966918772

MEMSによるシリコンを用いた光デバイス：赤外線センサや可変フィルタの展開
安永竣, 大下雅昭, 菅哲朗
化学工業社, Nov. 2020, 月刊ケミカルエンジニヤリング, 12月, 747-754, Japanese, Invited, Introduction commerce magazine, False

シリコンMEMSプラズモニック構造による光電気的検出を利用したセンサの展開—Advances of Silicon MEMS Sensors Employing Electrical Detection of Plasmon—MEMSセンサ研究開発の最前線
菅 哲朗
応用物理学会, 2019, 応用電子物性分科会誌 = Bulletin of solid state physics and applications / 応用物理学会応用電子物性分科会 編, 25, 4, 123-128, Japanese, 1341-5123

シリコンを材料に用いた赤外光検出器
菅哲朗、安食嘉晴
04 Oct. 2017, 月刊OPTRONICS, 2017, 10, 137-142, Japanese, Introduction commerce magazine, False

メタマテリアルの設計、作製と 新材料、デバイス開発への応用
磯崎瑛宏, 菅哲朗
Scholarly book, Japanese, Joint work, 第6章第5節「薄膜基板上に構成するテラヘルツMEMSメタマテリアル」, 技術情報協会, 31 Mar. 2022

メタマテリアルを用いた土壌ワイヤレスモニタリングセンサ
佐藤蒼馬; 矢野達也; 谷原渉; 阪部拳; 尾上弘晃; 菅哲朗
Public discourse, Japanese, 電気学会 新方式精密計測による物理・工学的変革を目指す回路技術調査専門委員会, Invited
13 Mar. 2025
13 Mar. 2025- 13 Mar. 2025

半導体型表面プラズモン共鳴センサによるワンチップ化学量センシングの実現に向けて
菅 哲朗
Public discourse, Japanese, 電気学会ケミカルセンサ研究会「香りの計測と心理・生理学的効果の応用およびケミカルセンサ一般」, Invited
03 Mar. 2025
03 Mar. 2025- 03 Mar. 2025

Mid-infrared detection using Si-technology compatible plasmon enhanced Schottky structure
Elyas Ashenafi; Tetsuo Kan
Oral presentation, English, マイクロマシン・センサシステム研究会
31 Jan. 2025
31 Jan. 2025- 31 Jan. 2025

DRILLING BACTERIAL MOTILITY IN CONFINED SPACES NVESTIGATED USING SUB-MICRON WIDTH FLUIDIC CHANNELS
Yoshiki Shimada; Aoba Yoshioka; Naoki Uemura; Daisuke Nakane; Tetsuo Kan
Poster presentation, English, The 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2025), Peer-reviewed, https://doi.org/10.1109/MEMS61431.2025.10917776
19 Jan. 2025
19 Jan. 2025- 23 Jan. 2025

SUB-MICRON-THICK SI MEMBRANE SURFACE PLASMON COUPLING STRUCTURE FOR REDUCING UNWANTED PROPAGATION MODES INSIDE SI
Tetsuya Ozawa; Abubakr Eslam; Tetsuo Kan
Poster presentation, English, The 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2025), Peer-reviewed, https://doi.org/10.1109/MEMS61431.2025.10917985, International conference
19 Jan. 2025
19 Jan. 2025- 23 Jan. 2025

NARROW ELECTRODE SPACING FOR ENHANCED SENSITIVITY OF PTSI/P-SI NANOHOLE-ARRAY MID-INFRARED PHOTODETECTOR
Elyas A. Ashenafi; Daiji Noda; Ryo Ohta; Tetsuo Kan
Poster presentation, English, The 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2025), Peer-reviewed, https://doi.org/10.1109/MEMS61431.2025.10918183, International conference
19 Jan. 2025
19 Jan. 2025- 23 Jan. 2025

ACOUSTICALLY DRIVEN SCANNING MIRROR ENHANCED BY HELMHOLTZ RESONATOR UNIT
Masahiro Fukuta; Rihachiro Nakashima; Tetsuo Kan; Hidetoshi Takahashi
Poster presentation, English, The 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2025), Peer-reviewed, https://doi.org/10.1109/MEMS61431.2025.10917420, International conference
19 Jan. 2025
19 Jan. 2025- 23 Jan. 2025

OPTICAL CANTILEVER USING DIFFRACTION GRATING AND SAMPLING MOIRÉ METHOD
AIによる分割を利用; 分割結果表示; Soya SatoToshihiro ShiratoriTetsuo; KanHidetoshi Takahashi
Poster presentation, English, The 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2025), Peer-reviewed, https://doi.org/10.1109/MEMS61431.2025.10917823, International conference
19 Jan. 2025
19 Jan. 2025- 23 Jan. 2025

Advanced Room-Temperature NIR Plasmonic Photodetection and Reconstructive Spectroscopy
Eslam Abubakr; Hironori Suzuki; Shiro Saito; Tetsuo Kan
Oral presentation, English, 2024 MRS Fall Meeting & Exhibit, Peer-reviewed
06 Dec. 2024
01 Dec. 2024- 06 Dec. 2024

Verification of Protein Detection Using a Current-Detection Surface Plasmon Resonance Sensor with a Gold Grating on Silicon
Yuki Imai; Tetsuo Kan
Oral presentation, English, Bio4Apps
03 Dec. 2024
02 Dec. 2024- 04 Dec. 2024

Development of PtSi/p-Si Schottky Mid-Infrared Photodetector for Room-temperature Non-Invasive Blood Monitoring applications
Elyas Ashenafi; Tetsuo Kan
Oral presentation, English, Bio4Apps 2024
03 Dec. 2024
02 Dec. 2024- 04 Dec. 2024

表面プラズモン共鳴を利用したMEMS赤外分光器
菅 哲朗; Eslam Abubakr; 大下 雅昭
Invited oral presentation, Japanese, Optics & Photonics Japan 2024, Invited
30 Nov. 2024
29 Nov. 2024- 01 Dec. 2024

スプリットリング共振器を用いた胃の蠕動運動センシングのための可食性ワイヤレスセンサ
三浦 嗣恩; 菅哲朗; 尾上弘晃
Poster presentation, 化学とマイクロ・ナノシステム学会主催 第50回研究会(CHEMINAS50)
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

電磁波を用いた可食センサのワイヤレス位置・動き特定
冨田健太朗; 菅哲朗; 尾上弘晃
Poster presentation, 化学とマイクロ・ナノシステム学会主催 第50回研究会(CHEMINAS50)
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

メタマテリアル完全吸収体を用いた自然分解性ワイヤレス土壌尿素センサ
田名網 優; 阪部 拳; 菅 哲朗; 尾上 弘晃
Poster presentation, 化学とマイクロ・ナノシステム学会主催 第50回研究会(CHEMINAS50)
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

電流検出型表面プラズモン共鳴センサを利用した分光器の小型化検討
山内貴弘; 野口瑛矢; 大下雅昭; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

電流検出型表面プラズモン共鳴センサのアレイ化の検討
大室和志; 宇梶尚弥; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

ワイヤレス土壌モニタリングのための生分解性中空等方性メタマテリアル
鑓溝哲也; 能任史也; 佐藤悠太郎; 尾上弘晃; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

生分解性材料で構成した等方性メタマテリアル
佐藤悠太郎; 能任史也; 尾上弘晃; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

シート型マイクロ波メタマテリアルセンサによる安定的な土壌特性評価法
能任史也; 佐藤蒼馬; 尾上弘晃; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

2次元回折格子を備えたSPR式光検出器
野口瑛矢; Abubakr Eslam; 大下雅昭; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

薄型Si層を用いた背面照射型SPR化学量半導体センサの研究
小澤徹也; Eslam Abubakr; 菅哲朗
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

バクテリア運動の流路幅依存性検証のためのマイクロ流路デバイスの研究
島田佳季; 吉岡青葉; 上村直輝; 中根 大介; 菅 哲朗
第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

常温での界面特性を改善した近赤外光検出の強化
Abubakr Eslam; Shiro Saito; Hironori Suzuki; Tetsuo Kan
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

マイクロ流路における管状微粒子の姿勢評価
大下雅昭; 菅哲朗; 正本和人
Poster presentation, 第15回 マイクロ・ナノ工学シンポジウム
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

レーザアニールを用いて一括製作したピエゾ抵抗型カンチレバー
中島 利八郎; 菅 哲朗; 高橋 英俊
Oral presentation, 第41回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

2D ナノホールベースの PtSi/p-Si 中赤外線検出器の光感度に対する温度の影響
Elyas Ashenafi; Noda Daiji; Ohta Ryo; Kan Tetsuo
第41回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

金回折格子構造による電流検出型表面プラズモン共鳴センサの生体分子計測への適用
今井 雄貴; 宇梶 尚弥; 小澤 徹也; 瀧 真清; 菅 哲朗
Poster presentation, 第41回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

電流検出型表面プラズモン共鳴センサの Au/n-Si Schottky 界面における拡散の影響
宇梶 尚弥; 今井 雄貴; Eslam Abubakr; 菅 哲朗
第41回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

完全吸収メタマテリアルを用いた土壌pHワイヤレスモニタリングセンサ
佐藤 蒼馬; 阪部 拳; 尾上 弘晃; 菅 哲朗
Oral presentation, 第41回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
25 Nov. 2024
25 Nov. 2024- 28 Nov. 2024

Burkholderia近縁種を対象としたドリル運動の流路幅依存性検証
島田 佳季; 吉岡 青葉; 上村 直輝; 中根 大介; 菅 哲朗
日本微生物生態学会第37回広島大会
28 Oct. 2024
28 Oct. 2024- 31 Oct. 2024

微小流体デバイスを用いた Helicobacter 属細菌の運動戦略の可視化
横濱 さらら; 林原 絵美子; 島田 佳季; 菅 哲朗; 見理剛; 中根 大介
日本微生物生態学会第37回広島大会
28 Oct. 2024
28 Oct. 2024- 31 Oct. 2024

LOCATION AND VELOCITY DETECTION OF EDIBLE WIRELESS CAPSULE SENSOR FOR DIGESTIVE SYSTEM MONITORING
Kentaro Tomita; Kan Tetsuo; Hiroaki Onoe
Poster presentation, English, The 28th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2024), Peer-reviewed
13 Oct. 2024
13 Oct. 2024- 17 Oct. 2024

AN EDIBLE WIRELESS SENSOR USING PIEZOELETCRIC BROCCOLI/CELLULOCE FILM WITH SPLIT-RING RESONATORS FOR GASTRIC MOTILITY SENSING
Shion Miura; Tetsuo Kan; Hiroaki Onoe
Poster presentation, English, The 28th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2024), Peer-reviewed
13 Oct. 2024
13 Oct. 2024- 17 Oct. 2024

ENVIRONMENTALLY DISPERSIBLE AND FULLY BIODEGRADABLE WIRELESS UREA SENSOR FOR SOIL MONITORING
Yu Tanaami; Ken Sakabe; Tetsuo Kan; Hiroaki Onoe
Oral presentation, English, The 28th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2024), Peer-reviewed
13 Oct. 2024
13 Oct. 2024- 17 Oct. 2024

Advancing Near-Infrared Photodetection and Spectroscopy Through Interlayer Integration
Eslam Abubakr; Tetsuo Kan
Invited oral presentation, English, JCK MEMS/NEMS 2024, Invited
19 Sep. 2024
18 Sep. 2024- 21 Sep. 2024

シリコンMEMSを用いた赤外線分光センサ
菅 哲朗
Invited oral presentation, 令和6年電気学会 基礎・材料・共通部門大会, Invited
03 Sep. 2024
02 Sep. 2024- 04 Sep. 2024

マイクロ流体デバイスで実現する細菌オリンピック
島田佳季; 吉岡青葉; 上村直輝; 中根大介; 菅哲朗
Invited oral presentation, Japanese, 第97回日本細菌学会総会, Peer-reviewed
07 Aug. 2024
07 Aug. 2024- 09 Aug. 2024

狭小空間がHelicobacter pyloriのドリル運動を誘起する
横濵さらら; 林原絵美子; 島田佳季; 菅哲朗; 見理剛; 中根大介
Poster presentation, Japanese, 第97回日本細菌学会総会, Peer-reviewed
07 Aug. 2024
07 Aug. 2024- 09 Aug. 2024

Reconstructive Spectrometer Using Plasmonic Photodetector
Yuuki Kaneda; Eslam Abubakr; A. Abadi; Shun Yasunaga; Masaaki Oshita; Tetsuo Kan
Invited oral presentation, English, 14th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META2024), Invited
18 Jul. 2024
16 Jul. 2024- 19 Jul. 2024

IEEE NEMS2024報告
菅哲朗
有機機能材料のリソグラフィ加工コンソーシアム, Invited
08 Jul. 2024

APPLICATION OF CURRENT DETECTION SURFACE PLASMON RESONANCE SENSOR USING SILICON AND GOLD GRATING FOR BIOMOLECULAR MEASUREMENT
Yuki Imai; Masaya Ukaji; Tetsuya Ozawa; Eslam Abubakr; Masumi Taki; Tetsuo Kan
The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Peer-reviewed
23 Jun. 2024- 26 Jun. 2024

Analysis of Temperature-Dependent photosensitivity of 2D Nanohole-Based PtSi/p-Si Schottky Mid-Infrared detector
Elyas Ashenafi Abadi; Daiji Noda; Ryo Ohta; Tetsuo Kan
The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Peer-reviewed
23 Jun. 2024- 26 Jun. 2024

Responsivity Dynamics of Au-Si Interdiffusion Effects in Surface Plasmon Resonance Sensors
Masaya Ukaji; Yuki Imai; Eslam Abubakr; Tetsuo Kan
The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Peer-reviewed
23 Jun. 2024- 26 Jun. 2024

Noise Characteristics of Backside Coupled Propagating Surface Plasmon Resonance with Wafer Side Detection
Masaaki Oshita; Shinichi Suzuki; Kazuto Masamoto; Tetsuo Kan
The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Peer-reviewed
23 Jun. 2024- 26 Jun. 2024

Posture evaluation of tubular microparticles in microfluidic channel
Masaaki Oshita; Tetsuo Kan; Kazuto Masamoto
The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Peer-reviewed
23 Jun. 2024- 26 Jun. 2024

Hydrogel on a split ring resonator Soil water content sensing using swelling characteristics
Fumiya Noto; Soma Sato; Hiroaki Onoe; Tetsuo Kan
The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Peer-reviewed
23 Jun. 2024- 26 Jun. 2024

土壌センシングに向けた等方性メタマテリアルの反射特性評価
菅哲朗; 谷原渉; 佐藤蒼馬; 尾上弘晃
ロボティクス・メカトロニクス 講演会 2024 in Utsunomiya
29 May 2024- 01 Jun. 2024

チタンを用いた低障壁化表面プラズモン共鳴式光検出器による分光法における応答性の定量検証
野口瑛矢; イスラム・アブバクル; 金田裕喜; 大下雅昭; 菅哲朗
ロボティクス・メカトロニクス 講演会 2024 in Utsunomiya
29 May 2024- 01 Jun. 2024

スプリットリング共振器上のハイドロゲルの膨潤特性を利用した土壌水分量センシング
能任史也; 佐藤蒼馬; 尾上弘晃; 菅哲朗
ロボティクス・メカトロニクス 講演会 2024 in Utsunomiya
29 May 2024- 01 Jun. 2024

胃の運動機能センシングのための可食性圧電ワイヤレスカプセルセンサ
三浦嗣恩; 菅哲朗; 尾上弘晃
ロボティクス・メカトロニクス 講演会 2024 in Utsunomiya
29 May 2024- 01 Jun. 2024

Advancing Near-Infrared Photodetection and Spectroscopy Through Interlayer Schottky Plasmonic Photodetectors
Eslam Abubakr; Masaaki Oshita; Shiro Saito; Tetsuo Kan
The 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS), Peer-reviewed
02 May 2024- 05 May 2024

赤外～テラヘルツの波長帯の電磁波センシング・制御
菅 哲朗
日本オプトメカニクス協会光センシング技術部会, Invited
11 Apr. 2024

プラズモニック光検出を利用したセンサの展開
菅 哲朗
Invited oral presentation, 2023年度 次世代半導体・センサ科学研究所シンポジウム, Invited
26 Feb. 2024

Plasmonic Infrared Silicon Semiconductor Sensor for Spectroscopy
Abubakr Eslam; 菅 哲朗
第21回赤外放射応用関連学会等年会
26 Jan. 2024

Spectroscopy for Continuous Light with a Submicron Grating Mems Cantilever Plasmonic Photodetector
Yuki Kaneda; Masaaki Oshita; Abubakr Eslam; Shiro Saito; Tetsuo Kan
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, Peer-reviewed, http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439550.pdf?arnumber=10439550
21 Jan. 2024
21 Jan. 2024- 21 Jan. 2024

Enhanced Photodetection Capabilities of Smaller Size 2D Au/PtSi/P-Si Nanohole Array-Based MIR Schottky Detector
Ashenafi A. Elyas; Tetsuo Kan
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Peer-reviewed
21 Jan. 2024

Electromagnetic Metamaterial Absorbers for Soil Property Evaluation
Soma Sato; Ken Sakabe; Hiroaki Onoe; Tetsuo Kan
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Peer-reviewed
21 Jan. 2024

Laser-Based Fabrication Process for Piezoresistive Cantilever Using Flash Laser Annealing
Rihachiro NakashimaTetsuo; KanHidetoshi Takahashi
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Peer-reviewed
21 Jan. 2024

利⽤者の秀でた成果紹介 電気通信⼤学 菅 哲朗 教授
菅 哲朗
武田先端知ビル20歳を祝う会, Invited
20 Dec. 2023

細く狭い環境におけるピロリ菌のユニークな遊泳様式
横濵さらら; 林原絵美子; 吉岡青葉; 島田佳季; 菅哲朗; 見理剛; 中根大介
日本微生物生態学会 第36回大会
27 Nov. 2023

サブミクロンピッチ回折格子を持つプラズモニック光検出器による連続的な波長光源を用いた分光
金田 裕喜; 齊藤 伊吹; 山岡 詩菜; 齋藤 史郎; 大下 雅昭; 菅 哲朗
第40回「センサ・マイクロマシンと応用システム」シンポジウム
06 Nov. 2023

土壌特性評価のための電磁メタマテリアル吸収体
佐藤 蒼馬; 坂部 拳; 尾上 弘晃; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

土壌特性評価に向けた等方性メタマテリアルの反射特性評価
谷原渉; 佐藤蒼馬; 尾上弘晃; 菅哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

ガラス基板上を伝搬する表面プラズモン共鳴のウエハ側壁でのショットキー障壁を用いた検出
大下 雅昭; 鈴木 紳一; 正本 和人; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

スプリットリング共振器上のゲルの膨潤を利用した水分量センシング
能任史也; 佐藤蒼馬; 尾上弘晃; 菅哲朗
第14回マイクロナノ・ナノ工学シンポジウム
06 Nov. 2023

表面プラズモン共鳴式光検出器を用いた分光法における応答性の定量検証
野口瑛矢; 金田裕喜; 大下雅昭; 斎藤史郎; 菅哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

高周波変調光源下でのPtSi/p-Siベースのショットキー型中赤外線検出器の安定性向上
Ashenafi Abadi Elyas; Abubakr Eslam; Masaaki Oshita; Tetsuo Kan
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

Mo及びTiを用いた低障壁化プラズモニックショットキー光検出器による室温近赤外光検出
Abubakr Eslam; Elyas Ashenafi; 大下 雅昭; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

電流検出型表面プラズモン共鳴化学量センサの小型システム化 の研究
小澤 徹也; 鈴木 紳一; 今井 雄貴; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

細菌のべん毛巻き付き運動解析のためのマイクロ流体デバイス
島田 佳季; 吉岡 青葉; 中根 大介; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

金回折格子構造による電流検出型表面プラズモン共鳴センサの生体分子計測への適用
今井 雄貴; 鈴木 紳一; Abubakr Eslam; 瀧 真清; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

電流検出型表面プラズモンセンサの温度依存性の研究
宇梶 尚弥; 今井 雄貴; 小澤 徹也; 菅 哲朗
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

可食素材のみで構成されたワイヤレス消化器官センサ
冨田 健太朗; 稲見 文香; 阪部 拳; 菅 哲朗; 尾上 弘晃
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

環境負荷の少ない分解性材料を用いたワイヤレス土壌尿素センサ
田名網 優; 阪部 拳; 菅 哲朗; 尾上 弘晃
第14回マイクロ・ナノ工学シンポジウム
06 Nov. 2023

共生細菌はドリル運動で狭小通路を突破する
吉岡 青葉; 菅 哲朗; 菊池 義智; 中根 大介
第61回日本生物物理学会年会
04 Nov. 2023

MICROFLUIDIC CHANNELS FOR ANALYSIS OF FLAGELLAR WRAPPING MOTION OF BACTERIA
Yoshiki Shimada; Aoba Yoshioka; Daisuke Nakane; Tetsuo Kan
Oral presentation, English, The 27th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2023), Peer-reviewed
15 Oct. 2023
15 Oct. 2023- 21 Oct. 2023

粘性と狭小空間が誘起するピロリ菌のドリル運動
横濵さらら; 林原絵美子; 島田佳季; 菅哲朗; 見理剛; 中根大介
第17回細菌学若手コロッセウム
17 Aug. 2023

Si Plasmonic MEMS device for infrared sensing
Masaaki Oshita; Elyas Ashenafi Abadi; Tetsuo Kan
Oral presentation, English, 13th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META2023), Invited, Peer-reviewed
18 Jul. 2023
18 Jul. 2023- 21 Jul. 2023

円二色性を高めるスパイラルメタマテリアル構造の研究
丸山晃平; 水名京; 小菅拓也; 武田湧希; 岩瀬英治; 菅哲朗
令和5年度E部門総合研究会 マイクロマシン・センサシステム研究会
30 Jun. 2023
30 Jun. 2023- 01 Jul. 2023

電流検出型SPR化学量センサの小型システム化の研究
小澤徹也; 鈴木紳一; 菅哲朗
ロボティクス・メカトロニクス 講演会 2023
28 Jun. 2023
28 Jun. 2023- 01 Jul. 2023

環境センシング用メタマテリアル
佐藤蒼馬; 尾上弘晃; 菅哲朗
ロボティクス・メカトロニクス 講演会 2023
28 Jun. 2023
28 Jun. 2023- 01 Jul. 2023

べん毛の巻き付け運動を行う微生物の運動解析に適したマイクロ流路の構築
島田佳季; 吉岡青葉; 中根 大介; 菅 哲朗
ロボティクス・メカトロニクス 講演会 2023
28 Jun. 2023
28 Jun. 2023- 01 Jul. 2023

視覚刺激と触覚刺激による感情制御の実現可能性の研究
河上響; 村上和也; 菅哲朗; 小泉直也; 新竹純
ロボティクス・メカトロニクス 講演会 2023
28 Jun. 2023
28 Jun. 2023- 01 Jul. 2023

金回折格子構造による電流計測型SPRセンサの生体分子計測への適用
今井雄貴; 鈴木紳一; 瀧真清; 菅哲朗
ロボティクス・メカトロニクス 講演会 2023
28 Jun. 2023
01 Jul. 2023

ISOTROPIC DEGRADABLE METAMATERIAL FOR ENVIRONMENTAL SENSING
Tatsuya Yano; Gaku Furusawa; Hiroaki Onoe; Tetsuo Kan
Oral presentation, English, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Peer-reviewed
25 Jun. 2023
25 Jun. 2023- 29 Jun. 2023

NEAR-INFRARED GAS SPECTROSCOPY BASED ON PLASMONIC PHOTODETECTOR APPLIED FOR MULTIPLE GAS SPECIES
Utana Yamaoka; Masaaki Oshita; Yuuki Kaneda; Shiro Saito; Tetsuo Kan
Oral presentation, English, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Peer-reviewed
25 Jun. 2023
25 Jun. 2023- 29 Jun. 2023

WIRELESS URINE MONITORING WITH PASSIVE ANNTENA USING SPLIT RING METAMATERIAL
Ashitaka Kurita; Gaku Furusawa; Hiroaki Onoe; Tetsuo Kan
Oral presentation, English, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Peer-reviewed
25 Jun. 2023
25 Jun. 2023- 29 Jun. 2023

NANO-WIDTH ZIGZAG FLEXURE STRUCTURES FOR HIGHLY TUNABLE GRATING PITCH
Atsuya Kiryu; Gaku Furusawa; Oshita Masaaki; Tetsuo Kan
Oral presentation, English, Actuators and Microsystems (Transducers 2023), Peer-reviewed
25 Jun. 2023
25 Jun. 2023- 29 Jun. 2023

WIRELESS SOIL PH SENSING USING ISOTROPIC DEGRADABLE ARRAY SENSOR
Ken Sakabe; Tetsuo Kan; Hiroaki Onoe
Oral presentation, English, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Peer-reviewed
25 Jun. 2023
25 Jun. 2023- 29 Jun. 2023

Symbiotic bacteria break through the host's narrow gate by flagellar wrapping
Aoba Yoshioka; Tetsuo Kan; Yoshitomo Kikuchi; Daisuke Nakane
English, Cordon Research Conference (Animal-Microbe Symbioses)
18 Jun. 2023
18 Jun. 2023- 23 Jun. 2023

GHz帯におけるMg等方性メタマテリアルの反射特性評価
矢野 達也,古澤 岳, 尾上 弘晃,菅 哲朗
Oral presentation, Japanese, 電気学会全国大会
23 Mar. 2022
21 Mar. 2022- 23 Mar. 2023

Microfluidics Devices for Analyzing Bacterial Behavior
菅 哲朗
Invited oral presentation, 第96回日本細菌学会総会, Invited
16 Mar. 2023
16 Mar. 2023- 18 Mar. 2023

プラズモニック分光素子による物質スペクトルの測定
齊藤 伊吹; 金田 裕喜; 山岡 詩菜; 大下 雅昭; 齋藤 史郎; 菅 哲朗
Oral presentation, 日本機械学会 関東支部 講演会
16 Mar. 2023
16 Mar. 2023- 17 Mar. 2023

生分解材料で構成されたリモート計測用等方性メタマテリアル
藤澤 壮斗; 栗田 朝可; 古澤 岳; 菅 哲朗
Oral presentation, 日本機械学会 関東支部 講演会
16 Mar. 2023
16 Mar. 2023- 17 Mar. 2023

SIDE WALL DETECTION TYPE SPR SENSOR WITH GOLD GRATING ON GLASS
Masaaki Oshita; Shinichi Suzuki; Kazuto Masamoto; Tetsuo Kan
Poster presentation, English, The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Peer-reviewed
Jan. 2023
Jan. 2023 Jan. 2023

A STABLE MIR PHOTODETECTOR BASED ON 2D PTSI/P-SI NANOHOLE ARRAYS
Ashenafi A. Elyas; Masahiko Shiraishi; Tetsuo Kan
Poster presentation, English, The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Peer-reviewed
Jan. 2023
Jan. 2023 Jan. 2023

TWISTED AND CONTACTED AU MICRO-RODS 3D CHIRAL METAMATERIALS WITH CIRCULAR DICHROISM VIA AN ABSORPTIVE ROUTE IN LONG-WAVELENGTH INFRARED
Gaku Furusawa; Natsuki Kanda; Ryusuke Matsunaga; Tetsuo Kan
Poster presentation, English, Peer-reviewed
Jan. 2023
Jan. 2023 Jan. 2023

UNIQUE DISPERSION RELATION FOR PLASMONIC PHOTODETECTORS WITH SUBMICRON GRATING
Yuki Kaneda; Masaaki Oshita; Utana Yamaoka; Shiro Saito; Tetsuo Kan
Poster presentation, English, Peer-reviewed
Jan. 2023
Jan. 2023 Jan. 2023

切り紙構造を用いた格子間隔可変な回折格子
桐生 敦哉; 古澤 岳; 菅 哲朗
第13回マイクロ・ナノ工学シンポジウム
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

プラズモニック分光素子による連続スペクトルの分光の研究
金田 裕喜; 大下 雅昭; 山岡 詩菜; 齋藤 史郎; 菅 哲朗
第13回マイクロ・ナノ工学シンポジウム
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

遠赤外領域で円二色性を示す薄膜
古澤 岳; 菅 哲朗
第13回マイクロ・ナノ工学シンポジウム
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

プラズモニック光検出器を用いた分光法による複数種のガス計測
山岡 詩菜; 金田 裕喜; 齋藤史朗; 大下 雅昭; 菅 哲朗
第13回マイクロ・ナノ工学シンポジウム
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

生分解可能な環境センシングの為の水溶性メタマテリアルプローブ
栗田朝可; 古澤岳; 尾上弘晃; 菅哲朗
第39回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

不連続なAu回折格子を用いた電流検出型SPR センサ
鈴木紳一; 黒木亮太; 安永竣; 菅哲朗
第39回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

プラズモニック超小型分光素子のための静電変調機構
大下 雅昭; 齋藤 史朗; 菅 哲朗
第39回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
14 Nov. 2022
14 Nov. 2022- 16 Nov. 2022

ホソヘリカメムシの共生細菌は狭小空間をドリル戦車で泳ぐ
吉岡 青葉; 菅 哲朗; 菊池 義智; 中根 大介
日本微生物生態学会 第35回大会
31 Oct. 2022
31 Oct. 2022- 03 Nov. 2022

WIRELESS SOIL PH SENSING IN OUTDOOR ENVIRONMENT WITH PH- SELECTIVE FULLY-DEGRADABLE METAMATERIAL ANTENNA
Ken Sakabe, Tetsuo Kan, and Hiroaki Onoe
English, The 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2022)
23 Oct. 2022
23 Oct. 2022- 23 Oct. 2022

Grating-Based Surface Plasmon Resonance Sensor for Visible Light Employing a Metal/Semiconductor Junction for Electrical Readout
Tetsuo Kan
Oral presentation, English, JCK MEMS/NEMS 2022
16 Oct. 2022
16 Oct. 2022- 19 Oct. 2022

再構成分光法のための中赤外ディテクタ集積デバイス
安永 竣, 菅 哲朗
Oral presentation, Japanese, 日本機械学会2022年度年次大会
11 Sep. 2022
11 Sep. 2022- 14 Sep. 2022

ナノ構造を備えたシリコン製低障壁ショットキー中赤外光ディテクタ
白石 正彦, 菅 哲朗
Oral presentation, Japanese, 日本機械学会2022年度年次大会
11 Sep. 2022
11 Sep. 2022- 14 Sep. 2022

白色光源を用いた表面プラズモン共鳴式光検出器による分光の研究
金田裕喜, 大下 雅昭, 山岡 詩菜, 齋藤 史郎, 菅 哲朗
Poster presentation, Japanese, ロボティクス・メカトロニクス 講演会 2022
01 Jun. 2022
01 Jun. 2022- 04 Jun. 2022

Si Plasmonic device for infrared photodetection and application for sensor devices
Tetsuo Kan
Invited oral presentation, English, KBCS spring conference, Invited, International conference
19 May 2022
18 May 2022- 20 May 2022

可視光を用いた表面照射による電流検出型表面プラズモン共鳴センサ
黒木亮太, 鈴木紳一, 安永 竣, 菅 哲朗
Oral presentation, Japanese, 電気学会全国大会
23 Mar. 2022
21 Mar. 2022- 23 Mar. 2022

MEMS力センサによるVR環境下における怒りの定量化
渡部 里菜, 山岡 詩菜, 小泉 直也, 菅 哲朗
Oral presentation, Japanese, 日本機械学会関東支部第28期講演会
13 Mar. 2022

Reconfigurable Plasmonic Photodetector Integrated with Electrostatic Actuator For Spectrometry
Masaaki Oshita; Shiro Saito; Tetsuo Kan
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), IEEE, http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699706.pdf?arnumber=9699706
09 Jan. 2022
09 Jan. 2022- 09 Jan. 2022

Current Detection SPR Sensor Using Discontinuous Au Grating For Compact Chemical Sensor
Shinichi Suzuki; Ryota Kuroki; Shun Yasunaga; Tetsuo Kan
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), IEEE, http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699665.pdf?arnumber=9699665
09 Jan. 2022
09 Jan. 2022- 09 Jan. 2022

Ingestible Wireless Capsule Sensor Made from Edible Materials for Gut Bacteria Monitoring
Ayaka Inami; Tetsuo Kan; Hiroaki Onoe
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), IEEE, http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699577.pdf?arnumber=9699577
09 Jan. 2022
09 Jan. 2022- 09 Jan. 2022

RECONFIGURABLE PLASMONIC PHOTODETECTOR INTEGRATED WITH ELECTROSTATIC ACTUATOR FOR SPECTROMETRY
Masaaki Oshita; Shiro Saito; Tetsuo Kan
English, 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), IEEE, Miniaturized spectrometers enable spectrometry on limited space, and they have been actively studied for various applications. Although various methods have been proposed to miniaturize spectrometer, conventional spectrometer consist of multiple filters and photodetectors, which limits the reduction of the footprint. Here, we report a reconfigurable plasmonic photodetector integrated with electrostatic actuator for spectrometry. In this paper, we investigated whether spectroscopy is possible using this structure in wavelength range from 1240 nm to 1310 nm. The simplicity of this structure presents potential to be adapted in micro-spectrometers.
2022
2022 2022

Silicon MEMS sensors employing electrical detection of plasmon
Tetsuo Kan
Nominated symposium, English, VNAJ Conference 2020, Invited, International conference
28 Nov. 2021

土壌状態リモート計測のためのGHzメタマテリアルセンサ
末次 涼平,矢野 達也, 古澤 岳,尾上 弘晃,菅 哲朗
Oral presentation, Japanese, 第12回マイクロナノ工学シンポ
09 Nov. 2021

GHz帯における等方性メタマテリアルの反射特性評価
矢野 達也,古澤 岳, 尾上 弘晃,菅 哲朗
Oral presentation, Japanese, 第12回マイクロナノ工学シンポ
09 Nov. 2021

生体分子検出のための小型表面プラズモン共鳴センサの研究
黒木 亮太,菅 哲朗, 鈴木 紳一,安永 峻
Oral presentation, Japanese, 第12回マイクロナノ工学シンポ
09 Nov. 2021

生分解性土壌pHセンサの分解特性評価
阪部 拳,稲見 文香, 菅 哲朗,尾上 弘晃
Oral presentation, Japanese, 第12回マイクロナノ工学シンポ
09 Nov. 2021

プラズモニック超小型分光素子の波長分解能の評価
大下雅昭, 山本陽介, 齋藤史朗, 菅哲朗
Oral presentation, Japanese, 第38回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
09 Nov. 2021

再構成分光法のための特徴的な感度特性を有するプラズモニック中赤外ディテクタ
安永 竣, 菅 哲朗
Oral presentation, Japanese, 第38回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
09 Nov. 2021

遠赤外領域で片側円偏光吸収を示すシングルミクロンスケールの2層Auキラル構造
古澤岳, 関谷隆司, 中村浩昭, 菅哲朗
Oral presentation, Japanese, 第38回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
09 Nov. 2021

変形後の形状が調整可能な切り紙キラルメタマテリアル構造
桐生 敦哉、菅 哲朗、古澤 岳、矢野 達也
Oral presentation, Japanese, 日本機械学会2021年度年次大会
07 Sep. 2021

生分解性電磁メタマテリアルを用いた土壌 pHワイヤレスセンサ
堀 克紀、稲見 文香、菅 哲朗、尾上 弘晃
Oral presentation, Japanese, 日本機械学会2021年度年次大会
06 Sep. 2021

Split-Ring-Shaped Biodegradable pH Sensor for Wireless and Battery-Free Monitoring of Agricultural Fields
Katsutoshi Hori; Ayaka Inami; Tetsuo Kan; Hiroaki Onoe
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), IEEE, http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495592.pdf?arnumber=9495592
20 Jun. 2021
20 Jun. 2021- 20 Jun. 2021

Single-Micron Scale Two-Layer Micro AU Chiral Structure with Circulary Polarized Light Absorption in FIR Region
Gaku Furusawa; Takashi Sekiya; Hiroaki Nakamura; Tetsuo Kan
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), IEEE, http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495650.pdf?arnumber=9495650
20 Jun. 2021
20 Jun. 2021- 20 Jun. 2021

Reconstructive Spectrometer Based on Plasmonic Schottky Photodetector with MEMS Angular Modulator
Masaaki Oshita; Yosuke Yamamoto; Shiro Saito; Tetsuo Kan
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), IEEE, http://xplorestaging.ieee.org/ielx7/9495312/9495375/09495607.pdf?arnumber=9495607
20 Jun. 2021
20 Jun. 2021- 20 Jun. 2021

新しいMEMS光センサによる環境センシング技術の展開,
菅 哲朗
Invited oral presentation, Japanese, ロボティクス・メカトロニクス 講演会, Invited, Domestic conference
06 Jun. 2021

らせん状キラルメタマテリアルにおいて一様な立体変形をもたらす構造の研究
丸山晃平, 小菅拓也, 菅哲朗
Oral presentation, Japanese, 本機械学会 関東支部 第27期講演会
11 Mar. 2021

生分解性材料を用いた土壌pHワイヤレスセンサ
堀克紀, 稲見文香, 菅哲朗, 尾上弘晃
Oral presentation, Japanese, 日本機械学会 関東支部 第27期講演会
10 Mar. 2021

RECONSTRUCTIVE SPECTROMETER BASED ON PLASMONIC SCHOTTKY PHOTODETECTOR WITH MEMS ANGULAR MODULATOR
Masaaki Oshita; Yosuke Yamamoto; Shiro Saito; Tetsuo Kan
English, 2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), IEEE, Reconstructive spectrometers are intensively attracting attention because it reduces the size of a spectrometer. Reconstructive spectrometers, however. must have multiple photodetectors which have different photoresponse spectrum from each other. Here, we report a reconstructive spectrometer using a single plasmonic photodetector with a MEMS angular modulator. Using unique angular characteristic of plasmonic photodetector, incident spectrum can be reconstructed using signal of one photodetector, In this paper, we investigated spectrometer performance using the plasmonic photodetector in wavelength range from 1230 nm to 1330 nm, and its wavelength resolution was derived. The simplicity of this structure presents potential to be adapted in micro spectrometers.
2021
2021 2021

「血中成分の非侵襲連続超高感度計測デバイスおよび行動変容促進システムの研究開発」 の取組み状況について
菅哲朗
Nominated symposium, Japanese, MEMSセンシング＆ネットワークシステム展2020 研究開発プロジェクト成果報告会
10 Dec. 2020

検出波長を動的に変更可能なプラズモニック光検出器の分光用途への応用可能性
大下雅昭, 高橋 英俊, 安食 嘉晴, 菅 哲朗
Poster presentation, Japanese, 第11回マイクロ・ナノ工学シンポジウム
27 Oct. 2020

表面プラズモン共鳴式光検出器を用いた近赤外分光法によるガス検出
山本 陽介, 大下 雅昭, 深澤 真啓, 齋藤 史朗, 菅 哲朗
Oral presentation, Japanese, 第37回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
26 Oct. 2020

可視域で片側円偏光吸収特性を示す金ナノキラル構造
古澤岳, 関谷 隆司, 中村 浩昭, 菅 哲朗
Oral presentation, Japanese, 第11回マイクロ・ナノ工学シンポジウム
26 Oct. 2020

MEMSプラズモニック構造・電磁メタマテリアルの応答解析
菅哲朗
Nominated symposium, Japanese, 日本機械学会マイクロ・ナノ工学部門講習会｢COMSOLによるマルチフィジックス解析- 基礎からの実習と最新の活用事例紹介 -｣
14 Oct. 2020

プラズモニックMEMSによる新規光センサの研究紹介
Nominated symposium, Japanese, 産学連携DAY
29 Jul. 2020

背面光照射による表面プラズモン共鳴のためのMEMS回折格子構造
齋藤祥基, 菅 哲朗
Oral presentation, Japanese, 電気学会センサ・マイクロマシン部門総合研究会
06 Jul. 2020

プラズモニクスMEMSとコロナ下のラボ運営状況
菅哲朗
Nominated symposium, Japanese, 有機機能材料のリソグラフィ加工コンソーシアム－機能材料，マイクロナノ加工，バイオの融合－Nano/Micro Lithography Consortium for Organic Functional Materials
25 Jun. 2020

半導体プラズモニックセンサを用いた環境化学量計測小型センサ
菅哲朗
Nominated symposium, Japanese, 産学連携オープンイノベーション～アフターコロナへ向けた新たな共創～
24 Apr. 2020

ブロックコポリマーテンプレートへの極低温斜方蒸着による金ナノキラル構造の製作
古澤岳,菅哲朗
Oral presentation, Japanese, 日本機械学会関東支部第26期総会・講演会
16 Mar. 2020

角度可変MEMSプラズモニック光検出器を用いた分光機能の実証
大下 雅昭,高橋 英俊,菅 哲朗
Oral presentation, Japanese, 第67回応用物理学会春季学術講演会
12 Mar. 2020

金属ナノキラル構造を用いた薄型片側円偏光吸収フィルタ
古澤岳,関谷隆司,中村浩昭,菅哲朗
Invited oral presentation, Japanese, 第67回応用物理学会春季学術講演会
12 Mar. 2020

Plasmonics Based Photodetector Devices and Applications
Yosuke Yamammoto, Yoshiki Saito, Masaaki Oshita, Shun Yasunaga, Tetsuo Kan
English, Industry UCB UEC Keuo Workshop 2019
10 Dec. 2019
10 Dec. 2019- 10 Dec. 2019

Miniaturization of SPR Chemical Sensor Using Electrical Detection and Backside Illumination to Au grating
Yoshiki Saito, Tetsuo Kan
English, Industry UCB UEC Keuo Workshop 2019
10 Dec. 2019
10 Dec. 2019- 10 Dec. 2019

シリコンナノホール内の銅共鳴構造を用いた赤外線ディテクタ
安永 竣, 菅 哲朗, 高橋 英俊, 高畑 智之, 下山 勲
Poster presentation, Japanese, 第10回マイクロ・ナノ工学シンポジウム, Peer-reviewed
19 Nov. 2019

Si基板上金回折格への背面照射と電気的検出によるSPR化学量センサの小型化
齋藤祥基, 菅哲朗
Poster presentation, Japanese, 第10回マイクロ・ナノ工学シンポジウム, Peer-reviewed
19 Nov. 2019

シリコン型SPRセンサへの効率的な近赤外光導入のためのモスアイ構造
榎 隆宏, 齋藤 祥基, 菅 哲朗
Invited oral presentation, Japanese, 電気学会第36回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
19 Nov. 2019

角度可変 MEMS による検出波長走査可能なプラズモニック金回折格子型光検出器
大下 雅昭, 高橋 英俊, 菅 哲朗
Poster presentation, Japanese, 第10回マイクロ・ナノ工学シンポジウム, Peer-reviewed
19 Nov. 2019

小型デバイス領域とレンズ集光を使用したAu/Siナノアンテナ光検出器のS/N改善
小林和樹, 菅哲朗
Poster presentation, Japanese, 第10回マイクロ・ナノ工学シンポジウム, Peer-reviewed
19 Nov. 2019

機械的変形可能な3DキラルTHzメタマテリアル
小菅 拓也, 菅哲朗
Invited oral presentation, Japanese, 電気学会第36回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
19 Nov. 2019

MEMS技術を用いた赤外光向けセンサ・デバイスの展開
菅 哲朗, 安食 嘉晴
Invited oral presentation, Japanese, 日本赤外線学会代28回研究発表会, Invited
14 Nov. 2019

表面プラズモン共鳴式光検出型分光法を用いた近赤外ガス吸光計測
山本 陽介,出納 優,菅 哲朗
Poster presentation, Japanese, 日本機械学会ロボティクス・メカトロニクス講演会 2019
18 Oct. 2019

Au Nano-Spiral Structure for Circular Dichroic Filter in Visible Region
Gaku Furusawa, Takashi Sekiya, Hiroaki Nakamura, Tetsuo Kan
English, The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
23 Jun. 2019
23 Jun. 2019- 23 Jun. 2019

S/N Improvement of Au/Si Nano-Antenna Photodetector Using Small Device Area and Converging Lens
Kazuki Kobayashi ; Yoshiharu Ajiki ; Tetsuo Kan
English, The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
23 Jun. 2019
23 Jun. 2019- 23 Jun. 2019

Infrared Detector Using Organic Nano-Pillar Arrays
Yoshiharu Ajiki, Tetsuo Kan, Masayuki Yahiro, Akiko Hamada, Junji Adachi, Chihaya Adachi
English, The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
23 Jun. 2019
23 Jun. 2019- 23 Jun. 2019

Infrared Photodetector with Copper Infrared Resonator Placed in Nano-Hole Array on Silicon Substrate
Shun Yasunaga, Tetsuo Kan, Hidetoshi Takahashi, Tomoyuki Takahata and Isao Shimoyama
English, The 20th International Conference on Solid-State Sensors, Actuators and Microsystems
23 Jun. 2019
23 Jun. 2019- 23 Jun. 2019

Auナノスパイラル構造を用いた円二色性フィルム
古澤岳,関谷隆司,中村浩昭,菅哲朗
Poster presentation, Japanese, 日本機械学会ロボティクス・メカトロニクス講演会 2019
05 Jun. 2019

高効率光吸収ナノ構造と背面照射を用いた金/シリコン赤外光検出器の性能向上
小林 和樹,菅 哲朗
Poster presentation, Japanese, 日本機械学会ロボティクス・メカトロニクス講演会 2019, 広島市
05 Jun. 2019

S/N Improvement of Nano-cuboid Photodetector Using Combination of Small Device Area and Converging Lens
Kazuki Kobayashi and Tetsuo Kan
English, The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020)
18 Jan. 2019
18 Jan. 2019- 18 Jan. 2019

Si基板上金回折格子への背面照射によるSPR励起
齋藤 祥基, 菅 哲朗, 榎 隆宏
Poster presentation, Japanese, 第9回マイクロ・ナノ工学シンポジウム, Peer-reviewed
30 Oct. 2018

近赤外域を対象としたプラズモン光検出型分光法
出納 優, 大下 雅昭, Gaulier Thomas, 安食 嘉晴, 菅 哲朗
Poster presentation, Japanese, 第9回マイクロ・ナノ工学シンポジウム, Peer-reviewed
30 Oct. 2018

プラズモニック金回折格子を備えた振動MEMSによる近赤外分光器
大下 雅昭, 高橋 英俊, 菅 哲朗
Poster presentation, Japanese, 第9回マイクロ・ナノ工学シンポジウム, Peer-reviewed
30 Oct. 2018

MEMS Reconfigurable Chiral Metamaterial for Terahertz Frequency
English, CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS 2018 OMN2018, Invited
29 Jul. 2018
29 Jul. 2018- 29 Jul. 2018

Schottky barrier modulation for electronic shutter operation of Si based IR photodetector
Yoshiharu Ajiki, Tetsuo Kan
Japanese, The 18th IEEE International Conference on Nanotechnology (IEEE Nano)
23 Jul. 2018
23 Jul. 2018- 23 Jul. 2018

SPR検出のためのAu回折格子を備えたMEMSカンチレバーの振動を用いた近赤外分光器の小型化
大下雅昭, 高橋英俊, 菅哲朗
Oral presentation, Japanese, 日本機械学会関東支部 第24期総会・講演会
17 Mar. 2018

金回折格子を有するショットキー型光検出器による赤外分光システム
出納優, 大下雅昭, 菅哲朗
Oral presentation, Japanese, 日本機械学会関東学生会 第57回学生員卒業研究発表講演会
16 Mar. 2018

MEMSキラルメタマテリアル応答のTHz計測
樋口正紀, 王杉, 菅哲朗
Oral presentation, Japanese, 日本機械学会関東学生会 第57回学生員卒業研究発表講演会
16 Mar. 2018

金格子構造による電流検出型表面プラズモン共鳴化学量センサの研究
齋藤祥基, 石原拓哉, 菅哲朗
Oral presentation, Japanese, 日本機械学会関東学生会 第57回学生員卒業研究発表講演会
16 Mar. 2018

Current Detection Type SPR Sensor Using Au Grating and Backside Illumination
Yoshiki Saito, Yosuke Yamamoto, Tetsuo Kan, Takuya Tsukagoshi, Kentaro Noda, and Isao Shimoyama
English, Proceedings of the 32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2019)
27 Jan. 2018
27 Jan. 2018- 27 Jan. 2018

Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever
Masaaki Oshita; Hidetoshi Takahashi; Tetsuo Kan
2018 IEEE Micro Electro Mechanical Systems (MEMS), IEEE, http://xplorestaging.ieee.org/ielx7/8339522/8346457/08346648.pdf?arnumber=8346648
Jan. 2018
Jan. 2018 Jan. 2018

スパイラル管路とピエゾ抵抗型カンチレバー素子による角加速度センサ—Angular acceleration sensor with spiral gas channel and piezoresistive cantilever
高橋 英俊; 菅 哲朗; 中井 亮仁; 髙畑 智之; 下山 勲
Japanese, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], http://id.ndl.go.jp/bib/029881368
2018
2018 2018

金アンテナ構造によるプラズモン共鳴を用いた中赤外シリコンフォトディテクタ
菅哲朗, 安食嘉晴
Oral presentation, Japanese, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
01 Nov. 2017

金回折格子を有するショットキー型光検出器による近赤外分光器
陳文静, 菅哲朗, 安食嘉晴, 松本潔, 下山勲
Poster presentation, Japanese, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
01 Nov. 2017

自立構造型可変メタマテリアル
磯崎瑛宏, 菅哲朗, 高橋英俊, 松本潔, 下山勲
Poster presentation, Japanese, 第34回「センサ・マイクロマシンと応用システム」シンポジウム, Peer-reviewed
01 Nov. 2017

金回折格子を有するショットキー型光検出器による近赤外分光器
CHEN WenJing; 下山勲; 菅哲朗; 安食嘉晴; 松本潔
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201702279793124926
24 Oct. 2017
24 Oct. 2017- 24 Oct. 2017

自立構造型可変メタマテリアル
磯崎瑛宏; 菅哲朗; 高橋英俊; 松本潔; 下山勲
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201702254573144794
24 Oct. 2017
24 Oct. 2017- 24 Oct. 2017

Si Based MEMS Near-Infrared Photodetector and Application for Oxygen Saturation Measurement
Tetsuo Kan, Yukiko Maruyama, Yoshiharu Ajiki
English, IEEE International Conference on Cyborg and Bionic Systems (CBS 2017)
17 Oct. 2017
17 Oct. 2017- 17 Oct. 2017

MEMS赤外検出デバイスとその分光応用展開
菅哲朗
Invited oral presentation, Japanese, 平成29年度 第1回 SSSC（Shinshu Smart Spectrum Chip）研究会セミナー, Invited, 公益財団法人 長野県テクノ財団, 長野市ものづくり支援センター ５Ｆ 産学行交流室, http://www.tech.or.jp/head-office/seminar/cat2/ssscshinshu-smart-spectrum-chip/291-ssscshinshu-smart-spectrum-chip/
15 Sep. 2017

Silicon Based Mid-Infrared Photodetectors Using Plasmonics Gold Nano-Antenna Structures
Tetsuo Kan, Yoshiharu Ajiki
English, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
18 Jun. 2017
18 Jun. 2017- 18 Jun. 2017

Study on Blood Oxygen Saturation Measurement Using MEMS Near-Infrared Photodetetor
Yukiko Maruyama, Yoshiharu Ajiki, Tetsuo Kan
Poster presentation, Japanese, ROBOMECH 2017
11 May 2017

Si Near-Infrared Photodetector with Gold Grating for One Chip SPR Sensor
Takuya Ishihara, Tetsuo Kan
Poster presentation, Japanese, ROBOMECH2017
11 May 2017

MEMS Chiral Metamaterial
Tetsuo Kan
Invited oral presentation, Japanese, メタマテリアル第187委員会, Domestic conference
16 Dec. 2016

Au/Siナノピラーアレイを用いた近赤外光シリコン型フォトディテクタ—Near-Infrared Si Based Photodetector Using Au/Si Nano-Pillar Array
菅 哲朗; 安食 嘉晴; 松本 潔; 下山 勲
Japanese, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], http://id.ndl.go.jp/bib/028220990
Oct. 2016
Oct. 2016 Oct. 2016

Chirality Swithcable MEMS Spiral Metamaterial
Tetsuo Kan
Oral presentation, English, The First A3 Metamaterials Forum, International conference
05 Jul. 2016

Chiral Switchable Metamaterial with MEMS Reconfigurable Spiral in THz Frequency
Tetsuo Kan
English, Conference on Lasers and Electro-Optics (CLEO 2016)
05 Jun. 2016
05 Jun. 2016- 05 Jun. 2016

Silicon near infrared photodetector using organic crystalline nano-pillars
Yoshiharu Ajiki
Oral presentation, English, EMN Photodetectors, International conference
Jun. 2016

キラリティ切替可能なMEMSスパイラルメタマテリアルTHz応答解析
菅哲朗; 磯崎瑛宏; 根本夏紀; 神田夏輝; 小西邦昭; 高橋英俊; 五神真; 松本潔; 下山勲
Japanese, 応用物理学会春季学術講演会講演予稿集(CD-ROM), https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201602213708248712
03 Mar. 2016
03 Mar. 2016- 03 Mar. 2016

Si Process Compatible Near-Infrared Photodetector Using Au/Si Nano-Pillar Array
Tetsuo Kan , Y. Ajiki, K. Matsumoto, I. Shimoyama
English, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2016
Jan. 2016 Jan. 2016

Chiral Switchable THz Metamaterial with MEMS Reconfigurable Spirals
Tetsuo Kan; Akihiro Isozaki; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Hidetoshi Takahashi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama
English, 2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE, We proposed a chiral switchable metamaterial using MEMS technology in the terahertz frequency region. Deformation of a flat metal spiral unit of the metamaterial creates three-dimensional spirals, and symmetrical chiral switching of the spiral could be performed by selecting the deformation directions; upper or lower. Ellipticity modulations amplitude as large as +/- 28 degrees could be obtained in 1.08 THz, and optical responses were numerically analyzed.
2016
2016 2016

Au/Siナノピラーアレイを用いた近赤外光シリコン型フォトディテクタ
菅哲朗; 安食嘉晴; 松本潔; 下山勲
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201602210987219979
2016
2016 2016

可動MEMSスパイラル構造による偏光変調デバイス
菅哲朗; 磯崎瑛宏; 根本夏紀; 小西邦昭; 高橋英俊; 五神真; 松本潔; 下山勲; 神田夏輝
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201602219239185141
21 Oct. 2015
21 Oct. 2015- 21 Oct. 2015

Chiral THz tunable metamaterial with MEMS technology
Tetsuo Kan
English, The 5th Korea-Japan Metamaterial Forum, Invited
Jul. 2015
Jul. 2015 Jul. 2015

MEMS可変スパイラルメタマテリアルのテラヘルツ応答
KAN TETSUO; ISOZAKI AKIHIRO; KANDA NATSUKI; NEMOTO NATSUKI; KONISHI KUNIAKI; GONOKAMI MAKOTO; MATSUMOTO KIYOSHI; SHIMOYAMA ISAO
Japanese, 応用物理学会春季学術講演会講演予稿集(CD-ROM), http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201502235286766389
26 Feb. 2015
26 Feb. 2015- 26 Feb. 2015

3D STRUCTURAL FORMATION UTILIZING GLASS TRANSITION OF A RARYLENE FILM
KAN TETSUO; ISOZAKI AKIHIRO; TAKAHASHI HIDETOSHI; MATSUMOTO KIYOSHI; SHIMOYAMA ISAO
English, Tech Dig IEEE Micro Electro Mech Syst, http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201502233732529580
2015
2015 2015

A near infrared schottky photodetector using surface plasmon resonance of Au grating on a tilting mirror for spectroscopy
W. Chen, A. Isozaki, Tetsuo Kan , K. Matsumoto, I. Shimoyama
English, 2014 International Conference on Optical MEMS and Nanophotonics
Aug. 2014
Aug. 2014 Aug. 2014

Design and Fabrication of MEMS Tunable Metamaterials with Sub-micron Gap
ISOZAKI AKIHIRO; KAN TETSUO; TAKAHASHI HIDETOSHI; NEMOTO NATSUKI; KONISHI KUNIAKI; GONOKAMI MAKOTO; MATSUMOTO KIYOSHI; SHIMOYAMA ISAO; KANDA NATSUKI
Japanese, 電気学会マイクロマシン・センサシステム研究会資料, http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201402201568936970
27 May 2014
27 May 2014- 27 May 2014

Near Infrared Si Based Photodetector Array Using SPR on Au Grating
菅哲朗; 松本潔; 下山勲; 安食嘉晴
Japanese, 電気学会マイクロマシン・センサシステム研究会資料, https://jglobal.jst.go.jp/detail?JGLOBAL_ID=201402279432843579
27 May 2014
27 May 2014- 27 May 2014

テラヘルツ帯メタマテリアルにおけるSRRのカップリング現象
磯崎瑛宏; 菅哲朗; 高野恵介; 萩行正憲; 松本潔; 下山勲
Japanese, 応用物理学会春季学術講演会講演予稿集(CD-ROM), http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201402249911751275
03 Mar. 2014
03 Mar. 2014- 03 Mar. 2014

Traction force of smooth muscle cell during growth on a rigid substrate
U. G. Jung, T. Tsukagoshi, H. Takahashi, Tetsuo Kan , K. Matsumoto and I. Shimoyama
English, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2014
Jan. 2014 Jan. 2014

Near infrared photo-detector using self- assembled formation of organic crystalline nanopillar arrays
Y. Ajiki, Tetsuo Kan , M. Yahiro, A. Hamada, J. Adachi, C. Adachi, K. Matsumoto and I. Shimoyama
English, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2014
Jan. 2014 Jan. 2014

Tunable metamaterials by controlling sub-micron gap for the THz range
Akihiro Isozaki; Tetsuo Kan; Hidetoshi Takahashi; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama
English, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial. © 2014 IEEE.
2014
2014 2014

薄膜Si上に形成したMEMS可変メタマテリアルにおけるフレームの影響
磯崎瑛宏; 菅哲朗; 高橋英俊; 松本潔; 下山勲
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201402255971509171
2014
2014 2014

TUNABLE METAMATERIALS BY CONTROLLING SUB-MICRON GAP FOR THE THZ RANGE
ISOZAKI AKIHIRO; KAN TETSUO; TAKAHASHI HIDETOSHI; KANDA NATSUKI; NEMOTO NATSUKI; KONISHI KUNIAKI; KUWATA-GONOKAMI MAKOTO; MATSUMOTO KIYOSHI; SHIMOYAMA ISAO
English, Tech Dig IEEE Micro Electro Mech Syst, http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201402251141674670
2014
2014 2014

LONG STROKE OUT-OF-PLANE ACTUATOR USING COMBINATION OF ELECTROSTATIC AND PNEUMATIC FORCES
KAN TETSUO; ISOZAKI AKIHIRO; TAKAHASHI HIDETOSHI; MATSUMOTO KIYOSHI; SHIMOYAMA ISAO
English, Tech Dig IEEE Micro Electro Mech Syst, http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201402208208618263
2014
2014 2014

構造変形による可変スパイラルメタマテリアル
菅哲朗; 磯崎瑛宏; 根本夏紀; 小西邦昭; 五神真; 松本潔; 下山勲; 神田夏輝
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), Institute of Electrical Engineers of Japan, http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201302238514745510
05 Nov. 2013
05 Nov. 2013- 05 Nov. 2013

Fabrication and experimental evaluation of MEMS spiral metamaterial for tunable THz optical activity
Tetsuo Kan , A. Isozaki, N. Kanda, N. Nemoto, K. Konishi, M. Kuwata-Gonokami, K. Matsumoto, and I. Shimoyama
English, Metamaterials 2013
Sep. 2013
Sep. 2013 Sep. 2013

Wavelength-selective silicon near infrared photodetector using surface plasmon resonance enhancement
W. J. Chen. Tetsuo Kan , Y. Ajiki, K. Matsumoto, and I. Shimoyama
English, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII
Jun. 2013
Jun. 2013 Jun. 2013

Double-layer wire grid polarizer for improving extinction ratio
A. Isozaki, Tetsuo Kan , K. Takano, M. Hangyo , K. Matsumoto, and I. Shimoyama
English, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII
Jun. 2013
Jun. 2013 Jun. 2013

Spiral metamaterial for tunable circular dichroism
Tetsuo Kan; Akihiro Isozaki; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama
English, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), We propose an electrostatically actuated spiral structures as a metamaterial for circularly polarized light in Terahertz (THz) frequency. Actuation of the spiral structures changes their geometry, and produces a tunable chirality resulting in circular dichroism, which is the differential absorption between the left and right circularly polarized light. Results of the THz-spectroscopy confirmed that the ON/OFF of circular dichroism was achieved with the proposing structures. © 2013 IEEE.
2013
2013 2013

A piezoresistive cellular traction force sensor
U. G. Jung; H. Takahashi; T. Kan; K. Matsumoto; I. Shimoyama
English, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), This paper presents a rigid piezoresistive sensor to measure cellular traction forces. The traction forces on a rigid substrate such as bone (10∼30 [GPa]) are still unknown. Our approach of the traction force measurement is not by an observation [1-4] but by a resistance change of the piezo-resistor due to the deformation of the rigid sensor (spring constant: 900 nN/μm). Because of its high sensitivity with sub-μN resolution, we were able to measure the traction forces on the rigid substrate. The stiffness of the proposed sensor was 10 times larger than that of previous works. We demonstrated that the traction forces generated by fibroblast were 0.7 μN when two cells adhered to the sensor. © 2013 IEEE.
2013
2013 2013

Quantitative evaluation of the influence of dopaminergic neuron on flapping locomotion
K. Azuma; H. Takahashi; T. Kan; J. Tanimura; K. Ito; K. Matsumoto; I. Shimoyama
English, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), This paper reports on quantitative evaluation of influence of dopamine neurons on the flight locomotion of a fruit fly (Drosophila menanogaster). The aerodynamic force was measured by MEMS triaxial forcesensor. We compared the aerodynamic force of the genetically modified flies whose dopamine neurons (DDCII) are functionally blocked with that of the wild type ones. The peak aerodynamic force generated by wild type flies was controlled smoothly. By contrast, the peak aerodynamic force generated by genetically modified flies showed rough fluctuation. The Peak variability of the wild type flies and genetically modified flies were 0.06 ± 0.04 and 0.18 ± 0.14 [-] (Average ± S.D.), respectively. The result indicated that the DDCII-expressing dopamine neurons were necessary to control their flapping flight. © 2013 IEEE.
2013
2013 2013

Measurement Method of Light Transmittance of Layered Metal-Dielectric Metamaterial
Akihiro Isozaki; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
English, 2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), IEEE, We propose a measurement method of light transmittance of metamaterials by directly contacting the metamaterial on a Si photodiode. Our measurement method enables direct detection of not only the propagation wave component but also the evanescent wave component through the metamaterial. In this paper, we fabricated a layered metal-dielectric metamaterial composed of Ag/Al2O3 layers on the Si photodiode. The transmittance property of evanescent wave was measured. This result indicates that our measurement system detects evanescent wave transferred through the fabricated metamaterial.
2013
2013 2013

エラストマ上に配置したナノ粒子ペアを用いた歪センサ
菅哲朗; 松本潔; 下山勲
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201202299417021968
22 Oct. 2012
22 Oct. 2012- 22 Oct. 2012

Particle sensor using an ultra- thin piezo resistive cantilever
H. Takahashi, Tetsuo Kan , K. Matsumoto, I. Shimoyama
English, The 7th IEEE Annual IEEE International Conference on Nano/ Micro Engineered and Molecular Systems (NEMS 2012)
Mar. 2012
Mar. 2012 Mar. 2012

Particle sensor using an ultra-thin piezo resistive cantilever
Hidetoshi Takahashi; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
English, The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012)
Mar. 2012
Mar. 2012 Mar. 2012

Carbon dioxide detection by surface plasmon resonance with ionic liquid
K. Ishizu, Tetsuo Kan , Y. Takei, H. Takahashi, K. Matsumoto, and I. Shimoyama
English, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2012
Jan. 2012 Jan. 2012

Triaxial force sensor with strain concentration notch beam for measurement of insect flight force
K. Azuma, H. Takahashi, Tetsuo Kan , K. Matsumoto, and I. Shimoyama
English, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2012
Jan. 2012 Jan. 2012

Functionalized micro bead with liquid-core Parylene-shell structure
H. Aoki, N. Binh-Khiem, Tetsuo Kan , K. Matsumoto, and I. Shimoyama
English, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2012
Jan. 2012 Jan. 2012

Double-Layer Split-Ring-Resonator Array Fabricated Using Scalloping Structure
A. Isozaki; T. Kan; K. Takano; M. Hangyo; K. Matsumoto; I. Shimoyama
English, 2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), IEEE
2012
2012 2012

TRIAXIAL FORCE SENSOR WITH STRAIN CONCENTRATION NOTCH BEAM FOR MEASUREMENT OF INSECT FLIGHT FORCE
K. Azuma; H. Takahashi; T. Kan; K. Matsumoto; I. Shimoyama
English, 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), IEEE, This paper reports on the triaxial force measurement during flapping flight of a fruit fly (Drosophila melanogaster). The total flight force was measured by a triaxial force sensor. The sensor consists of a cantilever probe, two sensing beams and four wiring beams. The total size of the sensor was 2 mm x 3 mm x 0.5 mm. A fruit fly was attached to the tip of the cantilever probe. The triaxial forces were measured when the fruit fly flapped. The measured force varied in synchronization with the flapping frequency of 240 Hz. The maximum forces in both lift and thrust directions were approximately 40 mu N.
2012
2012 2012

CARBON DIOXIDE DETECTION BY SURFACE PLASMON RESONANCE WITH IONIC LIQUID
K. Ishizu; T. Kan; Y. Takei; H. Takahashi; K. Matsumoto; I. Shimoyama
English, 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), IEEE, We propose a carbon dioxide (CO2) gas sensor using an SPR (surface plasmon resonance) sensing scheme with an ionic liquid. In this study, we used [EMIM][BF4] as an ionic liquid. The permittivity of the liquid increased when it absorbs CO2 gas. This permittivity change was detected by the SPR sensing scheme. We confirmed that our proposed sensor was able to measure CO2 gas with a concentration as low as 700 ppm.
2012
2012 2012

FUNCTIONALIZED MICRO BEAD WITH LIQUID-CORE PARYLENE-SHELL STRUCTURE
H. Aoki; N. Binh-Khiem; T. Kan; K. Matsumoto; I. Shimoyama
English, 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), IEEE, We report on the fabrication, properties and applications of liquid-core Parylene-shell micro bead (LCPS-bead). Functionalized liquid substances and liquid mixtures are usually used as reagents or indicators. When these chemicals are used in biochemical measurements where liquids are often abundant in the ambience, they tend to absorb or mix with the surrounding liquid, and thus change their properties and functionalities. In order to eliminate this disadvantage, we proposed the liquid encapsulated beads. The LCPS-beads were fabricated in two-steps: 1) impregnating porous solid beads with functionalized liquid, 2) encapsulating the beads with Parylene film. We showed that the proposed method provided efficient encapsulating shell to protect the core-liquid from surrounding solvents, thus it enables long time use of the liquid function in the solvents. We demonstrated two applications of the LCPS-beads: micro bead type temperature sensor and pH indicator bead.
2012
2012 2012

サイドウォールドーピングを用いたピエゾ抵抗型三軸力センサ
菅哲朗; 高橋英俊; 青山雄一郎; 竹井裕介; 野田堅太郎; 松本潔; 下山勲
Japanese, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=201102288381537602
26 Sep. 2011
26 Sep. 2011- 26 Sep. 2011

Nanoprobe electrodes cut by physical stretch of parylene-insulated carbon nanotube bridges
A. Inaba, Y. Takei, Tetsuo Kan , K. Matsumoto, and I. Shimoyama
English, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
Jun. 2011
Jun. 2011 Jun. 2011

Micro bead type temperature sensor with ratiometric fluorescence dyes encapsulated by Parylene
H. Aoki, Tetsuo Kan , N. Binh-Khiem, K. Matsumoto, and I. Shimoyama
English, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Jan. 2011
Jan. 2011 Jan. 2011

Micro suction cup array for wet/dry adhesion
N. Thanh- Vinh, H. Takahashi, Tetsuo Kan , K. Noda, K. Matsumoto, and Shimoyama
English, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Jan. 2011
Jan. 2011 Jan. 2011

A gas sensor based on viscosity change of ionic liquid
K. Ohsawa, H. Takahashi, K. Noda, Tetsuo Kan , K. Matsumoto, and I. Shimoyama
English, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Jan. 2011
Jan. 2011 Jan. 2011

A GAS SENSOR BASED ON VISCOSITY CHANGE OF IONIC LIQUID
Kazuharu Ohsawa; Hidetoshi Takahashi; Kentaro Noda; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
English, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), IEEE, We proposed a gas sensor based on viscosity change of ionic liquid. Our sensor consists of a piezoresistive cantilever immersed in an ionic liquid droplet. When the ionic liquid absorbs gas, the viscosity of the liquid decreases. Thus, the gas concentration is estimated by measuring the viscosity of the ionic liquid. We measured the viscosity change by monitoring the vibration amplitude of the immersed piezoresistive cantilever, which was vibrating in the ionic liquid by the magnetic field. The size of fabricated sensor chip was 1.5 mm x 1.5 mm x 0.3 mm. The cantilever and the volume of the ionic liquid droplet were 300 mu m x 200 mu m x 0.5 mu m and 0.4 mu l, respectively. We demonstrated that the vibration amplitude of the cantilever increased monotonically when acetone concentration rose from 0 to 15 mol%.
2011
2011 2011

MICRO BEAD TYPE TEMPERATURE SENSOR WITH RATIOMETRIC FLUORESCENCE DYES ENCAPSULATED BY PARYLENE
H. Aoki; T. Kan; N. Binh-Khiem; K. Matsumoto; I. Shimoyama
English, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), IEEE, We propose a sensor for measuring temperature of micro regions with ratiometric fluorescence dye beads encapsulated by Parylene. With the proposed method, we can fabricate encapsulated micro beads with constant size and dye concentration, which is suitable and preferred for precise sensing using fluorescence intensity measurement. This micro bead type sensor can be used for micro regions, which are difficult to apply conventional methods. This type of sensor is also easy to use to measure the temperature of not only positions located on the surface of the target object but also those located deep inside its volume. We demonstrated that this sensor could measure the temperature of micro regions with the accuracy ranging from +/- 0.8 degrees C to +/- 3.7 degrees C.
2011
2011 2011

MICRO SUCTION CUP ARRAY FOR WET/DRY ADHESION
N. Thanh-Vinh; H. Takahashi; T. Kan; K. Noda; K. Matsumoto; I. Shimoyama
English, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), IEEE, We propose a micro suction cup array for adhesion to both dry and wet surfaces. We measured the peel-off forces of a PDMS micro suction cup array, a PDMS flat-tip micro structure array and a flat PDMS pad from both wet and dry glass surfaces. When the glass surface was wet, the peel-off forces of a PDMS flat-tip micro pattern and a flat PDMS pad decreased by more than 1.7 times and 7.0 times, respectively. On the other hand, peel-off forces of a PDMS micro suction cup array increased by over 1.1 times when the glass surface was wet. Also, in both wet and dry conditions, an array of PDMS micro suction cup adhered stronger to a glass surface than a PDMS flat-tip micro pattern and a flat PDMS pad. Furthermore, we demonstrated that the adhesion of a suction cup array can be enhanced by miniaturizing the size of the cups.
2011
2011 2011

Optial measurement of strain using scattering from nanoparticle pairs on elastomer
T. Kan; K. Matsumoto; I. Shimoyama
English, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, This paper reports on a strain measurement method utilizing a scattering light by the nano-disk pairs on the elastomer sheet. It is known that the nano particle pair shows notable scattering characteristics that scattering spectrum is dependent on the gap distance. We make use of its characteristic by forming nano-disk pairs, which have 120-nm diameter, and 20 to 50-nm gap, on the PDMS sheet so that the gap distance can be tunable depending on the strain. The experimental results showed that the peak wavelength position of the scattering, and the peak shift directions had agreement with simulation results. Thus, we concluded that this method is useful for wireless measuring of the strain condition on small objects. © 2011 IEEE.
2011
2011 2011

SPR photo diode detector using transportation phenomenon of photon and electron coupling
Yoshiharu Ajiki; Tetsuo Kan; Kiyoshi Matsumoto; Isao Shimoyama
English, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, We propose a Surface Plasmon Resonance (SPR) photodiode (PD) detector using transportation phenomenon of photon and electron coupling. Since SPR is usually measured by reflection intensity, a large space for measuring the intensity is required. Thus, we develop an SPR detector, which can detect an SPR condition without measuring the reflection intensity as shown in Figure 1(a). In this paper, we show that an SPR can be measured by using the sensor. And we verified the SPR transportation phenomenon of photon and electron coupling from experimental results. © 2011 IEEE.
2011
2011 2011

Nanoprobe electrodes cut by physical stretch of Parylene-insulated carbon nanotube bridges
A. Inaba; Y. Takei; T. Kan; K. Matsumoto; I. Shimoyama
English, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, This paper reports the fabrication of nanoprobe electrodes based on carbon nanotubes (CNTs) for intracellular recording. The nanoprobe electrodes are cantilevers of single/bundle CNTs with insulating covers and exposed tips. Parylene-coated CNT bridges were cut into probes by physical stretch. CNTs were consequently exposed at the probe tips, because of low friction between CNTs. In this method, only wafer cutting by diamond pen is required to induce the physical stretch on the bridges. Parylene worked for stiffness enhancement of the probes as well as insulation. We achieved CNT probe electrodes of 1-10 m in length and 80-300 nm in diameter. By electrochemical impedance measurement, we confirmed that the fabricated electrode had an electrical connection to electrolyte through the exposed tip. © 2011 IEEE.
2011
2011 2011

Si nano-pillars for measuring traction force exerted by filopodia
Uijin Jung; Tetsuo Kan; Kenta Kuwana; Kiyoshi Matsumoto; Isao Shimoyama
English, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, This paper describes a Si nano-pillars array for measuring traction forces of one singular filopodium (100-300 nm in diameter). We fabricated the Si nano-pillar which was 110 nm in diameter and 1.5 m in length. Fibroblasts were cultured on the Si nano-pillar array. The filopodium of fibroblast adhered to pillar and dragged it. We calculated the traction force from the deflection of the pillar. When spring constants of Si nano-pillars were 1.7 N/m, 4.1 N/m and 6.6 N/m, averaged traction forces were 580 nN, 1 μN and 2.3 μN, respectively. The cells exerted the large forces with an increase in the stiffness of the pillar. We confirmed that the Si nano-pillar array was able to be used for measuring the traction forces of filopodium. © 2011 IEEE.
2011
2011 2011

Long- range SPR sensor with micro liquid channels for maintaining symmetrical condition
Tetsuo Kan , H. Kojo, E. Iwase, K. Matsumoto, and I. Shimoyama
English, The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences ( μ TAS 2010 )
Oct. 2010
Oct. 2010 Oct. 2010

Long-Range SPR Sensor with Micro Liquid Channels for Maintaining Symmetrical Condition
Tetsuo Kan; Hiroyuki Kojo; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
English, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (?TAS2010)
Oct. 2010
Oct. 2010 Oct. 2010

Integration method of bridging- structural CNTs into Si wafer by stamping transfer
Y. Takei, A. Hashimoto, Tetsuo Kan , E. Iwase, K. Matsumoto, and I. Shimoyama
English, International Conference on Electronics Packaging (ICEP 2010)
May 2010
May 2010 May 2010

Evaluation of Patterning by Microcontact Printing (2nd Report)
FUKUDA Katsumi; SHIMOYAMA Isao; ONOE Hiroaki; NOZAKI Tomoya; KAN Tetsuo; KOBAYASHI Mitsuo
Japanese, 講演論文集, 一般社団法人日本機械学会, http://ci.nii.ac.jp/naid/110008744343
Mar. 2010
Mar. 2010 Mar. 2010

Triaxial force measurement cantilever by sidewall-doping with rapid thermal diffusion
Y. Aoyama, N. Binh- Khiem, K. Noda, Y. Takei, Tetsuo Kan , E. Iwase, K. Matsumoto, and I. Shimoyama
English, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2010
Jan. 2010 Jan. 2010

Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy
U. G. Jung, K. Kuwana, H. Takahashi, Tetsuo Kan , Y. Takei, K. Noda, E. Iwase, K. Matsumoto, and I. Shimoyama
English, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2010
Jan. 2010 Jan. 2010

Force sensor based on metal nanoparticle
A. Koyama, Tetsuo Kan , E. Iwase, K. Matsumoto, and I. Shimoyama
English, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2010
Jan. 2010 Jan. 2010

TRIAXIAL FORCE MEASUREMENT CANTILEVER BY SIDEWALL-DOPING WITH RAPID THERMAL DIFFUSION
Yuichiro Aoyama; Nguyen Binh-Khiem; Kentaro Noda; Yusuke Takei; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
English, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, IEEE, We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59x10(-3) mu m(-1), 1.18x10(-3) mu m(-1) and 3.26x10(-4) mu m(-1) for x, y, and z-direction, respectively.
2010
2010 2010

FORCE SENSOR BASED ON METAL NANOPARTICLE
Asuto Koyama; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
English, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, IEEE, We propose a force sensor based on gold nanoparticles, which enable optical detection of force by measurement of the scattering light spectrum. Gold nanoparticles were dispersed on an elastomer sheet. The scattering spectrum changes due to strain were observed to investigate applicability of the sensor to force measurement. The force deforms the elastomer sensor body, and increases the interparticle distance of gold nanoparticles on the sheet. The increase of the interparticle distance gives rise to the scattering characteristic changes. We fabricated a prototype sensor using PDMS sheet and 40 nm of diameter gold nanoparticles. It was demonstrated that 21% strain induced 60% increase of scattering intensity of gold nanoparticles.
2010
2010 2010

PHOTO-RESPONSE COMPENSATED PIEZORESISTIVE CANTILEVER FOR USE IN FLUORESCENCE MICROSCOPY
Uijin Jung; Kenta Kuwana; Hidetoshi Takahashi; Tetsuo Kan; Yusuke Takei; Kentaro Noda; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
English, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, IEEE, This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.
2010
2010 2010

Nano-Pillar Structure for Sensitivity Enhancement of SPR Sensor
KAN Tetsuo; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
Japanese, The papers of Technical Meeting on Bio Micro Systems, IEE Japan, http://ci.nii.ac.jp/naid/10026065418
Jul. 2009
Jul. 2009 Jul. 2009

Nano-pillar structure for sensitivity enhancement of SPR sensor
Tetsuo Kan , K. Matsumoto, and I. Shimoyama
English, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
Jun. 2009
Jun. 2009 Jun. 2009

Nano-mechanical structure fabrication technology for highly integrated, complex MEMS
Tetsuo Kan, Y. Takei, H. Onoe, E. Iwase, T. Dohi, K. Matsumoto, and Shimoyama
English, International Conference on Electronics Packaging 2009, Invited
Apr. 2009
Apr. 2009 Apr. 2009

Nano-Mechanical Structure Fabrication Technology for Highly Integrated, Complex MEMS
Tetsuo Kan; Yusuke Takei; Hiroaki Onoe; Eiji Iwase; Tetsuji Dohi; Kiyoshi Matsumoto; Isao Shimoyama
English, International Conference on Electronics Packaging 2009 (ICEP2009)
Apr. 2009
Apr. 2009 Apr. 2009

Micro liquid prism
Y. Yoshihata, A. Takei, N. Binh- Khiem, Tetsuo Kan , E. Iwase, K. Matsumoto, I. Shimoyama
English, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, Sorrento
Jan. 2009
Jan. 2009 Jan. 2009

Integration of bridging- structural SWNTs on flexible PDMS sheet by stamping transfer
Y. Takei, Tetsuo Kan , E. Iwase, K. Matsumoto, and I. Shimoyama
English, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Jan. 2009
Jan. 2009 Jan. 2009

INTEGRATION OF BRIDGING-STRUCTURAL SWNTS ON FLEXIBLE PDMS SHEET BY STAMPING TRANSFER
Yusuke Takei; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama
English, IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), IEEE, This paper describes an integration method of bridging-structural single-walled carbon nanotubes (SWNTs) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield (97.8 %) and accuracy (position error < 100 nm). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.
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2009
2009 2009

MICRO LIQUID PRISM
Y. Yoshihata; A. Takei; N. Binh-Khiem; T. Kan; E. Iwase; K. Matsumoto; I. Shimoyama
English, IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), IEEE, This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400 mu m in diameter and whole size was smaller than 1mm(3) was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.
2009
2009 2009

Planar Near-Infrared Surface Plasmon Resonance Sensor with Grating Coupler and Si Prism
KAN Tetsuo; TSUJIUCHI Naoko; IWASE Eiji; MATSUMOTO Kiyoshi; SHIMOYAMA Isao
Japanese, JSME annual meeting, 一般社団法人日本機械学会, http://ci.nii.ac.jp/naid/110007659606, We have developed a Si microfabrication based SPR (Surface Plasmon Resonance) sensor chip equipped with Si prisms and an optical grating for sensor miniaturization. The Si prism structure was used to introduce the Near-Infrared light (λ = 1550 nm) to the sensing surface and generating the evanescent light there. Smooth prism slope was fabricated by utilizing (111) planes on the (100) plane of single crystalline Si wafer by anisotropic etching, giving small 200-μm prism array with 54.74° slope angle. We also used the optical grating with about 400-μm-pitch to manipulate an SPR dip position s...
Aug. 2008
Aug. 2008 Aug. 2008

Tunable SPR coupler by flexible polymer grating
Tetsuo Kan , N. Binh- Khiem, K. Matsumoto, I. Shimoyama
English, IEEE 21st International Conference on Micro Electro Mechanical Systems
Jan. 2008
Jan. 2008 Jan. 2008

Experimental analysis of liposome water two phase flow in micro channel for localizing reaction system using liposome
Y. Ichikawa, Tetsuo Kan , H. Onoe, E. Iwase, K. Matsumoto, I. Shimoyama
English, The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
Oct. 2007
Oct. 2007 Oct. 2007

Nano- pattern replication using Parylene thin film for optical applications
Tetsuo Kan , K. Matsumoto, I. Shimoyama
English, IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)
Jan. 2007
Jan. 2007 Jan. 2007

Measurement of light intensity field with a fluorescent bead cantilever
Tetsuo Kan , K. Hoshino, K. Matsumoto, I. Shimoyama
English, 19th IEEE International Conference on Micro Electro Mechanical Systems
Jan. 2006
Jan. 2006 Jan. 2006

Sub- micron aperture plate for intracellular calcium measurement
Tetsuo Kan , K. Matsumoto and I. Shimoyama
English, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Jun. 2005
Jun. 2005 Jun. 2005

Cell-culture plate with sub-micron aperture array for near-field fluorescent measurement
Tetsuo Kan , K. Matsumoto and I. Shimoyama
English, 17th IEEE International Conference on Micro Electro Mechanical Systems
Jan. 2004
Jan. 2004 Jan. 2004

微小集光プローブを用いた細胞用蛍光計測システム
菅哲朗; 松本潔; 下山勲
Japanese, センサ・マイクロマシンと応用システムシンポジウム講演概要集, http://jglobal.jst.go.jp/detail.php?from=API&JGLOBAL_ID=200902287185680630
23 Jul. 2003
23 Jul. 2003- 23 Jul. 2003

Thin-film waveguide with lens effect terminal for optical sensing device
T. Kan; K. Matsumoto; I. Shimoyama
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE, IEEE, http://xplorestaging.ieee.org/ielx5/8460/26644/01189749.pdf?arnumber=1189749
Jan. 2003
Jan. 2003 Jan. 2003

Analysis system of non-tethered insect behavior elicited by multi-modal stimuli
Kan T; Nishida K; Yasuda T; Simoyama I; Kanzakii R
Japanese, ロボティクス・メカトロニクス講演会講演概要集, The Japan Society of Mechanical Engineers, http://ci.nii.ac.jp/naid/110002503171
Jun. 2001
Jun. 2001 Jun. 2001

Basics of Mechanical and Intelligent Systems Engineering
Apr. 2023 - Present
The University of Electro-Communications

Mechatronics basic experiment
Apr. 2023 - Present
The University of Electro-Communications

Mechatronics
Apr. 2023 - Present
The University of Electro-Communications

計測工学
2022 - Present

Precision and Micro Engineering
Apr. 2023 - May 2023
Waseda University

マイクロ工学
2022
Waseda University

Precision and Micro Engineering
2022
Waseda University

メカトロニクス基礎実験A,B/知能機械工学基礎実験第一, 二
2022

機械知能システム学専攻基礎
2022

Mechatronics
2022

マイクロ工学
2021
Waseda University

計測工学
2021

メカトロニクス基礎実験B
2021

メカトロニクス基礎実験A
2021

機械知能システム学専攻
2021

メカトロニクス
2021

Basic Experiments of Mechatronics A or Mechanical Engineering and Intelligent Systems Laboratory,Advanced Ⅰ
2019

Gradute International Jointly Offered Academic Training
2019
本科目は本学との海外の協定大学との間で別途、取り決められた協働教育プログラムなどに基づいて、本学の学生が連携大学に派遣され、また連携大学から本学が受け入れた学生が滞在先で関連分野の先端的専門課題に関して、研修活動を実施する。概ね1か月以上3ヶ月未満(研修時間180時間以上540時間未満)の派遣・受入期間の学生に関しては、目標とする研修課題に取り組み、2単位とする。

Instrumentation Engineering
2019

Advanced Robotics and Mechatronics Engineering
2019

Fundamental of Mechanical and Intelligent Systems Engineering
2019

Mechatronics
2019

Advanced Robotics and Mechatronics Engineering
2018

機械知能システム学専攻基礎
2018

メカトロニクス
2018

2022 - Present
IEEE

THE JAPAN SOCIETY OF APPLIED PHYSICS

THE JAPAN SOCIETY OF MECHANICAL ENGINEERS

電気学会

薄膜シリコンで形成する電流検出型ラベルフリー化学量センサの研究
旭硝子財団, 旭硝子財団研究助成プログラム（物理・情報分野・ステップアップ助成）, Principal investigator
Apr. 2025 - Mar. 2028

表面プラズモン共鳴小型半導体化学量センサのシステム化検証補助事業
公益財団法人ＪＫＡ, 機械振興補助事業 振興事業補助 研究補助, 複数年研究, Principal investigator
Apr. 2025 - Mar. 2027

消化管モニタリング用「完全」可食型カプセルセンサの ワイヤレス電磁波計測
菅哲朗
JST, 2024年度 A-STEP産学共同 ステージⅠ（育成フェーズ）, Coinvestigator
Dec. 2024 - Mar. 2027

生分解メタマテリアルを用いた環境ワイヤレスセンシング
日本学術振興会, 科学研究費助成事業, 電気通信大学, 挑戦的研究（開拓）, Principal investigator, 24K21215
Jul. 2024 - Mar. 2027

Metasurface Si Hyperspectral Infrared Sensing Device
NEDO, 分野横断的公募事業 NEDO先導研究プログラム 未踏チャレンジ, 電気通信大学, 一般財団法人 マイクロマシンセンター, 産業技術総合研究所, Principal investigator
Jul. 2023 - Mar. 2026

Direct visualization of bacterial drill tank in vivo
中根 大介; 菅 哲朗
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Transformative Research Areas (B), The University of Electro-Communications, Grant-in-Aid for Transformative Research Areas (B), 22H05066
20 May 2022 - 31 Mar. 2025

Study on semiconductor based surface plasmon resonance chemical sensor
公益財団法人 JKA, The University of Electro-Communications, Principal investigator, 2023M-388
Apr. 2023 - Mar. 2025

微生物が動く意味～レーウェンフックを超えた微生物行動学の創生～
中根 大介
Transformative Research Areas（B), Coinvestigator, 22H05066
May 2022 - Mar. 2025

シリコン製赤外分光型ガスセンサの研究開発
NEDO, 官民による若手研究者発掘支援事業（共同研究フェーズ）, Principal investigator
Mar. 2022 - Mar. 2025

環境・食品情報モニタリングのための完全自然分解型ワイヤレスセンサ
NEDO, 官民による若手研究者発掘支援事業（マッチングサポートフェーズ）, Coinvestigator
01 Mar. 2022 - 31 Mar. 2024

Kirigami metamaterials for tunable optical properties
菅 哲朗; 神田 夏輝; 岩瀬 英治; 高橋 英俊
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), The University of Electro-Communications, Grant-in-Aid for Scientific Research (B), 本研究では、切り紙構造を利用することで、光学的な特性を大幅に変調可能なMEMS光学メタマテリアルを実現することを目的としている。光学メタマテリアルにおいて、従来から光共鳴構造の3次元形状変化や、フレキシブル基板の引っ張りによる共鳴体の配置間隔変化を利用した動的特性変調方法が研究されているが、限界があり実用的なデバイスに必要な変調機能は得られていない。そこで、2次元平面から立体構造を自由度高く作ることができる切り紙構造と融合し、構造的な制約をなくし、可変自由度が飛躍的に高い光学メタマテリアルを実現すための基礎技術を確立することを目的として実施する。
本年度は本年度はポリイミドフィルムなどを用いた、レーザー加工によるラージスケールでのユニット構造自由度拡張の検証を行うこと、そして、基板への切り紙加工によりAuxetic構造など、引っ張りに対して自由度高く新調する構造を試作することを計画していた。まず、前者について、同心円状の周期的な切り込みを持つ切り紙構造による面外変形の特性評価を行った。梁幅および切り込み長さを決める中心角が異なる試験片を作製し、面外変形を計測した結果、ドーム型、円錐型、先鋭型といった異なる面外変形の分布とできることを明らかにした。後者については、Auxetic構造の予備的な構造として、立体変形後の形状の勾配を調整可能な切り紙メタマテリアル構造について取り組んだ。構造的特性の評価として、切り込みの大きさを変えた複数のデバイスを製作し、それぞれの面外方向における外力に対する変形量を測定したところ、切り込みを大きくすることで変形量を増大させることが可能であるとわかった。さらに、切り込みの大きさを同一構造内で場所により変化させることで、本研究の目標に設定した変形形状の調整である、構造内で変形しやすい領域と変形しにくい領域を製作することが可能であるとわかった。, 21H01274
01 Apr. 2021 - 31 Mar. 2024

血中成分の非侵襲連続超高感度計測デバイス及び行動変容促進システムの研究開発
タニタ株式会社, Principal investigator, Domestic joint research
2022 - 2024

Plasmonic semiconductor sensor for visualization of virus distribution
菅 哲朗; 瀧 真清; 岩瀬 英治
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Research (Pioneering), The University of Electro-Communications, Grant-in-Aid for Challenging Research (Pioneering), 本研究は環境中の不可視なウイルスをリアルタイム検出する技術の実現を目的とする。このために、ラベルフリーで化学量計測が可能なプラズモニック半導体センサの研究を進め、ウイルスを高感度かつ選択的に検出する方法を実現する。センサを小型可搬にしてウイルスをその場認識可能とし、安全な生活環境の実現に貢献する技術を提供する。
2020年度の取り組みでは、、プラズモニック半導体センサの研究を進める上で重要となる、回折格子による効率的な背面照射による表面プラズモン励起構造の実現に取り組んだ。結果として、はSU-8を材料としたポリマー基板内部に、シリコン製のナノ回折格子を埋め込む構造を試作し、この構造上で背面照射により理論と整合する共鳴が得られた。一方で、この構造は試作プロセスの難度が非常に高いものであるため、より簡易的に試作可能な方法を2021年度に探索した。
具体的には、シリコン基板表面にトレンチを作り、そのトレンチ上に金属を成膜した構造であり、数値計算方法（RCWA法）により探索した。数値計算上では、背面からの照射に対する良好な共鳴、そして、センサ面の屈折率変化に対して適切な共鳴シフトを示すことから、有望構造として試作を進めた。ナノリソグラフィにより試作構造が完成した。現在、背面照射による応答測定は検証途上にあるが、表面側（試料面）側からの光照射によるSPR励起は確認しており、同時に応答の電流測定にも成功している。この結果を受けて、2022年度は背面照射からのSPR励起の確認、水試料に対するSPR応答の電流測定などを実施する。, 20K20533
30 Jul. 2020 - 31 Mar. 2023

電流検出型表面プラズモン共鳴センサにおける高感度信号検出技術基盤の研究
旭硝子財団, 物理･情報分野・研究奨励, Principal investigator
Apr. 2020 - Mar. 2022

NEDO IoT社会実現のための超微小量センシング技術開発／超微小量センシング技術開発／血中成分の非侵襲連続超高感度計測デバイス及び行動変容促進システムの研究開発
Principal investigator, Domestic joint research
2021 - 2022

Study on THz Spectroscopy Using MEMS Chiral Metamaterial
Kan Tetsuo
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), The University of Electro-Communications, Grant-in-Aid for Scientific Research (B), To realize vibrational circularly polarized light dichromatic spectroscopy in the THz frequency band, a MEMS tunable metamaterial was formed with a three-dimensional chiral optical resonator structure that resonates strongly with circularly polarized light. In order to achieve the goal, the MEMS tunable metamaterial needs to be deformed significantly, so we focused on the generation of a stable large deformation method, which has been a problem in the past. In order to realize a stable large deformation method, we focused on the elimination of instability from the deformation method and the excellent deformation characteristics of silicon, and came up with a driving method that mechanically pulls up the helical structure fabricated on a silicon substrate. We designed and fabricated a structure that enables large deformation, verified the amount and shape of deformation by the mechanical driving method, and clarified the response of the fabricated structure by calculation., 18H01843
01 Apr. 2018 - 31 Mar. 2021

半導体SPRセンサによるコロナウイルスのリアルタイム分布可視化技術開発
菅 哲朗
科学技術振興機構, 産学が連携した研究開発成果の展開 研究成果展開事業 研究成果最適展開支援プログラム(A-STEP) 産学共同(育成型), 国立大学法人電気通信大学, 本課題では、コロナウイルスのリアルタイム検出に適用可能な小型化学量センサを開発する。提案者がシーズ技術を有する半導体表面プラズモン共鳴(SPR)センサに対し、ウイルスを想定した検出感度・分解能の評価検証を行い、コロナウイルスの高感度センサを小型で実現するための実現性見極めを行う。小型センサが実現すれば、人の行動環境中に多数配置して、感染を経ずに空気中のウイルスをその場リアルタイムで検知できる。ウイルスの確認に要する時間の圧倒的短縮、空間分解能の飛躍的増大というイノベーションが生まれる。市販のSPR装置をベンチマークとし、提案センサの性能評価と疑似ウイルス検出能力を確認し、実現可能性を判断する。
2021 - 2021

NEDO IoT社会実現のための超微小量センシング技術開発／超微小量センシング技術開発／血中成分の非侵襲連続超高感度計測デバイス及び行動変容促進システムの研究開発
株式会社タニタ、富山県立大学、マイクロマシンセンター, Principal investigator, Domestic joint research
2019 - 2021

変形状態での微小流体制御と精密計測を可能とするマイクロソフトポンプの開発
公益財団法人精密測定技術振興財団, 助成金, Coinvestigator
Apr. 2020

化学量精密計測可能な電気検出型ラベルフリーセンサの研究
精密測定技術振興財団, 研究助成, Principal investigator
31 May 2019 - 31 Mar. 2020

3D MEMS photolithography using difference in refractive index of UV curable material
Takahashi Hidetoshi
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Research (Exploratory), Grant-in-Aid for Challenging Research (Exploratory), In this research, we developed a fabrication method of a three-dimensional (3D) microstructure via photolithography, which is one of the basic Micro Electro Mechanical Systems (MEMS) processes. We realized such 3D photolithography based on refractive-indices changes of UV curable material during photo-polymerization. When such material is used, UV light ray receives refraction effect during exposure, thus changes the light path and forms 3D photo-polymerized structure. Polyethylene Glycol Diacrylate (PEGDA), which is one of the common UV curable and biocompatible materials, was used in the fabrication process. We demonstrated the 3D lithography by fabricating PEGDA microneedle array, micro suction cup array, and so on., 18K18802
29 Jun. 2018 - 31 Mar. 2020

NEDO IoT社会実現のための超微小量センシング技術開発／超微小量センシング技術開発／血中成分の非侵襲連続超高感度計測デバイス及び行動変容促進システムの研究開発(令和元年度分増額)
Principal investigator, Domestic joint research
2019 - 2020

次世代人工知能・ロボット中核技術開発/(革新的ロボット要素技術分野)味覚センサ/ロボットに実装可能なMEMS味覚センサ
東京大学, Principal investigator, Domestic joint research
2018 - 2020

AU NANO-SPIRAL STRUCTURE FOR CIRCULAR DICHROIC FILTER IN VISIBLE REGION
NEC C&C財団, 海外渡航助成, Principal investigator
01 Apr. 2019

空間移動時のAI融合高精度物体認識システムの研究開発
Principal investigator, Domestic joint research
2018 - 2019

空間移動時のAI融合高精度物体認識システムの研究開発
Tetsuo Kan
一般財団法人マイクロマシンセンター、 国立大学法人東京大学、 国立研究開発法人産業技術総合研究所、オリンパス株式会社、株式会社デンソー, Principal investigator, Domestic joint research
2017 - 2018

Ultra Small Spectrometer Using Current Detection Method of Surface Plasmon Resonance
Tateishi Science and Technology Foundation, 研究助成, Principal investigator
22 May 2017

Thermal Actuation of MEMS Structure by Plasmonic Local Heating
Kan Tetsuo; ISOZAKI Akihiro
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research, Grant-in-Aid for Challenging Exploratory Research, Principal investigator, We proposed thermal actuation method of MEMS structures by local heating using a metal nano particle in order to develop a mechanical actuation well below the diffraction limit of light. Since an an-isotropic nano particle exhibits a polarization dependent light scattering characteristics, directional orientation nano particles can be arranged such that only one particular nano particle responds to one particular polarization state of the radiating light. Such arrangement can offer a polarization dependent local heating by a choice of a polarization state of the irradiation light, which can produce a selective micro structure actuation. In this study, we analyzed a scattering and heating characteristics of nano particle, and investigated a beam design of tri-axial actuation of MEMS structures., 26600058
01 Apr. 2014 - 31 Mar. 2017

THz Spiral Metamaterial for Active Polarization Modulation
Tetsuo Kan; KONISHI kuniaki; KANDA Natsuki
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (A), Grant-in-Aid for Young Scientists (A), Principal investigator, I have developed an active polarization filter which is able to switch the polarization state of the transmission light between the right and left circularly polarizations in terahertz (THz) frequency region where the wavelength is several hundred micrometer. Utilization of the polarization light, which presents an aligned oscillating electric field, enables us to obtain detailed material information at spectroscopic measurement. Moreover, dynamic switching of the polarizations provides further precise measurement. There has however been no active filter to switch the polarization states in THz region. I developed a THz metamaterial device to switch polarization states of the THz wave dynamically. The metamaterial is composed of array of reconfigurable metal spirals, which are 150-μm in diameter using Micro electro mechanical systems (MEMS) technology., 26706008
01 Apr. 2014 - 31 Mar. 2017

電流直接検出による回折格子型ポータブル近赤外SPR化学量センサ
財団法人 服部報公会, 研究助成
11 Oct. 2016

A MEMS cantilever for stimulus response measurements of single cells
SHIMOYAMA Isao; MATSUMOTO Kiyoshi; KAN Tetsuo; TAKEI Yusuke; NODA Kentaro; TAKAHASHI Hidetoshi
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A), The University of Tokyo, Grant-in-Aid for Scientific Research (A), In this project, a triaxial MEMS force sensing cantilever was studied. The sensor is equipped with a piezoresistor for force sensing at the root of the cantilever so that a quantitative mechanical stimuli could be applied to biological cells. The MEMS cantilever was made from an SOI wafer. A piezoresistive layer was formed by thermal diffusion on the surface of either cantilever root or the sidewall of the beam structure so that the corresponding three dimensional forces can be detected simultaneously. The resolution of the measurable force was as small as 1 uN for all the three directional forces, and the triaxial force could be independently measured with the device., 22241033
01 Apr. 2010 - 31 Mar. 2014

Strain sensor using LSPR of Au nano disk-pairs
KAN Tetsuo
Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B), The University of Tokyo, Grant-in-Aid for Young Scientists (B), Principal investigator, We propose a strain sensor utilizing light scattered by a pair of nano-disks onto an elastomer sheet. It is known that a scattering spectrum of a nano-disk pair exhibit a dependency on the gap between the disks by local surface plasmon resonance. We formed nano-disk pairs with a diameter of 100 nm and a gap of 20 nm on an elastomer sheet. Spectrum measurements were performed when the elastomer sheet was being pulled. It was found that the shape of the scattering spectrum altered depending on the gap distance between the disks of the pair. It was confirmed that the strain can be measured by an optical way, offering wireless measurements of in situ strain. Because this sensor can be miniaturized to be sub-micron size,invasion to the embedding media can be decreased during the strain measurement., 23710156
2011 - 2012

計測用デバイス
Patent right, 菅 哲朗, Eslam Abubakr, 宇梶 尚弥, Elyas Ashenafi, 齋藤 史朗, 鈴木 博紀, 特願2024-100707, Date applied: 21 Jun. 2024, 株式会社アイシン , 国立大学法人電気通信大学

赤外線検出素子およびその製造方法
Patent right, 下山 勲, 高畑智之, 高橋英俊, 塚越拓哉, 安永竣, 菅 哲朗, 特願2019-106325, Date applied: 06 Jun. 2019, 国立大学法人 東京大学, 国立大学法人電気通信大学, 特開2020-017718, Date announced: 30 Jan. 2020, 特許7394373, Date registered: 30 Nov. 2023

円二色性フィルタ、光学素子、有機エレクトロルミネッセンス素子、及び円二色性フィルタの製造方法
Patent right, 菅 哲朗, 古澤 岳, 関谷 隆司, 中村 浩昭, 特願2020-027348, Date applied: 20 Feb. 2020, 国立大学法人電気通信大学, 特開2020-160440, Date announced: 01 Oct. 2020, 特許7386525, Date registered: 16 Nov. 2023

角加速度センサ
Patent right, 下山 勲, ▲高▼畑 智之, 菅 哲朗, 高橋 英俊, 特願2018-173104, Date applied: 14 Sep. 2018, 国立大学法人 東京大学, 特開2020-046233, Date announced: 26 Mar. 2020, 特許第7152752号, Date registered: 04 Oct. 2022

分光用デバイス、分光器、及び分光測定方法
Patent right, 菅 哲朗, 大下 雅昭, 特願2018-007666, Date applied: 19 Jan. 2018, 国立大学法人電気通信大学, 特開2019-128157, Date announced: 01 Aug. 2019, 特許第7084020号, Date registered: 06 Jun. 2022

分光用デバイス、分光器、及び分光測定方法
Patent right, 菅哲朗、大下雅昭, 特願2018-007666, Date applied: 19 Jan. 2018, 特許7084020号, Date registered: 06 Jun. 2022

円二色性フィルタ、光学素子、ディスプレイ及び円二色性フィルタの製造方法
Patent right, 菅 哲朗, 古澤 岳, 矢野 達也, 関谷 隆司, 中村 浩昭, 特願2021-039476, Date applied: 11 Mar. 2021, 国立大学法人電気通信大学, 出光興産株式会社, 特開2021-189432, Date announced: 13 Dec. 2021

計測用デバイス及び計測センサ
Patent right, 菅 哲朗, 石原 拓哉, 下山 勲, 野田 堅太郎, 塚越 拓哉, 特願2017-092710, Date applied: 08 May 2017, 国立大学法人電気通信大学, 国立大学法人 東京大学, 特開2018-189523, Date announced: 29 Nov. 2018, 特許第6928931号, Date registered: 12 Aug. 2021

計測用デバイス及び計測センサ
Patent right, Tetsuo Kan, Takuya Ishihara, Isao Shimoyama, Kentaro Noda, Takuya Tsukagoshi, 特願2017-92710, Date applied: 08 May 2017, 特許6928931, Date registered: 12 Aug. 2021, Domestic

角加速度センサ
Patent right, 下山 勲, ▲高▼畑 智之, 菅 哲朗, 高橋 英俊, 特願2018-173104, Date applied: 14 Sep. 2018, 国立大学法人 東京大学, 特開2020-046233, Date announced: 26 Mar. 2020

分光用デバイス、分光器、及び分光測定方法
Patent right, 菅 哲朗, 大下 雅昭, 特願2018-007666, Date applied: 19 Jan. 2018, 国立大学法人電気通信大学, 特開2019-128157, Date announced: 01 Aug. 2019

ジャイロセンサ
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 野田 堅太郎, 阮 平謙, 宇佐美 貴徳, 特願2014-266582, Date applied: 26 Dec. 2014, 国立大学法人 東京大学, 特開2015-227863, Date announced: 17 Dec. 2015, 特許第6548067号, Date registered: 05 Jul. 2019

計測用デバイス及び計測センサ
Patent right, 菅 哲朗, 石原 拓哉, 下山 勲, 野田 堅太郎, 塚越 拓哉, 特願2017-092710, Date applied: 08 May 2017, 国立大学法人電気通信大学, 国立大学法人 東京大学, 特開2018-189523, Date announced: 29 Nov. 2018

光学素子（光学素子、光学素子製造方法及び光学素子製造装置）
Patent right, 特願2015-006342, Date applied: 16 Jan. 2015, 特許6404721, Date registered: 21 Sep. 2018

光検出器
Patent right, 安食 嘉晴, 下山 勲, 松本 潔, 菅 哲朗, 唐木 幸一, 佐々木 靖夫, 八尋 正幸, 濱田 明子, 安達 千波矢, 特願2013-109015, Date applied: 23 May 2013, オリンパス株式会社, 国立大学法人 東京大学, 国立大学法人九州大学, 特開2014-229779, Date announced: 08 Dec. 2014, 特許第6245495号, Date registered: 24 Nov. 2017

光検出器
Patent right, 特願2013-109015, Date applied: 23 May 2013, 特許6245495, Date registered: 24 Nov. 2017

塵埃センサ
Patent right, 特願2013-038248, Date applied: 28 Feb. 2013, 特許6153127, Date registered: 28 Jun. 2017

塵埃センサ
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 高橋 英俊, 特願2013-038248, Date applied: 28 Feb. 2013, 国立大学法人 東京大学, 特開2013-181983, Date announced: 12 Sep. 2013, 特許第6153127号, Date registered: 09 Jun. 2017

電磁波素子の製造方法
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 塚越 拓哉, 特願2011-154254, Date applied: 12 Jul. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2013-020152, Date announced: 31 Jan. 2013, 特許第6057271号, Date registered: 16 Dec. 2016

電磁波素子の製造方法
Patent right, 特願 2011-154254, Date applied: 12 Jul. 2011, 特許6057271, Date registered: 16 Dec. 2016

撮像装置及び撮像装置の作動方法
Patent right, 特願 2012-047057, Date applied: 02 Mar. 2012, 特許5975562, Date registered: 23 Aug. 2016

撮像装置及び撮像装置の作動方法
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 阮 平謙, 安食 嘉晴, 唐木 幸一, 特願2012-047057, Date applied: 02 Mar. 2012, オリンパス株式会社, 国立大学法人 東京大学, 特開2013-180120, Date announced: 12 Sep. 2013, 特許第5975562号, Date registered: 29 Jul. 2016

光学素子、光学素子製造方法及び光学素子製造装置
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 磯崎 瑛宏, 高橋 英俊, 山田 整, 出尾 隆志, 特願2015-006342, Date applied: 16 Jan. 2015, 国立大学法人 東京大学, トヨタ自動車株式会社, 特開2016-133530, Date announced: 25 Jul. 2016

撮像素子およびこれを用いた撮像装置
Patent right, 下山勲, 佐々木靖夫, 唐木幸一, 塚越拓哉, 安食嘉晴, 松本潔, 竹井裕介, 菅哲朗, 野田堅太郎, 高畑智之, 特願2011-154270, Date applied: 12 Jul. 2011, 特許5863094, Date registered: 16 Feb. 2016

撮像素子およびこれを用いた撮像装置
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 塚越 拓哉, 特願2011-154270, Date applied: 12 Jul. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2013-021569, Date announced: 31 Jan. 2013, 特許第5863094号, Date registered: 08 Jan. 2016

ジャイロセンサ
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 野田 堅太郎, 阮 平謙, 宇佐美 貴徳, 特願2014-266582, Date applied: 26 Dec. 2014, 国立大学法人 東京大学, 特開2015-227863, Date announced: 17 Dec. 2015

ガスセンサ
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 竹井 裕介, 高橋 英俊, 石津 光太郎, 本多 祐仁, 特願2012-004964, Date applied: 13 Jan. 2012, 国立大学法人 東京大学, オムロン株式会社, 特開2013-145137, Date announced: 25 Jul. 2013, 特許第5777063号, Date registered: 17 Jul. 2015

ガスセンサ
Patent right, 下山勲, 松本潔, 菅哲朗, 竹井裕介, 高橋英俊, 石津光太郎, 本多祐仁, 特願2012-4964, Date applied: 13 Jan. 2012, 特許5777063, Date registered: 17 Jul. 2015

流速センサ
Patent right, 下山勲, 松本潔, 高畑智之, 菅哲朗, 桑名健太 ,高橋英俊, グェンミンジューン, 特願2011-001917, Date applied: 07 Jan. 2011, 特許5656191, Date registered: 21 Jan. 2015

差圧センサ
Patent right, 下山勲, 松本潔, 高畑智之, 菅哲朗, 桑名健太, 高橋英俊, グェン ミン ジューン, 特願2012-554710, Date applied: 11 Jan. 2012, 特許5674167, Date registered: 09 Jan. 2015

差圧センサ
Patent right, 下山 勲, 松本 潔, ▲たか▼畑 智之, 菅 哲朗, 桑名 健太, 高橋 英俊, グェン ミン ジューン, 特願2012-554710, Date applied: 11 Jan. 2012, 国立大学法人 東京大学, 特許第5674167号, Date registered: 09 Jan. 2015

血圧センサシステム及びその血圧計測方法
Patent right, 下山勲, 松本潔,岩瀬英治, 高畑智之, 野田堅太郎, 顔光珠, 安食 嘉晴, 菅哲朗 , 竹井裕介, 橋 本温之, 特願2010-108746, Date applied: 10 May 2010, 特許5636731, Date registered: 10 Dec. 2014

光検出器
Patent right, 安食 嘉晴, 下山 勲, 松本 潔, 菅 哲朗, 唐木 幸一, 佐々木 靖夫, 八尋 正幸, 濱田 明子, 安達 千波矢, 特願2013-109015, Date applied: 23 May 2013, オリンパス株式会社, 国立大学法人 東京大学, 国立大学法人九州大学, 特開2014-229779, Date announced: 08 Dec. 2014

流速センサ
Patent right, 下山 勲, 松本 潔, ▲たか▼畑 智之, 菅 哲朗, 桑名 健太, 高橋 英俊, グェン ミン ジューン, 特願2011-001917, Date applied: 07 Jan. 2011, 国立大学法人 東京大学, 特開2012-145356, Date announced: 02 Aug. 2012, 特許第5656191号, Date registered: 05 Dec. 2014

血圧センサシステム及びその血圧計測方法
Patent right, 下山 勲, 松本 潔, 岩瀬 英冶, 野田 堅太郎, 顔 光珠, 菅 哲朗, 竹井 裕介, 橋本 温之, 安食 嘉晴, 特願2010-108746, Date applied: 10 May 2010, オリンパス株式会社, 国立大学法人 東京大学, 特開2011-234884, Date announced: 24 Nov. 2011, 特許第5636731号, Date registered: 31 Oct. 2014

光学素子及び撮像装置
Patent right, 下山勲, 松本潔, 高畑智之, 岩瀬英治, 菅哲朗, 特願2010-103566, Date applied: 28 Apr. 2010, 特許5445963, Date registered: 19 Mar. 2014

光学素子及び撮像装置
Patent right, 下山 勲, 松本 潔, ▲高▼畑 智之, 岩瀬 英治, 菅 哲朗, 特願2010-103566, Date applied: 28 Apr. 2010, 国立大学法人 東京大学, 特開2011-232606, Date announced: 17 Nov. 2011, 特許第5445963号, Date registered: 10 Jan. 2014

塵埃センサ
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 高橋 英俊, 特願2013-038248, Date applied: 28 Feb. 2013, 国立大学法人 東京大学, 特開2013-181983, Date announced: 12 Sep. 2013

撮像装置及び撮像方法
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 阮 平謙, 安食 嘉晴, 唐木 幸一, 特願2012-047057, Date applied: 02 Mar. 2012, オリンパス株式会社, 国立大学法人 東京大学, 特開2013-180120, Date announced: 12 Sep. 2013

近接場照明光学系、近接場光学顕微鏡および近接場光形成方法
Patent right, 塚越 拓哉, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 特願2012-031703, Date applied: 16 Feb. 2012, オリンパス株式会社, 国立大学法人 東京大学, 特開2013-167569, Date announced: 29 Aug. 2013

ガスセンサ
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 竹井 裕介, 高橋 英俊, 石津 光太郎, 本多 祐仁, 特願2012-004964, Date applied: 13 Jan. 2012, 国立大学法人 東京大学, オムロン株式会社, 特開2013-145137, Date announced: 25 Jul. 2013

Near-field optical microscope, near-field optical probe, and sample observation method
Patent right, Koichi Karaki, Kimihiko Nishioka, Yasuo Sasaki, Takuya Tsukagoshi, Yoshiharu Ajiki, Isao Shimoyama, Kiyoshi Matsumoto, Tetsuro Kan, Yusuke Takei, Kentaro Noda, Patent Publication Number: 20110321204, Date applied: 23 Jun. 2011, 8424111 (US Patent), Date registered: 16 Apr. 2013

ジャイロセンサ
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 塚越 拓哉, 特願2011-154257, Date applied: 12 Jul. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2013-019813, Date announced: 31 Jan. 2013

電磁波素子
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 塚越 拓哉, 特願2011-154254, Date applied: 12 Jul. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2013-020152, Date announced: 31 Jan. 2013

撮像素子およびこれを用いた撮像装置
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 塚越 拓哉, 特願2011-154270, Date applied: 12 Jul. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2013-021569, Date announced: 31 Jan. 2013

光学情報伝達素子及び光学情報伝達機構
Patent right, 下山 勲, 松本 潔, 高畑 智之, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 唐木 幸一, 佐々木 靖夫, 安食 嘉晴, 塚越 拓哉, 特願2011-154207, Date applied: 12 Jul. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2013-020147, Date announced: 31 Jan. 2013

SPRセンサとSPRセンサを搭載する検査システム
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 安食 嘉晴, 特願2011-102188, Date applied: 28 Apr. 2011, 国立大学法人 東京大学, オリンパス株式会社, 特開2012-233779, Date announced: 29 Nov. 2012

超高波数伝達素子およびそれを用いた近接場光学顕微鏡
Patent right, 唐木 幸一, 佐々木 靖夫, 塚越 拓哉, 安食 嘉晴, 下山 勲, 松本 潔, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 特願2011-076892, Date applied: 30 Mar. 2011, オリンパス株式会社, 国立大学法人 東京大学, 特開2012-211963, Date announced: 01 Nov. 2012

差圧センサ
Patent right, 下山 勲, 松本 潔, ▲たか▼畑 智之, 菅 哲朗, 桑名 健太, 高橋 英俊, グェン ミン ジューン, JP2012050321, Date applied: 11 Jan. 2012, 国立大学法人 東京大学, WO2012-102073, Date published: 02 Aug. 2012

流速センサ
Patent right, 下山 勲, 松本 潔, ▲たか▼畑 智之, 菅 哲朗, 桑名 健太, 高橋 英俊, グェン ミン ジューン, 特願2011-001917, Date applied: 07 Jan. 2011, 国立大学法人 東京大学, 特開2012-145356, Date announced: 02 Aug. 2012

流速センサ
Patent right, 下山 勲, 松本 潔, ▲たか▼畑 智之, 菅 哲朗, 桑名 健太, 高橋 英俊, グェン ミン ジューン, 特願2011-001918, Date applied: 07 Jan. 2011, 国立大学法人 東京大学, 特開2012-145357, Date announced: 02 Aug. 2012

近接場光学顕微鏡、及び試料観察方法
Patent right, 唐木 幸一, 西岡 公彦, 佐々木 靖夫, 塚越 拓哉, 安食 嘉晴, 下山 勲, 松本 潔, 菅 哲朗, 竹井 裕介, 野田 堅太郎, 特願2011-076697, Date applied: 30 Mar. 2011, オリンパス株式会社, 国立大学法人 東京大学, 特開2012-027005, Date announced: 09 Feb. 2012

血圧センサシステム及びその血圧計測方法
Patent right, 下山 勲, 松本 潔, 岩瀬 英冶, 野田 堅太郎, 顔 光珠, 菅 哲朗, 竹井 裕介, 橋本 温之, 安食 嘉晴, 特願2010-108746, Date applied: 10 May 2010, オリンパス株式会社, 国立大学法人 東京大学, 特開2011-234884, Date announced: 24 Nov. 2011

光学素子及び撮像装置
Patent right, 下山 勲, 松本 潔, ▲高▼畑 智之, 岩瀬 英治, 菅 哲朗, 特願2010-103566, Date applied: 28 Apr. 2010, 国立大学法人 東京大学, 特開2011-232606, Date announced: 17 Nov. 2011

血圧センサ、その製造方法及び血圧センサシステム
Patent right, 下山 勲, 松本 潔, 菅 哲朗, 岩瀬 英治, 光山 亜祟斗, 安食 嘉晴, 特願2009-291274, Date applied: 22 Dec. 2009, オリンパス株式会社, 国立大学法人 東京大学, 特開2011-130844, Date announced: 07 Jul. 2011

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